REA/REB

HP L 4-J Effective thread length E TC MQQ M X F WP WP RHC GW GP QW PW D 4-LD Piping port P Operating direction A MK(2) 7 W K G RS Q G HS CR Piping port P Operating direction B Piping port P (Plug) Operating direction B With switch rail Q + Stroke Z + Stroke HR Plug RS H A RZQ 22 8 Piping port P Operating direction B Piping port P (Plug) Operating direction B 8 Piping port P Operating direction

REA/REB

-X 20Stop Data 10-2-11 11 Series REA Dimensions REA25/32/40 Effective thread depth J L 0 0.1 B NN G 4-MM H G 2-port size X D I NB NB T N K W N S + Stroke F NA F R ZZ + Stroke Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (mm) B D F G H I K L MM x J N NA NB NN Model

V

C Y E F G E F G ZPR02U 2 2.6 1.2 0.8 ZPR04U 4 4.8 1.6 0.8 20.6 15.6 10.4 21.6 16.6 12.8 ZPR06U 6 7 2.5 0.8 ZPR08U 8 9 2.5 1 MORE DIMENSIONS S E E N E X T P A G E A P P L I C A B L E T U B E Applicable Tube O.D.

Stopper Cylinder

stroke B + Stroke H + Stroke V G T 0 0.1 D E M L A + 2 stroke B + Stroke H + Stroke V Width across flats K Workpiece transfer direction 2 x P (Rc, NPT, G) F Z X Stroke S Q RSQB -DRZ (Double acting) 32 40 50 Bore size: 32, 40, 50 M E J G Width across flats K Workpiece transfer direction 2 x P (Rc, NPT, G) F Z X Stroke S T 0 0.1 D Q M E J G A + 2 stroke B + Stroke H + Stroke V L E M 4 x N

VM

T.T. 60 Push button (Mushroom) VM220-02-30R/B/G/Y VM230-02-30R/B/G/Y JIS Symbol 2 port Panel mounting hole 3 port EXH port (3 port only) 0.5 MPa supply 4.9 mm P.T. 52 N F.O.F. 2-5.5 mounting hole 1.6 mm O.T. 6.5 mm T.T. 5-6-23 22 Series VM200 Series VM200 Push button (Extended) VM220-02-32R/B/G/Y VM230-02-32R/B/G/Y JIS Symbol 2 port 3 port Panel mounting hole EXH port (3 port only) 0.5

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer A port B port Chamfer A port Chamfer R R A port B port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead

Table of Contents

ported> F CRA1 L E1 CRQ2 K Key length B port B port MSQ D B C MRQ G U G U If B port of Body (B) is machined, the port is plugged with Rc 1/8.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

ported> F CRA1 L E1 CRQ2 K Key length B port B port MSQ D B C MRQ G U G U If B port of Body (B) is machined, the port is plugged with Rc 1/8.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(L4) (L3) (5.25) L2 Top entry port Not machined 27 L1 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 One-touch fitting R R 61.5 G 1/2 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(L4) (L3) (5.25) L2 Top entry port Not machined 27 L1 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 One-touch fitting R R 61.5 G 1/2 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A

CRB2/CRBU2/CRB1

Single vane type Double vane type 90 180 270 90 r a n n o n a g r e g ti n 2 e a o n r a o n 7 ti t g ti 1 a o 0 e a t 8 o r 9 t +4 0 r 0 o 0 y y r e +4 0 +4 0 e Key y K K e K Key Key +4 0 (45) 0 Standard Optional Key 9 e g n ra n o ti a t o r (90) y e K (45) (45) A port A port A port A port B port B port B port B port 100 190 280 100 a r n n g a r n n o g e io e ti at r n a 1 o a n 1

Auto Switch Guide

RE A B REC CX CY MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) RS Q G RS H A RZQ MI W S CEP1 CE1 CE2 Wiring Warning ML2B 1. Avoid repeatedly bending or stretching lead wires.

Air Cylinder

Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-A9(V) BMA3-020 (A set of a, b, c, d) BMA3-025 (A set of a, b, c, d) BMA3-032 (A set of a, b, c, d) BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) D-M9A(V) Note 2) BMA3-020S (A set of b, c, d, e) BMA3-025S (A set of b, c, d, e) BMA3-032S (A set of b, c, d, e) BMA3-040S

XL

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

10

Cushion valve G 2 x Rc P W V Port G E Width across flats KA TX D E B C H1 AL MM MB MA N 2 x 4 x J N TY B C Width across flats B1 A H K F TT ZZ + Stroke S + Stroke With rod boot d e 10.2 10.2 f h l [mm] Bore size [mm] A AL B B1 C D E F G H H1 J K KA MA MB MM N P S TT TX TY V W ZZ 32 22 19.5 46 17 32.5 12 30 13 13 47 6 M6 x 1 6 10 16 4 M10 x 1.25 27 1/8 84 17 48 49 4 6.5 135 40 30 27 52 22

C76

B LX SW AM L LD LH NDh8 S Bore 26 0 0.033 32 40 10 12 36 40 9 12 22 27 G 1/8 G 1/4 34.5 42.5 37.5 46.5 17 22 28 31 12 14 29 38 16 16 42.3 52.3 30 38 17 19 20 24 47 58.5 21 26 80 105 M10 x 1.5 9, 14 depth of counterbore 10 CS1 32 0 0.039 145 M12 x 1.75 11, 17.5 depth of counterbore 12.5 C76 C85 Rubber cushion: C76RBF Without magnet, Built-in magnet Bore Stroke B C95 CP95 NCM NCA D-X 20Data

C76

A B A 32 6 7 7 8 40 11 13 12 14 Aim at this number.

Mechanical Valves Series NVM, NVFM, NVZNI

133-51 0.91 (231 0.47 (121 0.81 i20.5) 0.39 (10) Millimeters in Parentheses Millimeters in Parontheses NVM220-N02-08 230-N02-08 NVM220-N02-07 230-N02-07 Panel Mounling Panel Mounting F O F ' 1 2 3 s l b s ( 5 6 k 9 ) P T 0 138 in (3 5mm) o,T 0 079 in (2mm) T T 0 216 in (5 5mm) F O F ' 2 6 5 l b s , ( 1 2 k g ) T T 60" '75 PSIG (5 Kgf/cm2) '75 PSIG (5 Kgf/cm2) A B c D E F G A B c D E F G

IIIIIII

133-51 0.91 (231 0.47 (121 0.81 i20.5) 0.39 (10) Millimeters in Parentheses Millimeters in Parontheses NVM220-N02-08 230-N02-08 NVM220-N02-07 230-N02-07 Panel Mounling Panel Mounting F O F ' 1 2 3 s l b s ( 5 6 k 9 ) P T 0 138 in (3 5mm) o,T 0 079 in (2mm) T T 0 216 in (5 5mm) F O F ' 2 6 5 l b s , ( 1 2 k g ) T T 60" '75 PSIG (5 Kgf/cm2) '75 PSIG (5 Kgf/cm2) A B c D E F G A B c D E F G

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Note) Do not replace SV111 (G, H, L, M, W) to SV115 (DIN terminal) and vice versa when replacing pilot valve assembly only. 27 Series SYJ5000 2 Position Single [ ]: AC G H Grommet (G), (H): SYJ5120-M5 With bracket SYJ5120-M5-F G H 37 30 3.5 G: Approx. 300 H: Approx. 600 (Lead wire length) 2-3.5 (For mounting) 63.1 [65.3] 41 19.5 18 25 + 19.7 11 B A 5 35.1 [42.1] M5 x 0.8 (A, B port) 2-2.6