RQ

B + Stroke L K 2 x 4-M6 x 1.0 effective depth 10 A + Stroke M W Rod end male thread H1 Rod end nut C1 X L1 Rod End Male Thread Bore size (mm) C1 X H1 L1 20 25 18.5 12 14 M8 x 1.25 22.5 15 17.5 M10 x 1.25 Basic Style A B C D E E1 E2 F H K L M Q W Bore size (mm) 20 25 Stroke range (mm) 15 to 50 36.5 32 7 10 36 18 21 15.5 M5 x 0.8 8 4.5 25.5 21 39 15 to 50 41.5 36.5 12 12 40 20 23.5 17 M6 x

CE

. 10-12-8 P . 10-12-30 P . 10-12-18 P . 10-12-27 10-12-1 2 Achieve rationalization of production lines with position feedback Stroke reading cylinder Measurement is possible throughout the full stroke range.

CE

. 10-12-8 P . 10-12-30 P . 10-12-18 P . 10-12-27 10-12-1 2 Achieve rationalization of production lines with position feedback Stroke reading cylinder Measurement is possible throughout the full stroke range.

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 2 x P (Rc, NPT, G) H2 Width across flats B2 2 x NN G Relief port M5 x 0.8 G H1 Width across flats B1 Standard port I Relief port 2 x Eh8 D MM AL A F K NA N N H S + Stroke F ZZ + Stroke (mm) ZZ S P N I E D A 12.5 11 10 10 13 F Bore size Stroke range AL K MM NA NN G H2 41 32 32 26 B2 H H1 22 17 17 13 B1 0 6 6 5 8 8 8 50 45 45 41 200 to 1000 150

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

B RATE PWR L RUN SETTINGS MOD/NET ADDRESS NO. PWR PWR COM ERR ON ON L ERR.

SZ3000

(A) 4 (B) 2 Nil K None 3 2 B Built-in 5 (EA) 1 (P) 3 (EB) The built-in back pressure check valve type has an effective area approximately 20% smaller.

Series VCL

Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size Rc A B C D E F H K L M N Model Note) U Q V R

MLGP

4-OA through 4-OB depth of counterbore depth OL 4-NN through 4-MM depth ML Z Section XX IA WA IC IC IH R X 0.02 HA: T-slot for hexagon bolt X 0.02 DA DB IB ID X U VB VA H T PW GC GA 2-Rc P (Plug) A + Stroke E B + Stroke FA FB C + Stroke PA + Stroke GB PB Q 2-Rc P G J K S XA H7 depth XL IE XA H7 depth XL T-slot dimensions Note 1) The intermediate strokes other than the standard strokes at

MLGP

4-OA through 4-OB depth of counterbore depth OL 4-NN through 4-MM depth ML Z Section XX IA WA IC IC IH R X 0.02 HA: T-slot for hexagon bolt X 0.02 DA DB IB ID X U VB VA H T PW GC GA 2-Rc P (Plug) A + Stroke E B + Stroke FA FB C + Stroke PA + Stroke GB PB Q 2-Rc P G J K S XA H7 depth XL IE XA H7 depth XL T-slot dimensions Note 1) The intermediate strokes other than the standard strokes at

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Description Body class Symbol Bracket assembly LQ-GBL J, K 1, 2 J type K type 1, 2, 3, 4, 5, 6 L, M L type M type (for short piping) Table 1 Tubing size symbols Part No. Description Replacement parts Tubing O.D.

CRQ2

gr ot ey R K Using the Body as a Flange The body's L dimensions are shown in the drawing on the right.

70astamb1

MM 2-RcP G G MM D D e e Effective thread Effective thread Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 13 13 9 A K f N N f h + Stroke K A l + Stroke 9 l ZZ + 2 strokes S + Stroke h Without Air Cushion Stroke range Bore size (mm) Effective thread length Width

mb1

MM 2-RcP G G MM D D e e Effective thread Effective thread 13 13 9 A K f N N f h + Stroke K A l + Stroke 9 l ZZ + 2 strokes S + Stroke h Without Air Cushion Stroke range Bore size (mm) Effective thread length Width across flats MB J K MM N P V W S ZZ S ZZ A C B D Ee11 F G H 32 40 50 63 80 100 4 4 5 5 5 5 M6 x 1 6 6 7 7 10 10 M10 x 1.25 26.5 26.5 31 31 37.5 37.5 1/8 1/4 1/4 3/8 3/8 1/2 84

Stroke Reading Cylinder and Counter

7 H G D M E J F C X B + Stroke L Z M A + Stroke E T 2 x P (Port size) Q I Metal connector 15.5 M14 x 1 (mm) A B C D E F G H I J K Standard stroke Bore size (mm) 32 40 50 63 131 90 27 16 45 49.5 64 M14 x 1.5 14 4.5 14 50, 75, 100, 125, 150, 175, 200, 250, 300 177 136 27 16 52 57 71.5 M14 x 1.5 24 5 14 100, 125, 150, 175, 200, 250, 300, 400, 500 200, 300, 500 193 144 32 20 64 71 85.5 M18 x

CYV

Note 3) This data is considered typical but not guaranteed. 10Leakage test result 100 5 10 Time [min] e e a a l l k k w w 2 a a 1 O-ring seals separate vacuum and atmosphere. Employs a magnetically coupled rodless cylinder with no air leakage from moving parts. o o g g L L e e Static O-ring seals are used for all the seals between vacuum and atmosphere.

Air Slide Table Series MXQ

A K = 1 L A L A End plate mounting Mp Mr W My W W W L A W L A L A K = 0.6 W Mey Mep L A A L Note 1) Static moment: Moment generated by gravity Dynamic moment: Moment generated by impact when colliding with stopper Max. allowable load weight: Wmax(kg) Allowable kinetic energy: Emax (J) Table 1 Table 2 Allowable load weight coefficient: Graph 1 Model Allowable kinetic energy Adjuster option

Dedicated Controller

Dedicated Controller/LC1 P.73 Controller setup software P.80 Dedicated teaching box P.82 Options P.85 Dedicated Regenerative Absorption Unit/LC7R P.86 Non-standard Motor Compatible Drivers P.89 73 2 Series LC1 Controller Single Axis Type Built-in AC Servo Driver Series LTF: Standard Motor Compatible How to Order 2V LC1 F 1 H 1 L 3 Number of axes Mounting bracket 1 3 5 1 axis M3

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Fittings & Tubing Air Cylinders Rotary Actuators ARP20(K) 1021 ARP20(K) 1021 Rc1/4 0.50 0.25 0.45 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point 0.30 0.20 0.25 0.20 0.15 0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 50 100 150 200 250 300 Flow rate (L/min (ANR)) Inlet pressure (MPa) 1021 1021 ARP30(K) ARP30(K) Rc3/8 0.50 0.25 0.45 Air Preparation Equipment 0.40

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Fittings & Tubing Air Cylinders Rotary Actuators ARP20(K) 1021 ARP20(K) 1021 Rc1/4 0.50 0.25 0.45 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point 0.30 0.20 0.25 0.20 0.15 0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 50 100 150 200 250 300 Flow rate (L/min (ANR)) Inlet pressure (MPa) 1021 1021 ARP30(K) ARP30(K) Rc3/8 0.50 0.25 0.45 Air Preparation Equipment 0.40

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

less No Z80 IC circuit P P Y59A Y69A P p P 3 wire (NPN) IC circuit 5V 12V Y7P Y7PV P p P 3 wire (PNP) IC circuit Y59B 12V Y69B P p P 2 wire Y7NW Y7NWV P p P 3 wire (NPN) 5V 12V Diagnostic indication (2 color indicator) IC circuit Y7PW Y7PWV P p P 3 wire (PNP) Relay, PLC Grommet Solid state switch Yes 24V Y7BW Y7BWV P p P Water resistant (2 color indicator) Y7BA p P 2 wire 12V P5DW Magnetic