Brake mechanism added 0.5 0.6 0.7 F Black 0 V G Shield Connector pin arrangement A phase output pulse G A DB phase output pulse F B H E D C -X Counter value 0 1 2 3 4 3 2 1 699
Stainless steel Aluminum die-casted Material Note Spool/Sleeve Body Platinum silver w e Sub-plate 02 03 Aluminum die-casted Platinum silver Sub-plate Assembly Part No.: VS3110-SReplacement Parts Mounting bolts and gaskets are not attached. Part no. VS3115-G Description Material No.
e E , q 1.5 8 1 2 1 6 2 0 Cylinder speed (in/sec.) Sl6ct a propr unit sccording to exhaust flo/, in lh6 following ordr: (l) Oete|mine air con6umplion ot actuaicrs uaed in tl|e ckc\rii.
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com HAA15/22 Air inlet Air outlet Port size Ball valve Power source code Port size A 460 588 394 484 33 52 70 70 59 60 485 580 428 505 320 333 150 150 150 150 320 400 70 94 58 65 200 200 480 610 220 220 225 238 Model HAA15 HAA22 B C D E F G H J K L M N P
Before tightening VQ VX2 Nut VX Tubing support Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Tubing Insert bushing VX3 w e r VXA New PFA New PFA New PFA Series LQ 1 2 After tightening Quadruple sealing parts VN q LVC LVA Needle Valve Series LVN Needle Valve Series
TYPE Class Instance Attribute Size Description Output 100 100 3 1 INT Position set-point Input 150 150 3 2 INT 2 bytes measured position, 2 bytes diagnostics Figure 16-1 Explicit Messaging 41 - IN20267 Installation and Handling 17. Air supply 17.1. Use clean air.
Mounting orientation Free Impact/Vibration resistance (m/s2) (2) 150/50 Note 1) Use turbine oil Class 1 (ISO VG32). Note 2) Impact resistance: No malfunction from test using drop impact tester, to axis and right angle directions of main valve, each one time when pilot signal is ON and OFF .
Material Aluminum alloy Note q Description Plate Body Platinum silver Platinum silver Aluminum alloy Aluminum alloy w e Cap r Aluminum alloy Spacer Platinum silver Platinum silver t Stainless steel/Aluminum alloy Spool y 2 position: Aluminum alloy 3 position: Brass Sleeve u 2 position: Resin 3 position: Stainless steel Piston i Resin Center sleeve o Brass, NBR Side poppet Replacement Parts
Range Back Pressure SMC 22 8.0 -750mmHg~58psi 0~100C 0~30psi (60psi) 136 150 75 Height Width Operator Dia. 1 LVQ60 LQ Seal Locations N u t S e a l L o c k T ubing Support T aper Surface T u b i n g T r ap e zoidal T h re a d s I n s e rt Bushing Nut Lock U.S. Patent #5,996,636 Quadruple Seal Maximum leak protection. Up to 215psi @ 200C.
Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-W038 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly. Incorrect piping might cause leakage of supplied or drained leakage and wet surrounding area and facility.
Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-O021 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.
Electrical entry VQD G Body style VZS Coil voltage Lead wire length 0.6m Grommet 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Lead wire lenghth 1.5m 1 2 3 4 5 6 5: Plug lead Sub-plate VFS H VS VS7 Function Standard (1W) Low wattage (0.5W) External pilot Seal Y R (1) (2) 0 1 Metal seal Rubber seal Applicable to DC specification.
0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
150 175 AMV3-10 AMV6-14 AMV15-20 AMV37-20 AMV75-30 AMV160-40 R1 R1 1/2 R2 R2 80 (3B) JIS 10K FF flange 100 (4B) JIS 10K FF flange 789
Description Material Note Aluminum alloy Hard anodized Side plate q Carbon steel Black zinc chromated Finger w Carbon steel Black zinc chromated Lever e Carbon steel Black zinc chromated Joint r Stainless steel Shaft t Stainless steel Joint pin y Soft steel Black zinc chromated Cylinder plate u Stainless steel Lever pin i Steel lined oil imfilled acetal resin bearing Bearing o Compact cylinder
Description Material Note Aluminum alloy Hard anodized Side plate q Carbon steel Black zinc chromated Finger w Carbon steel Black zinc chromated Lever e Carbon steel Black zinc chromated Joint r Stainless steel Shaft t Stainless steel Joint pin y Soft steel Black zinc chromated Cylinder plate u Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office
Description Material Aluminum casted Aluminum casted Top cover Bottom cover q w VOA301-M V0307E-D-X56 3 port switching valve (for operation control) e 1 VR4152-00-0 GA46-10-01 12702A 12705A NLP-100A PNY-25 SW-100 x 6 x 2 JIS B 2401P3 r t y u i o !0 !
Series: LEKFS, Size: 32, Motor Mounting Position: R (Right Side Parallel), Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: H (Size 25: 20mm, Size 32: 24mm, Size 40: 30mm), Stroke: 150
3 Number of needle rotations Number of needle rotations AS3201F, AS3211F AS4201F, AS4211F r Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Component Parts No.