reduces flow setting time

5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

For notes w and e, refer to the left. 4B/6B 870 M20 X l 500 AMD1000 w When the element has reached its replacement interval, replace it immediately with a new element.

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

Indicator light (AC) When solenoid gets energized, indicator light illuminates, thus electrical states of the solenoid can be seen from the outside. 51 VA (64 VA ) 50 Hz Inrush Apparent power (VA) (Power consumption (W)) 45 VA (55 VA ) 60 Hz AC 17 VA (5.3/5.5 W) 50 Hz Holding 11 VA (2.9/3.2 W) 60 Hz 5.5 DC Power consumption (W) In the case of 3 position type.

•

Unit 'k,gf Bore(mm) 40 50 53 IBasic weight 0.74 0.96 1.23 Cylinder ~ II / E E I Add itional weight per 25 stroke 0.10 0. 11 0.13 <100 // Single knuckle jOint 0.2 J> "V Double knuckle joint(With pin) 0.28 ~ ~ ~ 300 Limit switch mount 0.22 /~/ c E m Cam 0.12 Ii: 200 Special bracket 0.2 ~V Calculation method _ BaSIC weight . . ... . . 0.74 (40) 100 W :/ Example : CKI ()40-IOOY _ Additional

SMC

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

Clean Air Module

IDH Component Parts ID Threaded type Threaded type IDG Manual operation valve (with lever lock) IDK AMG Lead wire with L-type connector AFF With flow adjuster With differential pressure indicator AM PB AMD One-touch fitting One-touch fitting PA AMH AME u t q w e r y AMF No. Description Individual part no.

Series 12-REA Sine rodless cylinder

x10 12REA 50/63 0 -0.2 L NA 33 2-Rc, NPT, G 1/4 14 14 E(h8) E(h8) X D I 4-TC 14 14 Effective thread depth R 23 22 K W 23 25 2 4-M8 x 1.25 25 8-Q 14.5 C 0.1 + Effective thread depth 12 Effective thread depth R B S + Stroke 2 ZZ + Stroke Q x R S TC x R Model L 122 110 K 38 32 C 70 60 X ZZ NA E D B 72.2 58.2 I 70 60 W 12-REA63 12-REA50 100 86 66 53 30-0.033 69 55 M10 x 1.5 x 16 M8 x 1.25 x

Note 5)Standby power consumption when operating [W] Note 6)Max. instantaneous power consumption [W] Note 7)Type Note 8)Holding force [N]Power consumption at 20nC [W] Note 9)Rated voltage [V]Stroke rangeLEFS25S2100, 200, 300, 400500, 600208900720540????

Note 5)Standby power consumption when operating [W] Note 6)Max. instantaneous power consumption [W] Note 7)Type Note 8)Holding force [N]Power consumption at 20nC [W] Note 9)Rated voltage [V]Stroke rangeLEFS25S2100, 200, 300, 400500, 600208900720540????

Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalVerticalLEFS16A100, 200, 300, 4007210 to 5003,000o0.021050/20Ball screwLinear guide5 to 4090 or less (No condensation);2830Servo motor (24 VDC)Incremental A/B (

Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalVerticalLEFS25A100, 200, 300400, 500, 600112.512 to 5003,000o0.021250/20Ball screwLinear guide5 to 4090 or less (No condensation);4236Servo motor (24 VDC)Incremental

Note 5)Standby power consumption when operating [W] Note 6)Max. instantaneous power consumption [W] Note 7)Type Note 8)Holding force [N]Power consumption at 20nC [W] Note 9)Rated voltage [V]Stroke rangeLEFS25S2100, 200, 300, 400500, 600208900720540????

Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalVerticalLEFS16A100, 200, 300, 4007210 to 5003,000o0.021050/20Ball screwLinear guide5 to 4090 or less (No condensation);2830Servo motor (24 VDC)Incremental A/B (

Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalVerticalLEFS16A100, 200, 300, 4007210 to 5003,000o0.021050/20Ball screwLinear guide5 to 4090 or less (No condensation);2830Servo motor (24 VDC)Incremental A/B (

Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalVerticalLEFS16A100, 200, 300, 4007210 to 5003,000o0.021050/20Ball screwLinear guide5 to 4090 or less (No condensation);2830Servo motor (24 VDC)Incremental A/B (

Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalVerticalLEFS16A100, 200, 300, 4007210 to 5003,000o0.021050/20Ball screwLinear guide5 to 4090 or less (No condensation);2830Servo motor (24 VDC)Incremental A/B (

Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalVerticalLEFS16A100, 200, 300, 4007210 to 5003,000o0.021050/20Ball screwLinear guide5 to 4090 or less (No condensation);2830Servo motor (24 VDC)Incremental A/B (

Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalVerticalLEFS16A100, 200, 300, 4007210 to 5003,000o0.021050/20Ball screwLinear guide5 to 4090 or less (No condensation);2830Servo motor (24 VDC)Incremental A/B (

Motor typeEncoderRated voltage [V]Power consumption [W] Note 4)Standby power consumption when operating [W] Note 5)Max. instantaneous power consumption [W] Note 6)Type Note 7)Holding force [N]Power consumption [W] Note 8)HorizontalVerticalLEFS16A100, 200, 300, 4007210 to 5003,000o0.021050/20Ball screwLinear guide5 to 4090 or less (No condensation);2830Servo motor (24 VDC)Incremental A/B (