XL

[V]-16 XL(A, C, H) [V]-25 XLD [V]-25 XL(F, G) [V]-16 XL(F, G) [V]-25 XLD [V]-40 XL [V]-40 XLD [V]-50 XL [V]-50 XLD [V]-63 XL [V]-63 XLD [V]-80 XL [V]-80 Construction No.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

B A 1.5 12 11 12 6.6 6.6 6H9 ( ) depth 6 +0.030 0 B A 32 11.5 32 11.5 G (NN 1) x H H B-B A-A (mm) Model F 55 46 55 65 75 60 48 60 65 N 4 4 4 4 4 6 8 8 8 G 23 23 23 23 32 44 31 56 H 55 55 55 65 80 44 66 66 NN 2 2 2 2 2 3 4 4 4 GA 23 23 23 23 32 72 88 97 122 HA 55 55 55 65 80 65 88 132 132 I 16 16 16 16 16 31 20 18 18 J 56 56 56 66 90 100 150 205 230 K 35 45 55 65 75 100 125 150 175 KA

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

MM 28 28 H 5 5 GB 5 5 GA 8 8 F 4 5 D 15 15 A 10 16 Bore size With air cushion With air cushion type is not available for 21-/22-CJ2.

•

(DiH erEffl surfaces 110 100 105 15 Same surfOlce), W~h 1 pc D-A90 10 41 15+ 40 (0 2) 100 + 40(1\ 2 4) 110 -+ 40 1 05+40~ 2 2 2 With n pes. (n:: 4. 8, 12, 16 .j (n :: 4, 8, 12. 16 .. ) (n = 4, 8. 12. 16) (n:: 2, 4. 6. 8 ) W ith 2 pes. (Dilferem surfaces 85 75 80 ' 0 Same sunacg).

AC

AL Model Port size A B C D M N P R B B E F G H J K L M5 X 0.8 38.5 50 70.5 70.5 88 88 108 108 108 16 23 26 26 33 36 40 40 40 105 147.5 4.5 5.5 7 7 9 9 12 12 12 50 80 80 80 105 105 105 105 105 91 140 181 181 238 253 300 310 315 5 5 7 7 7 7 10 10 10 7.5 8.5 11 11 13 13 16 16 16 25.5 38 38 38 41 40.5 48 48 48 84.5 124.5 153 153 188 189.5 268 282 282 26 56.8 60.8 60.8 65.5 69.5 75.5 75.5 78 25

SMC Pneumatic Clean Series

Proper auto switch mounting position (Detection at stroke end) D-C73 Auto switch 8.5 16 Approx. Hs A 26 B D-H7A1/H7B Auto switch 8.5 16 Approx.

A

I f a p re s s u re g re a t e r t h a n t h e s e t p re s s u re i s re a c h e d , t h e u n i t w i l l o p e n , c l o s i n g w h e n p re s s u re i s l e s s t h a n s e t pressure.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

42 37.5 15.5 12 14 23.3 28.5 35 20.5 16 20 14.5 16 20 15 16 23.5 206 264 322 42 51 59 7 8 9 37.5 47 59.5 12 16 18.5 220 280 340 5.5 6.5 8 15.5 20 23.5 Rc1/16 Rc1/16 Rc1/8 13 13 23 11 12 14 Model QQ SS UU XX 16 16 24 MY1H25 MY1H32 MY1H40 26.5 40 47 6 11 12 18 32 35 WXX WX V V R D Hole Size for Centralized Piping on the Bottom (Machine the mounting side to the dimensions below.)

RHC

, 16 3/8, 16 1/2, 16 1500 2000 2500 3000 28.5 Composed effective area So (mm2) Composed effective area So (mm2) Composed effective area So (mm2) 100 RHC = 0.7 38 47 0.5 56.5 MK(2) 0.1 0.3 10, 12, 16 1/4, 3/8 50 RS Q G 500 15 63 RS H A 3/8, 16 1/2, 16 1/2, 16 3/4, 16 3/4, 16 1000 1500 2000 2500 3000 30 0 45 1,000 2,000 3,000 60 RZQ Maximum speed Vmax (mm/s) 75 89.5 80 MI W S 16 3/8, 1/2 500

SYJ300/500/700

DO Without connector Do not replace V111 (G, H, L, M, W) to V115 (DIN terminal) and vice versa when replacing pilot valve assembly only. 4-4-21 22 Series SYJ500 Body Ported [ ] for AC Grommet (G), (H): SYJ52G H -M5 With bracket: SYJ52G H -M5-F G: Approx. 300 H: Approx. 600 (Lead wire length) 55.6 [57.8] 37 M5 x 0.8 (A port) 33.5 2-3.5 (For mounting) 30 3.5 15.5 2.5 15 11 A 18 25 + Manual

SMC

G (NN1) x H Section AA Section BB (mm) Model F 35 35 35 40 30 55 65 70 ZZ 107 107 107 117 132 182 230 280 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 H 40 40 40 50 30 35 35 35 G 16 16 16 16 21 26 39 19 N 4 4 4 4 6 6 6 8 HA 40 40 40 50 30 70 70 70 NA 2 2 2 2 2 4 4 4 GA 16 16

Environment

LEFS16/Ball Screw Drive Horizontal Vertical 16 6 14 Lead B Lead B 12 Work load: W [kg] Work load: W [kg] 4 10 Lead A 8 Lead A 6 2 4 2 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 700 800 Speed: V [mm/s] Speed: V [mm/s] LEFS25/Ball Screw Drive Horizontal Vertical 20 30 Lead B 25 15 Work load: W [kg] Work load: W [kg] Lead B 20 10 15 Lead A Lead A 10 5 Lead H Lead H 5 0 0 0 100 200

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

0 V6 LEJS 40 500 A H q Accuracy e Motor type *1 r Lead [mm] Symbol LEJS40 LEJS63 H 24 30 A 16 20 B 8 10 w Size Symbol Type Output [W] Actuator size Compatible driver Nil Basic type H High precision type V6 AC servo motor (Absolute encoder) 100 40 LECYM2-V5 LECYU2-V5 V7 AC servo motor (Absolute encoder) 200 63 LECYM2-V7 LECYU2-V7 t Stroke [mm] *2 40 63 *1 For motor type V6, the compatible

MY1

16.0 15.0 120 150 180 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.5 PA 060 080 100 NW 60 74 94 P PB 112 134 150 PG 7 8 9 PP1 12.7 15.5 17.5 PP2 12.7 18.5 20 Q 206 264 322 QQ 16 16 26 QW 46 60 72 RR1 18.9 22.0 RR2 17.9 24.0 SS 5.1 4.0 9.0 TT 15.5 21.0 26.0 UU 16 16 21 VV 16 19 23 W 122 144 160 WW 11 13 20 YW 070 088 104 Z 240 300 360 ZZ XX 38 48 54 Bore size (mm) 25 32 40 Rc1/8 Rc1/16 Rc1/8

MNB

n 4) 2 (n 4) 2 (n 4) 2 110 + 45 (n 4) 2 85 + 45 90 + 45 n = 4, 8, 12, 16 100 + 45 n 20 + 45 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 140 2 (Different sides, same side), 1 15 120 130 D-P5DWL 140 + 65 n = 4, 8, 12, 16 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 120 + 65 n = 4, 8, 12, 16 130 + 65 n = 4, 8, 12, 16 n 15 + 65 n = 2, 4, 6, 8 Other than the applicable

MNB

n 4) 2 (n 4) 2 (n 4) 2 110 + 45 (n 4) 2 85 + 45 90 + 45 n = 4, 8, 12, 16 100 + 45 n 20 + 45 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 140 2 (Different sides, same side), 1 15 120 130 D-P5DWL 140 + 65 n = 4, 8, 12, 16 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 120 + 65 n = 4, 8, 12, 16 130 + 65 n = 4, 8, 12, 16 n 15 + 65 n = 2, 4, 6, 8 Other than the applicable

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

ZZ + Stroke H 3.5 (mm) ZZ S P I E D A H H1 13.5 10.5 10.5 10.5 FL Bore size H2 41 32 32 26 B2 22 17 17 13 B1 AL K 11 8 8 8 13 F 12 10 8 6 KA MM NA NN G 0 50 45 45 41 6 6 5 8 8 8 40 32 25 20 24 22 22 18 21 19.5 19.5 15.5 14 12 10 8 20-0.033 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 M26 x 1.5 M26 x 1.5 M20 x 1.5 46.5 37.5 33.5 28 7 5.5 5.5 5 42.5 34.5 30 24 154 122 120 116 1/8 88 64 62 62 16

LEC-OM02904

ON E6,E7 2 ON 1 1 2 16 3. (1) 1 2 16 4 6 4 (2) SW1 Ab AC Ad Ab A b A b . A C A d A E A F A H A A (1) b # # Ready-off Ready-off (1) d # # ON ON (1) C # # OFF OFF (2) * * No.No.81 8 8 8 CPU CPU (3) 0 0. b JOGDO (1) # #. b (3) # #. d # #. C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.

High Vacuum Angle Valve, XL Series

Indicator: 6 High Vacuum Angle Valve Series XLA, XLAV Dimensions (mm) 1in = 25.4mm (b) XLA/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) Heater (optional) H B G A A (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 E Note 1) B 103 113 158 170 196 235 A 40 50 65 70 88 90 Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 12 11 11

Tamper Proof and Flat Head Screw

JIS symbol 1/8, 5/32 3/16, 1/4 3/8 5/16 3/16, 1/4 1/4 3/16 1/4, 5/16 1/2 Inch sizes 3/8 5/32 Flow rate l/min (ANR) {Nl/min} 920 660 230 420 1390 290 460 1050 100 130 Controlled (Free) Effective area mm flow 14 10 3.5 6.5 21 4.5 7 16 2 1.5 1l/min=0.035SCFM 18mm2=1Cv Note 1) Flow rate values are at a pressure of 0.5MPa (72.5psi) and temperature of 20C (68F).