SL5200

Single Stage Compact Regulator for Ultra High Purity Series SL5200 Sub-atmospheric pressure delivery option Springless design (No poppet spring in the wetted area) For UHP gas delivery Flow capacity Standard: to 30 slpm HF (option): to 130 slpm Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e SL52 S M FV4 FV4 02

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50mm clamps Symbol Description Bore size 50 50mm bore Arm mounting position A001 ACA001M A003 ACA203M 63 63mm bore 80 80mm bore A006 ACA006M A004 ACA206M A007 ACA007M A005 ACA207M Cylinder port Blank NPT TF G(PF) A008 ACA008M A006 ACA208M A009 ACA009M A009 ACA213M A013 ACA013M A010 ACA216M A018 ACA018M A011 ACA217M A019 ACA019M A012 ACA218M Arm opening angle 30, 45, 60, 75, 90, 105, 120, 130

CRQ2

JB BC BD BU CA CB F H Size Rotation 20 30 90, 180 90, 180 40 90, 180 16 16 5.2 10 12 15 8.3 32 30 32 36 6.5 8.5 8.6 2.5 3 3 63 (11) 50 14 34 69 (11) 68 14 39 14.5 16.5 49 30.4 34.7 4.7 4.9 7 8.1 25 30 11 14 14 M8 x 1.25 M10 x 1.5 M10 x 1.5 78 (13) 76 16 47 18.5 55 40.4 Size Rotation K Q S W Key dimensions TF (H9) TG (H9) TL JJ US TA TD G L UW TB TC M N b l 90 180 90 180 90 180 3 29 104 130

LC6D/LC6C

unit Key switches Cable length 2m Basic performance Performance/Specifications LC6C-220AD Applicable controller Operating temperature range 5 to 40C Communication method Conforming to RS485 Parameter change, JOG operation, alarm reset, teaching, test Functions Protective function indication Alarm code Dimensions POWER ALM PARA AL-RES JOG MON TEACH I/O TEST STOP SMC LC5-1-T1 TEACHING BOX 130

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Flow Rate and Effective Area AS1001F AS2001F AS3001F AS2051F AS4001F Model 3.2, 4, 6 4 6 6 8 6 8 10, 12 10 12 Metric size Tubing O.D. 1/8" 5/32" 3/16", 1/4" 3/16" 1/4" 1/4" 5/16" 3/16" Inch size 1/4" 5/16" 3/8" 3/8" 1/2" 5/32" Flow rate (l/min(ANR) 290 460 230 100 130 420 660 920 1050 1390 Controlled flow (Free flow) 4.5 7 3.5 1.5 2 6.5 10 14 16 21 Effective area (mm2) Note) Flow rate values

Speed Controller: Standard Type Series AS In-line Push Locking Type 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 5 to 60C (No freezing) Ambient and fluid temperature 8 turns Number of needle rotation 130 g (Metallic handle: 140 g) Weight Flow rate (/min (ANR)) 810 Free flow 12.3 Effective area (mm2) Flow rate (/min (ANR)) 810 Controlled flow 12.3 Effective area

Speed Controller with One-touch Fittings Series AS In-line Type 1

Flow Rate and Effective Area AS3001F AS2051F AS4001F AS2001F AS1001F Model Metric size 4 6 6 8 3.2, 4, 6 6 8 10, 12 10 12 Tubing O.D. 1/8", 5/32" 3/16", 1/4" 5/32" 3/16", 1/4" 3/16" 1/4", 5/16" 1/4" 5/16" 3/8" 3/8" 1/2" Inch size Controlled flow (Free flow) 100 130 230 290 460 420 660 920 1050 1390 Air flow /min (ANR) 1.5 2 3.5 4.5 7 6.5 10 14 16 21 Effective area (mm 2) Note) Flow rate values

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

AK ASS Flow Rate and Effective Area ASR JIS Symbol AS1001F AS2001F AS3001F AS2051F AS4001F Model ASF Metric size 8 6 8 6 10 3.2, 4, 6 4 10, 12 12 6 Tubing O.D. 3/16" 1/4" 1/8", 5/32" 1/4" 3/8" 1/2" 5/32" 3/16" 5/16" 3/8" Inch size 3/16", 1/4" 1/4" 5/16" Controlled flow (Free flow) Flow rate (/min (ANR)) 420 1050 130 290 660 1390 460 920 230 100 Effective area (mm 2) 6.5 16 2 4.5 10 21 7 14

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Flow Rate and Effective Area AS2001FM Model AS1001FM AS2051FM 8 3.2, 4, 6 6 6 Metric size 4 Flow Direction Symbols on Body Tubing O.D. 1/8", 5/32", 3/16" 1/4" 1/4", 5/16" 3/16", 1/4" 3/16" Inch size 5/32" JIS Symbol Symbol Flow rate (/min (ANR)) 12 7 38 Controlled flow Effective area (mm 2) 0.2 0.1 0.6 Flow rate( /min (ANR)) 100 460 290 230 130 Free flow Effective area (mm 2) 1.5 7 4.5 3.5

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

ASV AK Flow Rate and Effective Area ASS AS1001FG AS2001FG AS2051FG AS3001FG AS4001FG Model ASR 3.2 6 6 8 10 4 12 6 8 10 12 4 Metric size ASF 6 Tubing O.D. 1/8" 3/16" 1/4" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 5/32" Inch size Flow Direction Symbols on Body 3/16" JIS Symbol Flow rate (l/min (ANR)) Controlled flow (Free flow) 100 130 230 290 460 420 660 920 1050 1390 Symbol Effective

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

10, 16, 20 ASN AS2001F 20, 25, 32 AS2051F 20, 25, 32, 40 AQ AS3001F 40, 50, 63 ASV AS4001F 63, 80, 100 AK Flow Rate and Effective Area ASS AS1001F AS2001F AS3001F AS2051F AS4001F Model JIS Symbol Metric size 6 6 8 10 6 8 3.2, 4, 6 4 10, 12 12 ASR Tubing O.D. 3/16" 1/4" 1/8", 5/32" 3/8" 1/2" 5/32" 3/16" 1/4" 5/16" 3/8" Inch size 3/16", 1/4" 1/4" 5/16" ASF Flow rate (l/min (ANR)) 1050 100 130

Table of Contents

Specific Product Precautions. 126 127 127 128 129 130 131 131 131 134 135 136 138 139 139 139 143 146 148 150 151 152 152 153 154 155 156

AMR3000 to 6000

#4 VY G N Bracket mounting dimension With auto drain Model Port size A M L K J H G F E D C B U (Body) V (Adapter) L 178 211 277 321 B 260 298 366 432 T 9 9 11 11 S 8 7 10 15 R 78 97 98 115 P 50 35 45 46.5 AL 1 4, 3 8 1 4, 3 8 144 166 188 230 182 215 281 325 21.5 18 16 18.5 37 37 42 42 3.2 3.2 4.5 4.5 32 40 48 56 28 37 37 44 51 61 66 81 103 121 131 161 10 10 70 70 264 302 370 436 100 120 130

ARJ1020F

Manifold Base (Option)/Dimensions VBA VE VY G AL Stations Manifold base part No. 4 6 10 A dimension B dimension 90 130 210 82 122 202 ARJM10-4 ARJM10-6 ARJM10-10 1.5-4

AS-FG/ASD-FG

Flow Rate and Effective Area AS1001FG AS2001FG AS2051FG AS3001FG AS4001FG Model 6 8 10 12 4 6 6 8 10 3.2 12 4 Metric size 6 Tube O.D. 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 3/16" 1/4" 1/8" Inch size 1/4" 5/16" 5/32" 3/16" l/min (ANR) Flow rate Controlled (Free) flow 100 130 230 290 460 420 660 920 1050 1390 1.5 2 3.5 4.5 7 6.5 10 14 16 21 Effective area mm Note) Flow rate values are at a pressure

Pneumatic Purification

DEWPOINT CFM CFM MAX PSIG A B C lbs IDF3D-S 5.8 12 115/1/60 3/8 145 R134a 8.9 14.1 18.5 39.7 IDF4D-S 8.1 18 115/1/60 3/8 215 R134a 9.5 18.9 23.9 57.3 IDF6D-S 12.6 26 115/1/60 1/2 215 R134a 8.7 23.6 20.5 70.5 IDF8D-S 16.5 35 115/1/60 3/4 215 R134a 8.7 23.6 20.5 70.5 IDF11C-S 25 53 115/1/60 3/4 215 R22 10.2 24.4 22.4 103.6 IDF15C-S 40 85 115/1/60 1 215 R22 11.0 24.4 24.4 110.2 IDF22C1-S 58 130

HAA

(mm) Voltage(V) 10% 15 2200 300 Single100 55/65 37 5700 350 X 2 3-phase200 132/170 X 2 1.44/1.4 11/2B union 55 22 3300 400 3-phase200 90/130 0.4/0.45 B union 36 Single200 38/46 3-phase200 50/60 Cooling fan (50/60Hz) Power consumption (W) Current (A) 0.46/0.52 0.23/0.26 Rp(PS) Socket 18 0.8/0.9 0.4/0.35 1B union 24 11 2 Port size Weight (kg) 3 4 Compact size and light weight Note 1) Based

ITV0000

For IITV00-n Total weight (g) Stations (n) x 100 + 130 (Weight of end block A, B assembly) + Weight (g) of DIN rail Note 2) Specifications other than the following are optional. Pressure range: 0.1MPa, 0.5MPa, 0.9MPa, Power supply voltage: 24VDC, Input signal: 0 to 10VDC Note 3) When there is a downstream flow consumption, pressure may become unstable depending on piping conditions.

MIW/MIS

Outputs Operating pressure MPa Unit: N Operating direction Piston area (mm2) Rod size (mm) Bore size (mm) 0.3 0.2 0.4 0.5 0.6 0.7 34 23 OUT 45 57 68 79 113 12 6 26 17 IN 34 43 51 60 85 94 63 OUT 126 157 188 220 314 20 10 71 47 IN 94 118 142 165 236 Weights Unit: g Increase by stroke adjuster Stroke mm Weight g Increase by scraper Model Model 12 240 10 5 MIW12-12D MIW 20 650 30 10 MIW20-20D 10 130

3 Port Air Operated Valve Series SYJA300 1

Rc 1/8 Body ported 80 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 M5 x 0.8 130 (Without subplate 80) N.C. Base mounted (with sub-plate) SYJA724-01 SYJA724-02 N.O.