Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

2 @7 t y o u @8 r #2 @1 @2 @5 @4 @3 CY1HT32 @6 Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 No. !8 !

REA/REB

0 @1 r t e u y @0 q @2 @4 @8 @9 !3 !8 !7 #0 @6 o @3 w @7 !5 @5 !4 REBR15 Component Parts No. Description Body No.

Environment

How to Order R 6N 1 1 D B 25 50 LEY X5 o Made to Order: Dust-tight/ Water-jet-proof q w e r t y u i !0 !1 !2 !

Guide Cylinder Series MGG

Auto switch capable (water resistant type) Note) RBL (coolant resistant) type shock absorbers are used. 20 to 50 Front mounting flange Dimensions 32 to 50 Front mounting flange R Y + Stroke Front mounting flange 63 Y + Stroke Q X 63 to 100 Front mounting flange R Y + Stroke (mm) Bore size (mm) 63 50 40 32 25 20 R 16 16 15 14 14 14 Y 119 116 101 90 88 88 Dimensions other than the above are

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

3 @1 @2 r w u i @0 @3 y !7 !9 r MX MTS CXSWM6 t e o !8 q !1 MY !9 r !5 !6 CXSWL (Ball bushing bearing) CY !2 !0 !3 @1 @2 r !5 !4 w u i @0 @3 y !7 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX CXSWL6 Dr !5 !6 -X 20t e o !8 q !

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Y . u , E 37 | 1/2" NPT M6 0 t 02 03 04 M 6 x 1 . 0 PT1/8 Pr1/4 PT3V8 PT1/2 a a a a a o a a a a a a a a a a a o a a a a a a a a a a a o a a a a a a a a a a a r a a a a a a a r a a a a a a a a o a r a o a a a The use of compact spacer with bracket reduces the total assembled space.

CLA

lH 61 I Type Single Knuckle Joint Y Type Double Knuckle Joint r\'Id 1'-< t~ m L ~ ~1 -r0 ~ '-' P. _(mm) e ,.

F

D E R S E R I E S (N)AS1000-4000 S Y M B O L S NAS 3 000 A R E A C O D E Japan, Asia, Australia, UK N Canada, USA P O R T T H R E A D P A N E L M O U N T V E R S I O N R(PT) N NPT B O D Y S I Z E P O R T S I Z E 1 M3, M5 2 1/8, 1/4 Standard 3 3/8 Standard 4 1/2 Standard M3 M3x0.5 M5 M5x0.8 01 1/8 (10-32Nom) 02 1/4 03 3/8 04 1/2 T E C H N I C A L SPECIFICATIONS D I M E N S I O N S S E R I

15

+ A = 100 y, z + A 100 10 y, z + A = 200 y, z + A = 200 y, z + A = 300 y, z + A = 300 1 1 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 700 800 Stroke [mm] Stroke [mm] [Graph 6] Allowable load mass by stroke 32 [Graph 5] Allowable load mass by stroke 25 100 100 y, z + A = 0 y, z + A = 0 y, z + A = 50 y, z + A = 50 10 Load mass [kg] Load mass [kg] 10 y, z + A = 100 y, z + A = 100

MY1

1 u t q w e y !2 i r #3 !4 !0 !9 !8 !5 !

Modular F.R.L. Unit

Note 2) Use a bushing (part no: 131368) when connecting R 1/8 pressure gauge to R 1/16 gauge port. Note 3) Not applicable to AW10. Accessory part no.

Air Cylinder

D-X Technical Data 297 CG1 Series Construction With rubber bumper 80, 100 y !0 !9 !8 @1 !7 @0 @1 q o u r t e w y Long stroke 80, 100 r y u u e i Long stroke 1001 to 1500 With air cushion o w !5 !1 !3 !6 !2 !4 !0 !9 @0 !8 !7 @1 @1 @2 q r t e Long stroke Component Parts No.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

(Except 50) MY1MW16/20/50/63 MY1CW16/20/50/63 L L L L L L R R R R R R R L L R R R L L L R Slide table operating direction MY1MW25/32/40 MY1CW25/32/40 L L This port is not available for use. (Except 32, 40) L L L L L L L L R R R R R R R R L L R R L L L R Slide table operating direction 8-12-3 4 Series MY1W Specific Product Precautions 2 Be sure to read before handling.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

1 u t q w e y !2 i r !4 !0 MX MTS MY CY !9 !8 !5 !7 MG CX MY1WK with side seal D@5 @0 @3 @4 @2 @1 -X 20Data Component Parts No. q w e r t y u i o !0 !

Thermo-chiller

Applicable model HRS-BP008 HRS100HRS150q To circulating fluid outlet To circulating fluid return port r t w y r u r t r e Parts List No.

CA2

7 i q r e y @2 t !8 !9 !6 !1 !2 !4 !5 !0 !

Table of Contents

r w y HA Purge air for dehumidification Purge air for dehumidification AT ID AMG Component Parts AFF Material Description No.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

20.6 R S 12.8 S 10 to 16 (mm) 10.4 21.6 Q: 6 Q: 8 Pad diameter (mm) R 24.3 R S 15.2 S ZPR F-0-B8 (Without buffer/Female thread) 40 50 20 to 32 12.8 26.2 S Hexagon width across flats 12 N 8 R F Applicable tubing O.D.Q E D C Y 2.5 A B Dimensions (mm) A B C D E F N Y Model ZPR40F-0-B8 40 43 12.5 18.5 32.3 49.5 5 M8 x 1.25 ZPR50F-0-B8 50 53 13.5 19.5 33.3 50.5 6 Dimensions by Tubing Diameter

Stopper Cylinder

16 12 t y q r e w @2 @1 !

HRS100/150

Applicable model Minimum operating flow rate [L/min] (50/60 Hz) HRS-BP007 HRS100-28/42 HRS150-q To circulating fluid return port y To circulating fluid outlet r t w u r t r e r Parts List No.