Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

base side B D M Stroke: S 1 5 J Z 2.4 Piping port 2-M3 x 0.5 (mm) Z S M J H F Model MXPJ6-5 44 5 37 27 38 25 MXPJ6-10 59 10 47 42 53 35 8-8-14 14 Precision Air Slide Table Series MXP Dimensions: MXP6 Piping port 2-M3 x 0.5 (Plug: M-3P) AA 42 MX 7 4 H 2.3 11.2 3 MTS 1 MY 1 0.05 D B 9.5 3.5 CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office

CE2

Maximum ambient temperature Extension cable (Option) CE2 5 m, 10 m, 15 m, 20 m J 60C Nylon tarpaulin Note) Digital error under Controller (CEU2), Counter (CEU1 or CEU5) is included.

Compact Type

1 Graph V = up to 400 mm/s 2 20 10 32 25 1 20 32 Weight m (kg) Weight m (kg) Weight m (kg) 25 15 1 20 15 10 0.1 10 0.1 6 6 0.03 5 5 10 20 30 40 50 100 10 20 30 40 50 100 Overhang L (mm) Overhang L (mm) Graph V = up to 800 mm/s (up to 700 mm/s for 15, 20) 4 CXSJM CXSJL Graph V = up to 600 mm/s 3 CXSJM CXSJL 20 32 0.5 25 1 15 20 0.5 15 Weight m (kg) 10 0.1 10 0.1 6 6 10 20 30 40 50 100 5 10

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

S + Stroke ZZ + Stroke Series CY3R Thread type Bore size (mm) 15 M thread Rc thread S + Stroke 20, 25, 32, 40 NPT thread QW Z + Stroke G thread Features 1 Upgraded version of saving magnetically rodless cylinder! Upgraded version of saving magnetically rodless cylinder!

39

N O P Q J K L M N O P Q Part no.

CS1

Bore (mm) 125 140 160 180 200 250 300 H A H1 L1 H A I type single knuckle Y type double knuckle 125 65 125 140 160 180 / 200 250 300 100 156.5 I-12 Y-12 125 3.5 65 50 110 105 161.5 I-14 Y-14 140 3.5 76 50 110 110 170.5 I-16 Y-16 155 3.5 83 56 120 125 193.5 I-18, I-20 Y-18, Y-20 160 3.5 88 63 135 160 245.5 I-25 Y-25 195 3.5 106 71 160 175 266.5 I-30 Y-30 210 3.5 115 80 175 Accessory SCS1

CXT

CXT 12 16 CXT20 CXT25 CXT 32 40 Model Symbol Specifications -XB13 Shock absorber model Low speed cylinder (5 to 50 mm/s) RB2015 RB1411 RB1007 RB0806 Max. energy absorption (J) 58.8 14.7 5.88 2.94 Stroke absorption (mm) 15 11 7 6 Collision speed 0.05 to 5 m/s Max. operating frequency (cycle/min) 25 45 70 80 10 to 80C Ambient temperature Extended 8.34 6.86 4.22 1.96 Spring force (N) Retracted

Compact Type Dual-Rod Cylinder Series CXSJ

1 Graph V = up to 400 mm/s 2 20 10 32 25 1 20 32 Weight m (kg) Weight m (kg) Weight m (kg) 25 15 1 20 15 10 0.1 10 0.1 6 6 0.03 5 5 10 20 30 40 50 100 10 20 30 40 50 100 Overhang L (mm) Overhang L (mm) Graph V = up to 800 mm/s (up to 700 mm/s for 15, 20) 4 CXSJM CXSJL Graph V = up to 600 mm/s 3 CXSJM CXSJL 20 32 0.5 25 1 15 20 0.5 15 Weight m (kg) 10 0.1 10 0.1 6 6 10 20 30 40 50 100 5 10

3 Port Solenoid Valve Metal Seal Series VZ200 1

MN Option Nil None M plug connector S With surge voltage suppressor Z With light/surge voltage suppressor Indicator light is not available for grommet type.

C95

s] Maximum speed: V [m m/ s] Maximum speed: V [m m/ 1.11-31 Series C95 Refer to P.5.3-17, 27, 37, 46, 54, 58 and 61 for details on auto switches.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Inch Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M Weight [g] Unlocked Locked Unlocked Locked AS22l1FG-01-01(S)A 1/8" 7.2 12 19.1 26.2 19.1 30.6 29.2 27.5 26.1 13.3 9 (9) AS22l1FG-01-03(S)A 5/32" 8.2 AS22l1FG-01-07(S)A 1/4" 11.2 20.8 27.9 10 (9) AS22l1FG-01-09(S)A 5/16" 13.2 22.4 29.5 14.2 11 (10) AS22l1FG-02-01(S)A 1/8" 1/8 13 (12.7) 7.2 22.6 36.6 35 31.1 29.5 13.3 17 (18)

Modular Type Air Filter Series AF

1 Drain q r e w t i u y o !0 !

Plate Cylinder with Lock Series MLU

6 A A C B M(D)LUB25 y !9 i o !5 @0 Extension locking w q Section A-A !

HRL

After the machine has stopped, make sure to turn off the breaker of the users equipment (on the upstream side). 2 h 1 h 30 min 20 min 14 min 10 min 6 min 4 min 2 min 1 min Operating time 30 s 20 s Max. 10 s 5 s 2 s Min. 1 s 0.5 s 0.2 s 0.1 s 0.05 s 0.02 s 0.01 s 100 135 200 300 400 500 600 700 1000 1500 2000 3000 4000 Current (% for chiller main breaker volume) 341 HRL Series Specific Product

Stroke Reading Cylinder and Counter

Hz 6.8 G 2 hrs. each in X, Y directions 4 hrs. in Z direction based upon JIS D 1601 Vibration resistance -XC22 Fluororubber seals 30 G 3 times each in X, Y, Z directions Impact resistance IP-67 (IEC Standard)(2) Enclosure CE1-R 5 m, 10 m, 15 m, 20 m Extension Cable (Option) Note 1) This includes the digital display error of the counter (CEU5).

VQZ1000/2000/3000

plug connector (M) 1 (P) 3 (R2) (Option) 100 VAC 200 VAC 110 VAC 220 VAC VQZ1000 M plug connector (M) B C A 0.90 1.3 (A) 4 Locking type (Tool required) 1 (P) 5 (R) DIN terminal (Y) DIN terminal (YZ) VQZ2000 N.C.

CXWM/CXWL

M L MTS CXW M L Without auto switch: MY Plate mounting style with auto switch: CDPXW S M L Table (1) CY Housing mounting style with auto switch: CDBXW M M L Table (2) MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2.

LEC-OM02704CN

S S S () 0 r / m i n 0 r / m i n L S P L S P O N O N O F F L O F F L S N S N 1 S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F O F F L L S N S N 2 S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F L S N O F F L S N 3 S S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N L S N O F F L S N O F F 6 39 6 6.4.4 (PC31PC34) PD20 PD20 0 1

CXS

V = up to 100mm/s V = up to 300mm/s 20 40 60 80 100 0.05 Overhang L (mm) Weight m (kg) Graph V = over 400mm/s; up to 10mm 11 2 CXSM CXSL 1 CXSL6 CXSM6 0.5 0 0.01 20 40 60 80 100 32 Weight m (kg) Overhang L (mm) 25 Graph up to 50mm 9 0.1 20 0.05 V = up to 100mm/s V = up to 300mm/s 0.05 0.04 15 0.03 10 Weight m (kg) 0 0.01 20 40 60 80 100 Overhang L (mm) 0.02 Graph V = up to 400mm/s; up to

SX

S 5 VDC Mixed M Common specifications for the valve must correspond with common specifications for the manifold.