Compact Cylinder with Air Cushion Series RQ

-40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 9 8 9.5 13.5 10 3 Compact Cylinder with Air Cushion Double Acting: Single Rod Series RQ Auto Switch Mounting Bracket Part Nos.

PFxx-OMS0001CN

IN(70) IN OUT IN OUT 8cm M8 Rc1/2NPT1/2Rc3/4NPT3/4 2830 Nm 1/2 30 mm 3/4 35 mm 9mm 2F.S. -17No.PF-OMS0001CN-A FG 1 DC(+) 2 OUT2// 3 DC(-) 4 OUT1 -18No.PF-OMS0001CN-A NPN(2 ) PFMC7--ADC(+) OUT1 OUT2 DC(-) 28V 80 mA 1 V NPN(1 )(15 V) PFMC7--CNPN(1 )(420 mA) PFMC7--DDC(+) OUT1 DC(-) 28V 80 mA 1 V C15 V 1 k D420 mA 600 50 NPN(1 ) PFMC7--GDC(+) OUT1 DC(-) 28V 80 mA 1 V 0.4V ()30msec

10

F F MHL2-10D Z-X85 MHL2-16D Z-X85 1 2 1 2 MHL2-10DZ-X85 MHL2-16DZ-X85 25 25 70 60 70 60 20 20 Pressure 0.6 MPa Gripping force [N] Gripping force [N] Gripping force [N] Gripping force [N] Pressure 0.6 MPa Pressure 0.6 MPa 50 50 Pressure 0.6 MPa 0.5 MPa 0.5 MPa 15 15 40 40 0.5 MPa 0.5 MPa 0.4 MPa 0.4 MPa 30 30 10 10 0.4 MPa 0.4 MPa 0.30 MPa 0.3 MPa 20 20 5 5 10 10 0 0 10 20 30 40 50 60 70 0

LX Series Compact Electric Actuators

I l 50i 70 , iiFl.r* 0 q . . , . 50 6o ' 3 0 3o , , , . 3 0 , : LXPB5SA 40 40 '" .,1 i Slide Screw \ I i LXPB5SB 2D 2A LXSH2BC 100 50 220 High rigidity linear guide Ball LXSH2BD 100 50 90 Screw LXSH5BC 1 0 0 50 1 6 0 LXSH5BD 1 0 0 50 70 LXSH2SA 90 40 60 Slide LXSH2SB 45 20 30 Screw LXSHSSA 60 20 40 LXSH5SB 30 1 0 20 , \ | '-t 'oo"ot| I PLc I ll'i;!:-,?

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

75st Load weight m(kg) 40 50 100 Larger than 50st 50st 25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1 N: Approx. 0. 102 kgf F Stroke (mm) Bore size (mm) Model 25 50 75 100 125 150 175 200 MGTM 140 151 162 176 193 212 178 204 63 MGTL 199 212

Series CQ2

Width across flats 55 M36 x 1.5 21 47 50 64 200 30 30 2-Rc 1/2 (port size) 2 x 4-31.5 depth of counter bore 26 40 62 62 4-19 through 182 226 3 5.5 Flat washer 4 pcs. Note 1) 36 2 x 4-M22 x 2.5 thread depth 38 109 + Stroke 17 M24 x 3 effective thread depth 33 126 + Stroke 182 226 Width across flats 55 Note 1) 2 x 4-M22 x 2.5 threads through for strokes of 20mm or less.

VFR

[0.89] 0.24 [0.51] 0.74 [0.27] 0.79 0.53 0.24 3.1 [0.89] 0.24 [0.51] 0.74 [0.27] 2.8 [0.65] 0.24 [0.60] 0.68 [0.21] 0.89 0.53 0.27 3.2 [0.75] 0.26 [0.55] 0.73 [0.23] 0.89 0.53 0.27 2.5 0.18 0.58 3.0 0.27 0.34 (0.32) 0.42 (0.44) 0.43 (0.45) 2 position 3 position 10 Single 20 or less VFR2100 VFR2110 1 8 1 4 10 Double 20 or less VFR2200 VFR2210 1 8 1 4 1 8 1 4 1 8 1 4 Closed center 5 30 or

Compact 5-Port Solenoid Valve

(Red) Supply valve 2 40 5 1 3 5 7 9 11 13 15 17 19 21 23 25 27 29 31 33 35 37 39 41 Station 1: Black, Supply valve Release valve 1 2 3 4 5 6 7 8 9 10 Black White Black White Black White Black White Black White Black White Black White Black White Station 1 2 4 6 8 10 12 14 16 18 20 22 24 26 28 30 32 34 36 38 40 Station 1: White, Release valve Station 2: Black, Supply valve Supply valve Station

NAAMS Standards Compliant

Clamping block Fulcrum L Bore size: 50 Bore size: 63 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 300 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 300 Allowable load mass [kg] Allowable load mass [kg] 15 15 105 30 30, 45, 60 105 90 120 120 75 90 45, 60 75 Arm opening angle: 135 Arm opening angle: 135 Distance to the center of gravity [mm] Distance to the center of gravity [mm] Bore

RLQ

T3 Cylinder with Bypass Piping Component Parts T2 63.4 73.8 80.3 T3 57.8 67.8 74.3 TH 47.9 57.3 57.3 TP Rc, NPT, G 1/8 Rc, NPT, G 1/4 Rc, NPT, G 1/4 T1 81.4 93.3 99.8 No. 1 2 3 4 Description Qty. 1 1 1 1 Part no.

One-touch Fittings

Connection Female Thread: Rc, NPT, NPTF Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 60 3 to 5 1/4 30 to 60 8 to 12 3/8 15 to 45 14 to 16 1/2 15 to 30 20 to 22 Connection Female Thread: G Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 45 3 to 4 1/4 15 to 30 4 to 5 3/8 15 to 30 8 to

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

-3 AMD850-20 110 15.0 AT125C-30 AFF125A-30 IDF120D-3 AMD910-30 150 20.0 AT150C-40 AFF125A-30 IDF120D-3 AMD910-30 220 30.0 AT220C-40 AFF220A-40 IDF150D-3 50 Hz area 60 Hz area IDF1D-1 IDF2D-1 IDF3DIDF4DIDF6DIDF8DIDF11CIDF15CIDF22C1-3 IDF22C1-3 IDF37C1-3 IDF55C-3 IDF75C-3 IDF120D-3 IDF120D-3 IDF150D-3 AMD1010-40 AMH150-03 AMH150-03 AMH250-03 AMH250-03 AMH350-04 AMH350-04 AMH450-06

180

1 !4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !3 !2 i q !1 !4 y !9 Open condition Component Parts Note No.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Example) 10-ARP30K-03BE-1RY Clean room compliant, copperfree, fluorine-free, silicon-free Clean room compliant Copper-free, fluorine-free Symbol 20 30 40 Body size Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

2-2.7 Mounting holes Manual override M3 X 0.5 External pilot port (Only external pilot style(R)) (C4, C6) 10 (54.5) 16.6 (M5) 30 25 2.5 20 2.5 33.2 23.2 Mounting holes 4.5 29.5 10 10.8 10.8 PE port 22.2 Die cast hole Foot bracket For manifold gasket positioning 2 2 1 5 P 3 (54.5) 2-G(PF)1/16 R port Rc(PT)1/8 P port 0 1 0 1 DIN connector (Y): VQZ212 (R)wYwC4, C6, M5 L plug connector (L)

44

KFG2L0425-01 KFG2L0425-02 KFG2L0403-01 KFG2L0403-02 KFG2L0604-01 KFG2L0604-02 KFG2L0806-01 KFG2L0806-02 KFG2L0806-03 KFG2L1075-02 KFG2L1075-03 KFG2L1075-04 KFG2L1008-02 KFG2L1008-03 KFG2L1008-04 KFG2L1209-02 KFG2L1209-03 KFG2L1209-04 KFG2L1210-02 KFG2L1210-03 KFG2L1210-04 KFG2L1613-03 KFG2L1613-04 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 3/8 1/2

PA3000/5000/PAX1000

PAX1000, PA3000, PA5000 Proper tightening torque Nm Connection threads 12 to 14 Rc 1/4 22 to 24 Rc 3/8 28 to 30 Rc 1/2 28 to 30 Rc 3/4 PB1000 Proper tightening torque Nm Connection threads 1/6 turn after tightening by hand M5 2 to 3 Rc 1/8 Since the threaded sections of the PB1000 are resin, take particular care not to tighten any more than necessary.

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Compact Hydraulic Cylinder Double Acting/Single Rod Series CHQB 20, 32, 40, 50, 63, 80, 100 3.5MPa How to Order CHQB 50 30 D CHDQB 50 30 A72 D With Auto Switch Number of auto switches With auto switch (built-in magnet) Nil S n 2 pcs. 1 pc.

VPMW-701-30-FM-B85 N.C., 30 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting VPMW-701-30-FM-P80 N.C., 30 PSI, Flush Mount, Polysulfone 1/16" ID Barbed Fitting VPMW-701-30-FM-P85 N.C., 30 PSI, Flush Mount, Polysulfone 1/8" ID Barbed Fitting VPMW-701-30-FM-OT1 N.C., 30 PSI, Flush Mount, 1/8" O.D.

VPMW-701-30-FM-B85 N.C., 30 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting VPMW-701-30-FM-P80 N.C., 30 PSI, Flush Mount, Polysulfone 1/16" ID Barbed Fitting VPMW-701-30-FM-P85 N.C., 30 PSI, Flush Mount, Polysulfone 1/8" ID Barbed Fitting VPMW-701-30-FM-OT1 N.C., 30 PSI, Flush Mount, 1/8" O.D.