Body Size: 20, Model Type: B (Air Filter + Regulator), Thread: Rc, Port Size: 01 (1/8), Float Type Auto Drain: w/o Auto Drain, Pressure Gauge/Digital Pressure Switch: G (Round Type Pressure Gauge, w/Limit Indicator), Attachment: V (Mounting Position: AF + AFM + AR + V), Set Pressure: 1 (0.02 to 0.2 MPa Setting), Bowl Type + Lubricator: Standard (Polycarbonate Bowl + Lubricator), Bowl Guard

Stations: 01 (1 Station), Piping: U (U Side: Open; D Side: Closed), Thread Type: N (NPT), Supply Unit Components: Flow Adj. Valve: None; Stop Valve: None, Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 40 (5 to 40 L/min), Return Unit Components: W (w/Flow Adj.

Valve; w/Stop Valve), Supply/Return Port Size: 06 (3/4), Return Unit Flow Switch Output Specifications: ET (Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)

Body Size: 20, Model Type: B (Air Filter + Regulator), Thread: Rc, Port Size: 01 (1/8), Float Type Auto Drain: w/o Auto Drain, Pressure Gauge/Digital Pressure Switch: E3 (PNP Output, Wiring Top Entry), Attachment: V (Mounting Position: AF + AFM + AR + V), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: Standard (Polycarbonate Bowl + Lubricator), Bowl Guard: None, Air Filter

Body Size: 20, Model Type: B (Air Filter + Regulator), Thread: Rc, Port Size: 01 (1/8), Float Type Auto Drain: w/o Auto Drain, Pressure Gauge/Digital Pressure Switch: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Attachment: V (Mounting Position: AF + AFM + AR + V), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: 2 (Metal Bowl), Bowl Guard: None, Air Filter Drain

Body Size: 20, Model Type: A (Filter Regulator + Lubricator), Thread: N (NPT), Port Size: 01 (1/8), Float Type Auto Drain: w/o Auto Drain, Pressure Gauge/Digital Pressure Switch: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Attachment: V (Mounting Position: AF + AFM + AR + V), Set Pressure: 1 (0.02 to 0.2 MPa Setting), Bowl Type + Lubricator: Standard (Polycarbonate Bowl +

Body Size: 20, Model Type: A (Filter Regulator + Lubricator), Thread: N (NPT), Port Size: 01 (1/8), Float Type Auto Drain: w/o Auto Drain, Pressure Gauge/Digital Pressure Switch: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Attachment: V (Mounting Position: AF + AFM + AR + V), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: Standard (Polycarbonate Bowl + Lubricator

(Normally Closed)], Pressure Gauge/Digital Pressure Switch: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Attachment: V (Mounting Position: AF + AFM + AR + V), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: Standard (Polycarbonate Bowl + Lubricator), Bowl Guard: C (w/Bowl Guard), Air Filter Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction

(Normally Closed)], Pressure Gauge/Digital Pressure Switch: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Attachment: V (Mounting Position: AF + AFM + AR + V), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: 6 (Nylon Bowl), Bowl Guard: C (w/Bowl Guard), Air Filter Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Drain

Body Size: 20, Model Type: B (Air Filter + Regulator), Thread: Rc, Port Size: 01 (1/8), Float Type Auto Drain: w/o Auto Drain, Pressure Gauge/Digital Pressure Switch: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Attachment: V (Mounting Position: AF + AFM + AR + V), Set Pressure: 1 (0.02 to 0.2 MPa Setting), Bowl Type + Lubricator: Standard (Polycarbonate Bowl + Lubricator),

ARJ310

ARJF310F-01 y e !

Table of Contents

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

High Vacuum Angle Valve

XLS-16XLS-16-P XLS-25XLS-25-P Description w y r e-1 e-2 XLS16-20G, C, T, D XLS16-20-P G XLS25-20G, C, T, D XLS25-20-P G Coil assembly Core assembly Armature assembly O-ring O-ring XLS16-30-1 XLS16-30-2 AS568-018V AS568-025V XLS25-30-1 XLS25-30-2 AS568-018V AS568-030V Note 1) In case of coil assembly, please enter voltage symbol in .

&snac

, v i t h 6 p c s ' o f s c r e t v s . p r o p e r t Y @ N o t e : E n s u r e t h e p r o t r u s i o n a t b o d v f i x a t s L o t o f M e m b r a n e m o d u l e ' l n s t a I L n e w o r i n s a t b e l o w o f m o d u l e ' T h e n , i n s e r t c o v e r a n d f a s t e n i t w i t n 4 @ S C T E W S f r o m t h e b e t o w o f c o v e [ . @ u n s c r e w t n e c o v e r .

Air Cylinder

V V V V V V V V Standard V V V V V V V V V D v v v v v v v V v CM2lF v v v V V v CM2l-l J K V CM2lH V v v V v v v V 10-, 11v v v v v v v 25ANote 6) CM3 CG1 CG3 Note 5) JMB V V V v V v 20Note 4) v v v V v CM2l R V V v V CM2lX v v CM2lM Note 5) MB MB1 v XB6 CA2 v v XB7 v v v v v XB9 v v v v v v XB12 CS1 v v v XB13 CS2 v XC3 v v v XC4 Note 5) v v v XC5 v v XC6 v v v v v XC8

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

48 V, 100 V, 110 V, 120 V, 200 V, 220 V, 230 V, 240 V DC 12 V, 24 V Allowable voltage fluctuation 10% of the rated voltage Allowable leakage voltage AC 5% or less of the rated voltage DC 2% or less of the rated voltage Apparent power*4, *5 AC 4.5 VA 8 VA 9.5 VA Power consumption*4 DC 4 W 6 W 8 W Temperature rise*6 AC/DC 70/65C Glossary of Terms Coil specifications *1 Leakage: The value at

MY1

Horizontal mounting y P. 8-11-6 x y W: Workpiece (2 kg) x z 3. Ceiling mounting 4.

Electric Actuator/Slider Type

The driver will be damaged if a commercial power supply (100V/200V) is added to the driver,s servo motor power (U, V, W). Be sure to check wiring such as wiring mistakes when the power supply is turned on. 2. Connect the ends of the U, V, W wires from the motor cable correctly to the phases (U, V, W) of the servo motor power.

Aluminum High Vacuum Angle Valve

XLC(V) XLD(V) XLH XLF(V) XLG(V) Exterior seal e Exterior seal e Valve seal w Standard Special XL XL Standard Special XLQ Standard Common Special XLD50-2-9-1A AS568-016V XM XY AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A XLD160-2-9-1A Standard S valve seal assembly r XLD(V) XLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A AS568-009 XLD100-2-9-1A XLD160-2-9-1A

Free Mount Cylinder

-www.stevenengineering.com 4-T counterbore W + Stroke S + Stroke Z + 2 x Stroke 16 to 32 2-M5 x 0.8 (32: Rc 1/8) Rod end nut 2-P through Auto switch Width across flats L 2-P through Width across flats L A' 4-T counterbore S + Stroke W + Stroke Z + 2 x Stroke Rod End Nut/Accessory Material: Carbon steel Part no.