3 Port Solenoid Valve/

25 Series Thread Port size Category Residual Pressure Release Valve VP542-X536 2 8.9 3/8" Rc, G, NPT Residual Pressure Release Valve VP742-X536 1/2" 15.1 Dual Residual Pressure Release Valve VP544-X538 6.5 3/8" Rc, G, NPT Dual Residual Pressure Release Valve VP744-X538 1/2" 10.3 Dual Residual Pressure Release Valve with Soft Start-up Function VP544-X555 3/8" Rc, G, NPT Dual Residual Pressure

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

56 56 56 16 (20) (4 port) 16 (20) (2 port) 16 (20) (4 port) 16 (20) (2 port) B A PB B A PB 62 (72) 75 (86) 38 50 62 (72) 75 (86) 14 12 50 38 14 12 Manual override PA P R2 R1 49 (64) 49 (64) Manual override PA 2-8 mounting hole Indicator light P R2 R1 2-8 mounting hole Indicator light 49 (64) 49 (64) M12 connector M12 connector 126.5 (139.5) 126.5 (139.5) PE port PE port PE port PE port

ZSE30A(F)/ISE30A

85 g 43 g C3602 (electroless nickel plating) O-ring: HNBR Piping port Including lead wire with connector (3 cores, 2 m) 70 g 74 g 32 g 71 g 75 g 33 g 73 g 77 g 35 g 75 g 79 g 37 g 73 g 77 g 35 g 75 g 79 g 37 g Weight Including lead wire with connector (4 cores, 2 m) Excluding lead wire with connector Option/Part No.

0.01

4-pin pre-wired connector, Conductor O.D.: 0.90 mm, Insulator O.D.: 1.72 mm Front wiring (Electrical entry 21) Terminal block box (Centralized wiring type) Individual wiring type (body only): 253 g, common wiring type (body only): 250 g, Terminal block box: 205 g, lead wire: 278 g, connecting bracket with sealing for additional station: 4 g CE, RoHS Weight Standards Note 1) Refer to Relation

Refrigerated Air dryer Series IDU/IDF

Note 5) Spare part for auto drain INA-20-41-04 is AD44-x445. Operation Principles Compressed air inlet Compressed air outlet IDU11D, 11C, 15C Humid hot air entering the air dryer is cooled in the after-cooler. It then enters the reheater to creat an initial condensation with cooled and dehumidified air.

ASR

Open knobs C and G gradually until the required speed is achieved. Make sure that knobs C and G are opened by the same number of rotations. Note 1) If the piston rod jerks, close knob G until the smooth operation is achieved. 3. Speed adjustment for return stroke The speed is adjusted with the dual speed controller. Open knob F gradually until the required speed is achieved. 4.

ZFC Series

Weight g (oz) Model IN side, OUT side ZFC100-04 4 10 (0.35) 11.5 (0.41) ZFC100-06 6 20 (0.70) Metric size ZFC200-06 6 30 (1.05) 21.5 (0.76) ZFC200-08 8 50 (1.75) ZFC101-03 5/32" 10 (0.35) 11.5 (0.41) ZFC101-07 1/4" 20 (0.70) Inch size ZFC201-07 1/4" 30 (1.05) 21.5 (0.76) ZFC201-09 5/16" 50 (1.75) Note 1) Flow rate when initial pressure drop is 0.003MPa (0.44psi) or less.

CXS

(2) V = 400 mm/s Graph (1) V = 200 mm/s 20 50 CXSM CXSL CXSM CXSL 10 10 Weight m (kg) Weight m (kg) 32 32 25 25 1 1 20 20 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang l (mm) Overhang l (mm) Graph (4) V = 800 mm/s Graph (3) V = 600 mm/s 6 5 3 32 2 Weight m (kg) Weight m (kg) 32 25 25 1 1 20 20 CXSM CXSL CXSM CXSL 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang l (

CXS

10 to 32 Graph (3) V = 200 mm/s Graph (4) V = 400 mm/s 4 20 3 10 32 5 25 1 Weight m (kg) Weight m (kg) 32 20 25 0.5 1 20 15 0.5 15 10 CXSM CXSL CXSM CXSL 10 5 0.1 5 0.1 10 20 30 40 50 100 10 20 30 40 50 100 Overhang l (mm) Overhang l (mm) Graph (5) V = 600 mm/s Graph (6) V = 700 mm/s (800 mm/s for 10) 2 0.6 20 32 25 0.4 1 15 20 Weight m (kg) Weight m (kg) 0.5 15 0.2 10 10 CXSM CXSL CXSM

PSE540/560

200 g 194 g 201 g 187 g 203 g 193 g Weight With sensor cable 101 g 108 g 102 g 109 g 95 g 111 g 101 g Without sensor cable 16-3-27 6 Series PSE560 Internal Circuit PSE56Voltage output type 1 to 5 V Output impedance Approx. 1 k PSE56--28 Current output type 4 to 20 mA Allowable load impedance 500 or less (at 24 VDC) 100 or less (at 12 VDC) Brown LINE(+) Brown DC(+) Load Main circuit Main

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

Dimensions with dashed lines stand for a locking knob type or push-locking knob type (latching type). 13 Series VQ100 Non Plug-in Subplate Mounted Valves VQ110-G-M5 28 Manual override 4.9 4.9 12.4 15 E 2-2.7Mounting hole 12 17 2.5 (Lead wire length) About 300 In case of locking knob type SMC SMC VQ110 G 30.7 28 11 7 JAPAN A P (5.9) 5 (5.9) 5 5 (4.1) 4.9 3-M5, (M3) 4.9 8.5 (28) ( ) : In

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Shock absorber model Applicable bore (mm) CLS ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 RB1412 101 90 25 20 11 72 67.3 12 31 39.5 Max. 16.5 4.5 3 120 107 30 25 16 93 73.2 15 38 49 Max. 20 5.5 6 CLQ RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 Max. 25 5.5 6 MLGP Side Support RLQ Side support A MLU ML1C D-X 20Data Side support B A B C D E F G H J Part no.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Shock absorber model Applicable bore (mm) CLS ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 101 90 25 20 11 72 67.3 12 31 39.5 Max. 16.5 4.5 3 RB1412 120 107 30 25 16 93 73.2 15 38 49 Max. 20 5.5 6 CLQ RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 Max. 25 5.5 6 MLGP Side Support RLQ Side support A MLU ML1C D-X 20Data Side support B A B C D E F G H J Part no.

Flow Control Equipment

2.5 to 6 6 to 20 20 to 40 40 to 63 63 to 100 AS13l1F AS13l1F AS23l1F AS33l1F AS43l1F / 1 8, / 1 4 / 1 4, / 3 8 / 1 2 Elbow (Metal Body) M5 6 to 20 20 to 32 20 to 40 40 to 63 63 to 100 AS12l1 AS22l1 AS22l1 AS32l1 AS42l1 / 1 8 4.1-7 / 1 4 / 3 8 / 1 2 In-line 6 to 20 20 to 32 20 to 40 40 to 63 63 to 100 AS1001F AS2001F AS2051F AS3001F AS4001F 4.1-9 Dual Speed Controller 6 to 20 20 to 32 20

CNG

GR GQ H1 I 18 13 38 93 1/8 56.5 14 8 12 2 85 10 18 5.5 6 4 8 5 26 20 to 200 15.5 to 200 22 17 45 103 1/8 66 16.5 10 14 2 96 10 25 6.5 9 7 10 6 31 20 to 300 19.5 to 300 22 17 45 104 1/8 67.5 20 12 18 2 97 10 25 6.5 9 7 10 6 38 20 to 300 19.5 to 300 30 19 52 112 1/8 75 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 20 to 300 301 to 500 301 to 500 27 to 300 (mm) Bore size (mm) 20 25 32 40 P

AMG

150 H 166 187 187 218 218 241 241 277 334 1/8, 1/4, 3/8 1/4, 3/8 1/2 3/8, 1/2 3/4 1/2, 3/4 1 3/4, 1 1, 11/2 5.5 6 6 7 7 9 9 9 11 10 10 10 10 10 10 10 10 10 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 100 113 119 145 151 166 173 200 253 13 13 16 16 19 19 22 22 32 159 172 178 204 210 225 232 259 311 AMG150 AMG250 AMG350 AMG450 AMG550 AMG650 AMG150

AMF

PF) N NPT 3 4 1B B Note) Refer to p.4.7-7 regarding How to Order of case assembly. 1 1 2 20 2B B AMF800 to AMF1000 (Standing style) AMF801/901 (Piping support style) 20 80 AMF 0 20 80 AMF 1 Body size Body size 80 90 80 90 Port size Port size 100 With bracket 20 2BFlange 30 3BFlange 40 4BFlange 20 2BFlange 30 3BFlange 40 4BFlange Shape Piping support style Standing style 60 6BFlange How to

MNB

40 20 14 15.5 19 to 600 32 75 18 104.5 58.5 63 1/4 12 45 17.5 35 27 11 75 134.5 56.5 14 20 40 20 14 16.5 23 to 600 32 90 18 119.5 68 80 1/4 18 45 22 40 32 13 95 169 72 22 30 60 25 20 19 33 to 750 37 102 22 150 81 100 1/4 20 55 25 40 41 16 114 189 89 22 30 60 30 20 19 37.5 to 750 37 116 26 170 96 Bore size (mm) N S U V T P J MM GR GE GF K L Q RR H VA W Z ZZ 32 27 154 13 6.5 34 1/8 10.5 M6

LVQ

type Pilot port Rc 1/8 (NPT 1/8) LQ N LVN M TI/ TIL PA C A PAX B PB D LVQ0S-S Dimensions (N.C. valve) (mm) A C D E F G H J K L M N P Q R B Model LVQ20S-S07 LVQ30S-S11 LVQ40S-S13 LVQ50S-S19 LVQ60S-S25 25.5 46 31.5 58 33.6 56.5 12 92 21.8 37 5 7 15 31.3 21 25.3 23.5 47 29.5 59 45.4 77 16.5 112 32 50 6 7 20 37.2 25 31.2 23.5 47 29.5 59 45.4 82.5 22 126 37.5 55.5 6 7 20 37.2 25 31.2 35 70 41

EXxx-OMV0017-D

Both input and output sizes are shown for an input / output unit. In / Out size Input data "--" is displayed for an output unit. Displays input data value which is sent to an input unit or input / output unit. Output data "--" is displayed for an input unit.