,

Note 2) Impact resistance: No malfunction resulted during an impact test using a drop impact tester. The test was performed one time each in the axial and right angle directions of the main valve and armature for both energized and deenergized conditions. Vibration resistance: No malfunction resulted during an one-sweep test between 8.3 and 2000Hz.

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

Note 2) Impact resistance: No malfunction resulted during an impact test using a drop impact tester. The test was performed one time each in the axial and right angle directions of the main valve and armature for both energized and deenergized conditions. Vibration resistance: No malfunction resulted during an one-sweep test between 8.3 and 2000Hz.

Dedicated Controller Series LC1 Uniaxial Type

BUSY (11) Operating signal COM +24V 1 COM 11 GND NO.0 When this signal is off, an alarm is being generated for the actuator/controller.

VBA-OM-S001

No gap Booster regulator Air tank Booster regulator A B C D E F G H I J K L M Grooves There should be no damage or dust O-rings VBAT05A1 VBA10A VBA11A 150 374 370 307 163 160 100 200 Rc 3/8 257 60 Rc 1/4 20 Air tank There is a slight play on the diagonal parts.

,

Note 2) Impact resistance: No malfunction resulted during an impact test using a drop impact tester. The test was performed one time each in the axial and right angle directions of the main valve and armature for both energized and deenergized conditions. Vibration resistance: No malfunction resulted during an one-sweep test between 8.3 and 2000Hz.

CG5-S

(mm) Bore size (mm) Stroke range A AL B1 B C D GA GB H H1 I J K KA LD LH LS LT LX LZ M MM NA S X Y ZZ P 20 to 350 18 15.5 13 37.5 16.5 8 18 12 35 5 31 M4 x 0.7 5 6 6 22 59 3 40 50 3 M8 x 1.25 29 83 15 7 124 1/8 25 to 400 22 19.5 17 41.5 18.5 10 18 12 40 6 33 M5 x 0.8 5.5 8 6 25 59 3 44 60 3.5 M10 x 1.25 29 83 15 7 129.5 1/8 32 to 450 22 19.5 17 44 20 12 18 12 40 6 38 M5 x 0.8 5.5 10 7.2 25

SFOD-OMT0009CN

J K J K J K [mm] 12 8 12 8 12 7.5 [mm/s] 420 280 420 280 420 280 [mm/s] 30 20 30 20 30 20 () [mm/s] 38 25 38 25 38 25 () 1.7 LEH LEHZ(J)10 LEHZ(J)16 LEHZ(J)20 LEHZ(J)25 LEHZ32 LEHZ40 K [mm] 251/73 249/77 246/53 243/48 242/39 254/43 (3.438) (3.234) (4.642) (5.063) (6.205) (5.907) [mm/s] 80 80 100 100 120 120 [mm/s] 5 5 5 5 5 5 () [mm/s] 8 8 8 9 9 9 () 110 No.SFOD-OMT0009CN-B LEHF10

ZP3

Basic Type ZP Series Model Connection thread Tightening torque [Nm] ZP(2 to 8)(J/K)--A8 M8 x 1 1.5 to 2.0 ZP(10 to 32)(J/K)--A10 M10 x 1 2.5 to 3.5 ZP(40/50)(J/K)--A14 M14 x 1 6.5 to 7.5 Lock ring Adapter Compact Type ZP3 Series Model Connection thread Tightening torque [Nm] ZP3-(015 to 035)JM6 x 0.75 1.5 to 1.8 ZP3-(015 to 035)KM8 x 0.75 2.0 to 2.5 ZP3-(04 to 16)(J/JB/K)Pad 2.

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

114 186 340 405 485 660 870 20 40 60 30 60 10 40 60 L1 16 40 L2 MHL2-16D2 MHL2-20D MHL2-20D1 MHL2-20D2 MHL2-25D 146 98 158 178 116 226 138 238 278 166 1010 1175 1645 1840 1850 80 40 80 100 50 60 20 40 60 MHL2-25D1 MHL2-25D2 MHL2-32D MHL2-32D1 MHL2-32D2 MHL2-40D MHL2-40D1 MHL2-40D2 25 198 216 150 198 242 298 336 220 318 402 2720 2935 3070 3985 4820 100 120 70 120 160 188 246 286 40 30 32 20

LEC-OM02904

AC DC 2. 10 3 10 (2) ()40 10(555) (10.1) A P (10.1) KT [m2] [W] [] [56] A P T K (10.1),P 10.1A 10.1 40() () () 10.2 10 4 10 10.3 (E6) OFF 10 11000 (EM1) (EM1) 10.3.1 (1) 10.3 (10.2) ((2)(a)(b)) ON EM1 (EM1) OFF V0 te 10.3 t 1J Lmax V L 0 (10.2) e 60 J M Lmax VO JM JL te [mm] [mm/min] [kgcm 2] [kgcm 2] [s] [s] 7kW10ms11k22kW (50ms) 10 5 10 (2) (10.2) (a) 200V 25 73 20 23

ZPT/ZPX

121 12 ZPT125HBNJ25-B01-A22 50-B01-A22 75-B01-A22 100-B01-A22 +7 +228 22 How to Order ZPT 40 HB N J 25 B01 A18 Mounting thread Pad diameter (mm) 40 50 63 80 100 125 M18 x 1.5 (40 to 80) 40 A18 50 M22 x 1.5 (100, 125) A22 63 80 Vacuum entry 100 B01 Rc 1/8 125 Applicable buffer stroke (Rotating) HB Pad type Material 40 50 63 80 100 125 Stroke 25 50 75 100 Large bellows pad N S U F E NBR Spring

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

Model Tube material Bore sizes (mm) CHAW CHAFW 40, 50, 63, 80, 100 Aluminum alloy 40, 50, 63, 80, 100, 125, 160 Steel Easy position detection with auto switches Aluminum cylinder sizes 40 to 100 are auto switch capable for easy stroke position detection.

Cooling Capacity: 150 (15.7kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: MW (M + W)

Cooling Capacity: 250 (25kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: M (Applicable to DI Water Piping)

Cooling Capacity: 300 (CH1: 26 kW; CH2: 1 kW), Pipe Thread: N [NPT (Rc-NPT Thread Adapter Set is Included)], Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460 to 480 VAC (60 Hz)], DI Option: DI (CH1, CH2 w/Electric Conductivity Control), Pump Option: T2 (20 L/min, CH2 Optical Head)

Cooling Capacity: 150 (15.7kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: AMW (A + M + W)

Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting)], Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: M (Applicable to Deionized Water Piping)

Cooling Capacity: 050 [5500/5900 W (50/60 Hz)], Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], DI Water Piping: M (Applicable to DI Water Piping), High Pressure Pump: T1 (Inverter Pump Mounted)

Cooling Capacity: 050 [5500/5900 W (50/60 Hz)], Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], DI Water Piping: None, High Pressure Pump: T1 (Inverter Pump Mounted)

Cooling Capacity: 050 [5500/5900 W (50/60 Hz)], Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], DI Water Piping: None, High Pressure Pump: T2 (High Pressure Inverter Pump Mounted)