VQC

CAT.ES11-80 A 5-Port Solenoid Valve Series VQC NEW CONCEPT Connector Type Manifold Series VQC1000/2000/4000 Outstanding response times and long life Conforming to IP67 for protection from dust and moisture (Metal seal: Single type with light and surge suppressor) VQC1100: 10ms 2ms; 200 million cycles VQC2100: 20ms 2ms; 200 million cycles VQC4100: 17ms 3ms; 100 million cycles (Based on IEC529

C95Series

" SO, "63 a.5 25, 50, 75, 100,125, 150, 175, 200, 250.300, 350. 400. 450, 500 40 " !

CE

, 250, 300 131 90 27 16 45 49.5 64 M14 x 1.5 14 4.5 14 100, 125, 150, 175, 200, 250, 300, 400, 500 177 136 27 16 52 57 71.5 M14 x 1.5 24 5 14 200, 300, 500 193 144 32 20 64 71 85.5 M18 x 1.5 25.5 7 18 200, 300, 500 194 145 32 20 77 84 98.5 M18 x 1.5 21 7 18 T P L M N O Q X Z Bore size (mm) 32 40 50 63 41 34 5.5 M6 x 1 Rc 1/8 56 57.5 30 14 41 40 5.5 M6 x 1 Rc 1/8 62 64.5 30 14 49 50 6.6 M8

Stroke Reading Cylinder and Counter

, 250, 300 177 136 27 16 52 57 71.5 M14 x 1.5 24 5 14 100, 125, 150, 175, 200, 250, 300, 400, 500 200, 300, 500 193 144 32 20 64 71 85.5 M18 x 1.5 25.5 7 18 200, 300, 500 194 145 32 20 77 84 98.5 M18 x 1.5 21 7 18 T P L M N O Q X Z Bore size (mm) 32 40 50 63 1 8 Rc 41 34 5.5 M6 x 1 56 30 14 57.5 1 8 Rc 41 40 5.5 M6 x 1 62 30 14 64.5 1 4 Rc 49 50 6.6 M8 x 1.25 61.5 35 19 76.5 1 4 Rc 49 60

CJ5-S

RS Q G RS H A Relation of Liquid Entry and Sliding Distance Amount of liquid entry (g) x 15 RZQ 10 Standard cylinder MI W S Stainless steel cylinder 5 CEP1 0 50 100 150 200 Sliding distance (km) 250 300 CE1 Conditions Working fluid Air Pressure 0.5 MPa Liquid Water-soluble coolant Piston speed 200 mm/sec (60 cpm) CE2 ML2B Special scraper C J G5-S Exterior configuration reduces residual

CE

, 250, 300 131 90 27 16 45 49.5 64 M14 x 1.5 14 4.5 14 100, 125, 150, 175, 200, 250, 300, 400, 500 177 136 27 16 52 57 71.5 M14 x 1.5 24 5 14 200, 300, 500 193 144 32 20 64 71 85.5 M18 x 1.5 25.5 7 18 200, 300, 500 194 145 32 20 77 84 98.5 M18 x 1.5 21 7 18 T P L M N O Q X Z Bore size (mm) 32 40 50 63 41 34 5.5 M6 x 1 Rc 1/8 56 57.5 30 14 41 40 5.5 M6 x 1 Rc 1/8 62 64.5 30 14 49 50 6.6 M8

CJ5-S

RS Q G RS H A Relation of Liquid Entry and Sliding Distance Amount of liquid entry (g) x 15 RZQ 10 Standard cylinder MI W S Stainless steel cylinder 5 CEP1 0 50 100 150 200 Sliding distance (km) 250 300 CE1 Conditions Working fluid Air Pressure 0.5 MPa Liquid Water-soluble coolant Piston speed 200 mm/sec (60 cpm) CE2 ML2B Special scraper C J G5-S Exterior configuration reduces residual

CXT

Long Stroke Stroke range (mm) Y X Z Bore size (mm) 12 50, 75, 100 32 7.5 7.5 16 50, 75, 100 32 7.5 7.5 20 75, 100, 125, 150, 175, 200 41 9 9 25 75, 100, 125, 150, 175, 200, 250, 300 44 11 11 8-27-8 9 Platform Cylinder Series CXT Dimensions: 32, 40 (N) X + Stroke S + Stroke H 4-M8 x 1.25 4-8.7 through, counterbore 14 depth 8 HP Depth 12 HG 12 Back side 4-M10 x 1.5 depth 15 (N) T PA T MX d

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

300 500 700 Average speed Va mm/s 50 100 200 300 500 700 Average speed Va mm/s Collision speed V mm/s Note) Use average speed to calculate static moment.

48

Cylinder stroke [mm] Bore size Standard stroke [mm] 12 (10 x 2) 16 (12 x 2) 10, 20, 30, 50, 100 20 (16 x 2) 25 (20 x 2) 20, 30, 50, 100, 150 Port thread type Nil M thread 12 to 32 Rc 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) 40 to 100 TN NPT TF G 25, 50, 100, 150, 200 Refer to page 4 for intermediate strokes.

4-channel Flow Monitor ( compatible)

Current consumption 55 mA or less Protection Polarity protection Power supply voltage for sensor 1 Power supply voltage: 1.5 V Power supply current for sensor 2 Max.110 mA (However, the total power supply current of 4 input is 440 mA or less maximum) The total power supply current when used as an IO-Link device is 200 mA or less maximum Display accuracy (Linearity) 5.0%F.S.

HRX-OM-M090

Rated Rated Sensitivity voltage x size voltage current of leak [V] [A] current [mA] HRS012--10 HRS018--10 1-phase 100V AC(50Hz) 100 200 15 15 or 30 HRS01--10-T 1-phase 3 cores x Sharing 100V to 115V 14AWG (High pump head AC(60Hz) [Optional]) (3 cores x 2.0mm2) HRS012--20 HRS018--20 HRS024--20 1-phase 10 30 (including ground) 200, 200-230V AC 230 HRS0--20-T (50/60Hz) 15 30 (High pump head

HRX-OM-X071

Basic setting mode Main menu Alarm display menu Maintenance notif Power supply ON Circulating fluid outlet temperature Circulating fluid set temperature 200 ALm mANT 200 XXALM MENU MENU MENU / / / M no (N M circulating fluid return temp AL01 mT01 212 Alarm number (Alarm number minimum RET TEMP / / / M n mT02 AL02 014 Alarm number Circulating fluid outlet pressure PRESS / 79 Circulating fluid

MGP

MGP(kg) MGPM12100 (mm) (mm) 10 20 25 30 40 50 75 100 125 150 175 200 250 300 350 400 12 MGPM12 0.24 0.28 0.31 0.35 0.39 0.50 0.59 0.70 0.79 0.89 0.98 1.17 16 MGPM16 0.33 0.38 0.43 0.48 0.53 0.68 0.80 0.97 1.09 1.22 1.35 1.60 20 MGPM20 0.67 0.75 0.83 0.91 1.17 1.37 1.57 1.76 1.96 2.16 2.63 3.03 3.42 3.82 25 MGPM25 0.95 1.05 1.16 1.27 1.65 1.92 2.19 2.47 2.74 3.01 3.67 4.21 4.76 5.30 32 MGPM32

SL5200

Surface finish Ra max 10 in. (0.25 m) Standard 7 in. (0.18 m) 5 in. (0.13 m) Code 0 M V X Specification Standard Sub-atmospheric Code V3 L 1 H 2 4 10 40 -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 4000 psig -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa 0 to 1.4 MPa 0 to 3 MPa 0 to 7

AC

Q[l/min(ANR)] = X X 60 X C X D2 X W 4 X 106 (P2 + 0.101) 0.101 Q[l/min(ANR)] = X X 60 X 1 = 841 X 1002 X 200 4 X 106 (0.8 + 0.101) 0.101 Refer to p.1.13-2 for flow rate characteristics table. Select booster regulator size from flow characteristic stable.

Flow Control Equipment

Male thread Suitable screw torque (Nm) Hexagonal width (mm) Adjustable spanner nominal (mm) 1/4 4.5 M3 M5 10/32-UNF 100 1/6 8 150 7 to 9 14 1/8 200 12 to 14 17 1/4 200 22 to 24 21 3/8 200 28 to 30 24 1/2 1Nm=10.2kgf/cm Tightening torque for lock nuts Caution qSuitable screw torque for a hexagon lock nut is shown in the table below.

MGF

5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 300mm Graph 4 l = 200mm Graph 3 v = 150mm/s or less Graph 7 v = 200mm/s or less Graph 8 20 300 300 200 200 MGF100 MGF100 20 100 100 MGF100 10 50 40 50 40 MGF63 MGF100 MGF63 Load weight m0 (kg) Load weight m0 (kg) Load

MK

(mm) Operating direction Piston area (cm2) RHC 1.0 0.7 0.5 0.3 80 56 40 24 0.8 R 12 6 MTS 110 77 55 33 1.1 H 150 105 75 45 1.5 R 16 8 CC 200 140 100 60 2 H 200 139 100 60.8 2 R 20 12 298 208 149 90.2 3 H 370 258 185 112 3.7 R 25 12 490 341 245 149 4.9 H Order Made 600 418 300 182 6 R Made to Order 32 16 800 557 400 243 8 H 1050 731 525 319 10.5 R Refer to the p.5.4-1 regarding made to order

3 Port Solenoid Valve Series VQ100 1

C (+) () Lead wire color Lead wire color B () Reset 100 VAC, 200 VAC 100 VAC, 200 VAC AC Yellow Yellow Set Blue Red A A Single solenoid (AC) Latching solenoid (AC) A Set A Blue Red COM Blue Red SOL. C C SOL. SOL. C COM SOL. Gray Gray Reset Single B C B Reset Latching Note 1) Single: No polarity ON: Orange light lights. Note 2) Setting side energizing: Orange light lights.