Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

VXA31/32

Series VXA31/32 Dimensions P port Bracket Pilot port J (Spanner flat) Port size P Port size Rc With bracket K 6 7.5 Symbol Model A B C D E F G H J L 29 32 M 14.5 17 1 8 1 4 VXA31 VXA32 19 25 20 20 18 21 20 20 22.5 27.5 42.5 47.5 71 80 81 90 21 27 , , 1 4 3 8 17-3-104 The VX series will be revised shortly.

Cylinder with lock

Apply grease to the seal groove and outer circumference by rubbing grease into them as shown in Fig. 20. 3) Tube gasket ( in Fig. 18) Install with care not to twist the tube gasket. A little less than 1 mm Fig. 19. Rod seal Fig. 20.

SYJ Series

SYJ312-5LOZ-M3 SY100-68-A-20 Ex2 Lead wire length of 300mm (standard) SYJ312-5LPZ-M3 Symbol for connector assembly with cover Ex. 1) Cable length: 300 mm In this case, the part number for the connector assembly with cover is not required.

Regulator Valve

Option Rated voltage Voltage symbol Part no. 100 VAC 100V VK300-82-2-01 110 VAC 110V VK300-82-2-03 200 VAC 200V VK300-82-2-02 Note) When requiring a gauge different than that mentioned above, specify the model number. 220 VAC 220V VK300-82-2-04 Option is packed with it.

ZSE30/ISE30

System error Brown DC(+) Internal data error 12 to 24VDC + Black OUT Load Internal data error Blue DC() 6 Series ZSE30/ISE30 Dimensions 20 0.1 2-M3 x 0.5 Thread depth 4 Lead wire with connector 9.5 25 8 30 3.6 M5 x 0.8 MPa PRESSURE 20 0.1 10 SMC OUT Width across flats 12 SET 1.5 01: R 1/8 T1: NPT 1/8 With bracket 42.5 10 15 4.2 3 22 30 20 25 20 SMC 45 30 1.8 35 35 Panel mount 8 17.8 7.2

ARJ1020F

Description ARJM10-4, -6, -10 Manifold base ARJ1020F-M5-06 ARJ1020F-M5-04 How to Order M5 ARJ 20 10 F 04 1 Option 1 0.2 MPa setting Miniature regulator Note 1) Compared with standard specifications, its adjusting spring has only been changed. It is not the product which does not allow the pressure more than 0.2 MPa. Adjusting spring is not replaceable.

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

DOC1020530

PA07 . 17 4.6 Auto tuning modePr.PA08 . 18 4.7 Input signal automatic on selectionPD01 . 18 4.8 Parameter setting by MR Configurator2TM . 19 4.8.1 Parameter reading . 20 4.8.2 Parameter setting (Ex. Control mode change) . 20 5.

9.8

OZ Edition B Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2010 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing NR printing OZ 7150SZ Printed in Japan. D-DN

Air cooled Thermo-con (Compact type)

Request message to read (from master) 02 30 31 52 50 56 31 03 65 Request to read Address BCC data End code Identification code Start code Response message from the product 02 30 31 06 50 56 31 30 30 32 35 30 03 06 Address Start code BCC data Affirmation code End code Numerical data Identification code Code Symbol/Data ASCII code Start code STX 02H Address 01 30H 31H Required content R

Air cooled Thermo-con (Compact type)

Request message to read (from master) 02 30 31 52 50 56 31 03 65 Address BCC data End code Request to read Start code Identification code Response message from the product 02 30 31 06 50 56 31 30 30 32 35 30 03 06 Address BCC data End code Start code Numerical data Affirmation code Identification code Code Symbol/Data ASCII code Start code STX 02H Address 01 30H 31H Required content R

REGULATOR

HOW TO ORDER AR 30 03 BG B K 1 4 5 6 3 2 1 1 1 1 Symbol Description Body size 20 25 30 40 50 60 Reverse flow function K With reverse flow function 2 2 2 2 Nil Rc N NPT F G Thread type 3 3 3 3 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 4 4 4 4 Port size Nil Without mounting option B With bracket H With set nut for panel mounting a Mounting Option Nil Without pressure gauge E Square embedding

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

Model L5 D3 T2 13.7 18.7 16.8 18.7 18.7 20.8 20.8 21.8 34.6 33.9 11.8 39.6 38.9 22.9 28.2 25.2 28.2 28.2 32.6 32.6 34.4 11.6 15.2 12.8 15.2 15.2 18.5 18.5 20.9 38.4 44.7 43.4 46.4 51.3 54.1 64.2 66 14 15.8 18 19.7 20.3 23.1 32 35 65 68 107 110 212 215 6 8 6 8 8 10 10 12 ASP330F-01-06S ASP330F-01-08S ASP430F-02-06S ASP430F-02-08S ASP530F-03-08S ASP530F-03-10S ASP630F-04-10S ASP630F-04-12S

AMP

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 1999 SMC CORPORATION All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing November, 1999 D-SMC.L.A. P-80 (YG)

VHS

Left IN1(P) Piping VHS500-06 VHS501-06 VHS400-04 VHS401-04 VHS400-03 VHS401-03 VHS400-02 VHS401-02 Right IN1(P) 3 4 1 2 3 8 1 4 Port size Effective area (mm2)(CV) Weight (kg) 93(5.22) 57(3.20) 35(1.97) 21(1.18) 105(5.90) 76(4.27) 54(3.03) 35(1.97) 0.29 1(P)2(A) 2(A)3(R) 0.34 0.25 0.27 Left or right to the front face of the handle.

VER2000/4000

to 935 AMR 03 0 VER400 Series VER4000 ARM Thread type Pilot type Internal pilot External pilot ARP 0 1 Nil Rc Port size F N G NPT T IR Nil Without sub-plate 03 04 06 3 8 1 2 3 4 NPTF IRV VEX1 SRH Note) To order valve with interface regulator (B port regulation), flow control interface, or pressure gauge, indicate part number of the electro-pneumatic proportional valve and that of the option

3 Port Solenoid Valve/Residual Pressure Release Valve with Detection of Main Valve Position VP500/700-X536, X538, X555 Safety Standard ISO13849-1 Certified * Refer to page 2 for compliant products. *

Valve with Detection of Main Valve Position VP500/700-X536, X538, X555 How to Order Residual pressure release valve VP 2 5 4 5 Z R D 1 03 M X536 VP 4 1 X538 5 4 R 5 D Z 03 M A Dual residual pressure release valve Dual residual pressure release X555 VP 4 1 5 4 5 D Z 03 M valve with soft start-up function Throttle Thread Series Nil Variable throttle 10 1 xed orice 15 1.5 xed orice 20* 2 xed

Speed Controller: Standard Type Elbow Type (Metal Body) AS Series

AS120-M5 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 646 B