Fieldbus System

End Plate EX600-ED2-l EX600-ED3-l Power connector Model specification M12 (5-pin) plug 7/8 inch (5-pin) plug 24 VDC 10%, Class 2, 2 A 24 VDC 10%, 8 A Power supply (for Control/Input) Power supply (for Output) 24 VDC +10/5%, Class 2, 2 A 24 VDC +10/5%, 8 A Enclosure IP67 (Manifold assembly) Standards CE marking, UL (CSA), RoHS recognition Weight 0.4 lbs (170 g) 0.4 lbs (175 g) EX600-ED3-l

Industrial Filters

1250 100 150 25 (1B) 40 (1 1/2B) 50 (2B) 25 (1B) 20 (3/4B) 570 7 750 20 130 50 400 267.4 230 510 1175 1510 100 150 25 (1B) 40 (1 1/2B) 50 (2B) 25 (1B) 20 (3/4B) 570 7 1000 20 150 64 400 267.4 230 510 1440 1775 100 150 40 (1 1/2B) 50 (2B) 65 (2 1/2B) 40 (1 1/2B) 25 (1B) 620 9 500 20 150 54 445 318.5 240 560 935 1290 100 150 40 (1 1/2B) 50 (2B) 65 (2 1/2B) 40 (1 1/2B) 25 (1B) 620 9 750 20 175

Bag Filter

Material FGFC3-40 Carbon steel F-86S FN AL-79S AL-80S FGF3-40 FGFR3-40 FGFC3-40 159 115 3 10(4B) F-90S F-86S V#6500 210 175 115.4 19 18 FGF5-60 FGFS3-40 FGFR3-40 220 167 3 Stainless steel F-87S AL-79S AI-17S EB ES FGFL3-40 FGFS3-40 Note) 2 pieces are required per filter unit.

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

-12 FH341-16 FH440-03 FH44 -04 FH44 -06 FH44 -08 FH44 -10 FH44 -12 FH441-16 FH441-20 FH441-24 FH540-03 FH54 -04 FH54 -06 FH54 -08 FH54 -10 FH54 -12 FH541-16 FH640-03 FH64 -04 FH64 -06 FH64 -08 FH64 -10 FH64 -12 FH641-16 3/8 1/2 3/4 1 1 1/4 1 1/2 3/8 1/2 3/4 1 1 1/4 1 1/2 3/8 1/2 3/4 1 1 1/4 1 1/2 3/8 1/2 3/4 1 1 1/4 1 1/2 5 213 57 275 156 80 50 1.8 96 105 2 x M8 x 1.25 19 0 236 61 340 175

Return Filter FH100 Series

pressure indicator Blanking cap (65) A 2 x Rc (d) (34) C D C C IN OUT IN IN OUT OUT E (Element removal dimension) Differential pressure indicator Differential pressure indication switch B DRAIN (mm) d A B C D E F Weight (kg) Model FH100-06 FH100-08 FH100-10 FH100-12 FH100-16 FH100-20 FH100-24 3/4 102 90 35 200 290 2.5 1 104 1 1/4 110 100 45 265 380 4.3 1 1/2 144 150 128 52 299 430 6.8 2 2 1/2 175

Slider Type Ball Screw Drive/11-LEFS Series

portion Low particle generation grease 11LEFS 11LEFS Motor output/Size 100 W/40 200 W/60 400 W/60 Motor type AC servo motor (100/200 VAC) Electric specifications 11LEJS Encoder Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev) 25APower consumption [W] Note 7) Horizontal 45 65 210 Vertical 145 175

Intrinsically Safe Valve

37.1 L (Lead wire length) 81.5 Stations Stations 81.5 53.5 56.2 Max. 10 204.2 137.3 53.9 EB P EA X PE EB P EA X PE 170.6 50.1 66.9 Stations n 2 stations 3 stations 4 stations 5 stations 6 stations 7 stations 8 stations 9 stations 10 stations 11 stations 12 stations 13 stations 14 stations 15 stations 16 stations 17 stations 18 stations 19 stations 20 stations 391 L1 L2 61 80 99 118 137 156 175

Series AK1000

Specifications AK1702 1 to 30 psig (0.007 to 0.2 MPa) AK1720 5 to 200 psig (0.034 to 1.4 MPa) Select compatible materials of construction for the gas Vacuum to 3500 psig (24.1 MPa) 175 psig (1.2 MPa) 4500 psig (30.7 MPa) 8000 psig (55.2 MPa) 40 to 160F (40 to 71C) (No freezing) 1) 0.05 1 x 10-10 Pam3/sec NPT female, Compression 0.05 psig (0.00035 MPa) rise in delivery pressure per 100 psig

Exhaust Cleaner for Vacuum Pump AMV Series

SP ZCUK 0.015 Inlet pressure (MPa) AMJ AFJ 0.01 AMV AMV AMV15 AMV160 AMV75 AMV37 AMV6 AMV3 ZH -X185 0.005 Related Products 0 100 200 500 1,000 2,000 5,000 10,000 20,000 Flow rate (L/min [ANR]) Dimensions AMV3, 6, 15, 37 AMV 75, 160 B Exhaust Exhaust A A B Port size IN IN C E 8 x d Flange part Model Port size A 231 305 410 710 562 860 B 123 153 210 210 500 500 C 80.7 105.3 d 19 19 E 150 175

Series AP500

Ports 2 ports 4 ports Code 2PW 4PW r e w q w q 2PW 4PW Sample Order Number Port AP1702S e q FV4 FV4 FV4 w FV4 FV4 FV4 r qIN wOUT eGauge port (Inlet) rGauge port (Outlet) 2PW 4PW 4PW 0 40 0 V3 MPA Specifications AP1710 2 to 100 psig (0.014 to 0.7 MPa) Select compatible materials of construction for the gas Vacuum to 3500 psig (24.1 MPa) 175 psig (1.2 MPa) 4000 psig (27.6 MPa) 8000 psig (55.2

Pressure Sensor with M12 Connector, PRESSURE SWITCH, PSE100-560, 175 lb

Series CJ2 is auto switch capable Double acting, single rod, end lock cylinder, 16mm bore, Mounting types: basic, axial foot, front flange, double clevis, Standard strokes *: 15, 30, 45, 60, 75, 100, 125, 150, 175, 200, Auto switch capable, CYL, END LOCK, SW CAP, ROUND BODY CYLINDER

[mm] Note 6)Impact/Vibration resistance [m/s2] Note 7)Max. operating frequency [C.P.M]Operating temperature range [C]Operating humidity range [%RH]Weight [g]Motor sizeMotor typeEncoderRated voltage [V]Power consumption/ Standby power consumption when operating [W] Note 8)Max. instantaneous power consumption [W] Note 9)BasicCompactLEHS2069 to 227 to 175 to 80/5 to 50Slide screw + Wedge

[mm] Note 6)Impact/Vibration resistance [m/s2] Note 7)Max. operating frequency [C.P.M]Operating temperature range [C]Operating humidity range [%RH]Weight [g]Motor sizeMotor typeEncoderRated voltage [V]Power consumption/ Standby power consumption when operating [W] Note 8)Max. instantaneous power consumption [W] Note 9)BasicCompactLEHS2069 to 227 to 175 to 80/5 to 50Slide screw + Wedge

Series CJ2 is auto switch capable Double acting, single rod, end lock cylinder, 16mm bore, Mounting types: basic, axial foot, front flange, double clevis, Standard strokes *: 15, 30, 45, 60, 75, 100, 125, 150, 175, 200, Auto switch capable, CYL, END LOCK, SW CAP, ACTUATOR, CJ2 ROUND BODY CYLINDER, GC, 16MM CJ2 OTHERS (COMBO), .40417 lb

Series CJ2 is auto switch capable Double acting, single rod, end lock cylinder, 16mm bore, Mounting types: basic, axial foot, front flange, double clevis, Standard strokes *: 15, 30, 45, 60, 75, 100, 125, 150, 175, 200, Auto switch capable, CYL, END LOCK, SW CAP, ACTUATOR, CJ2 ROUND BODY CYLINDER, GC, 16MM CJ2 OTHERS (COMBO), .66750 lb

EXxx-OMS0026CN

. 1 / 2 3 DIN DIN 4 FE 5 () -27No.EX-OMS0026CN (1)EX600-ED21 24 V() 2 0 V() 3 24 V() 4 0 V() 5 FE (2)EX600-ED31 0 V() 2 0 V() 3 FE 4 24 V() 5 24 V() 2 SI IP67 -28No.EX-OMS0026CN EX600-ED2EX600-ED3M12(5 ) 7/8 (5 ) ( DC24 V 10 Class22 A DC24 V 108 A ( DC24 V +10/-5 Class22 A DC24 V +10/-58 A 1 IP67() -1050 -2060 3585RH() AC500 V1 FE DC500 V10 M FE CE UL(CSA)RoHS 170 g 175

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

CE marked CE marked Standard (EMC directive / RoHS directive), (EMC directive / RoHS directive) UL (CSA) Weight 170 g 175 g 170 g 1: All unused connectors must have a seal cap fitted. -32No.EX-OMX1011 Dimensions 26 EX600-ED2 EX600-ED2-2 26 -33No.EX-OMX1011 EX600-ED2-3 -34No.EX-OMX1011 EX600-ED3 EX600-ED3-2 -35No.EX-OMX1011 EX600-ED3-3 -36No.EX-OMX1011 EX600-ED4/ED5 26 EX600-ED4/ED5-2 26 -

EXxx-OMQ0015CN

EX600-ED2EX600-ED3No. 1 / 2 3 DIN DIN 4 FE 5 () -21No.EX-OMQ0015CN (1)EX600-ED21 24V() 2 0V() 3 24V() 4 0V() 5 FE (2)EX600-ED31 0V() 2 0V() 3 FE 4 24V() 5 24V() 2 2 SI IP67 -22No.EX-OMQ0015CN EX600-ED2EX600-ED3M12(5 ) 7/8 (5 ) DC24 V10 Class22 A DC24 V108 A DC24 V+10/-5 Class22 A DC24 V+10/-58 A IP67() -1050 -2060 3585RH() AC500 V1 FE DC500 V10M FE CE UL(CSA)RoHS 170 g 175

Fieldbus system Ethernet POWERLINK compatible SI unit

assembled) 1 Operating temperature range -10 to 50 oC Environment Storage temperature range -20 to 60 oC Operating humidity range 35 to 85%RH (No condensation) Withstand voltage 500 VAC for 1 minute between external terminals and FE Insulation resistance 500 VDC, 10 M min. between external terminals and FE Pollution degree Pollution degree 3 Standard CE marking, UL (CSA) , RoHS Weight 170 g 175