10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)250 VAC for 1 minute between live parts and case2 M or more between live parts and case (at 50 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (De-energized)100 m/s2 in X, Y, Z directions, 3 times each (De-energized)?

10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)250 VAC for 1 minute between live parts and case2 M or more between live parts and case (at 50 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (De-energized)100 m/s2 in X, Y, Z directions, 3 times each (De-energized)?

10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)250 VAC for 1 minute between live parts and case2 M or more between live parts and case (at 50 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (De-energized)100 m/s2 in X, Y, Z directions, 3 times each (De-energized)?

10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)250 VAC for 1 minute between live parts and case2 M or more between live parts and case (at 50 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (De-energized)100 m/s2 in X, Y, Z directions, 3 times each (De-energized)?

10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)250 VAC for 1 minute between live parts and case2 M or more between live parts and case (at 50 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (De-energized)100 m/s2 in X, Y, Z directions, 3 times each (De-energized)?

10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)250 VAC for 1 minute between live parts and case2 M or more between live parts and case (at 50 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (De-energized)100 m/s2 in X, Y, Z directions, 3 times each (De-energized)?

10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)250 VAC for 1 minute between live parts and case2 M or more between live parts and case (at 50 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (De-energized)100 m/s2 in X, Y, Z directions, 3 times each (De-energized)?

COUPLED, ACTUATOR, CY3R MAGNETICALLY COUPLED CYL, I5, 25MM CY3R CLEAN ROOM, 1.98416 lb, ModelBore size (mm)Port sizeLubricationStandard stroke (mm)Maximum manufacturable stroke (mm)Cushion RubberAir12-CY3R2525Rc1/8 NPT1/8 G1/8Non-lube100, 150, 200, 250, 300, 350,400, 450, 500, 600, 700, 8001300(Both sides)?

COUPLED, ACTUATOR, CY3R MAGNETICALLY COUPLED CYL, I5, 25MM CY3R CLEAN ROOM, 2.02825 lb, ModelBore size (mm)Port sizeLubricationStandard stroke (mm)Maximum manufacturable stroke (mm)Cushion RubberAir12-CY3R2525Rc1/8 NPT1/8 G1/8Non-lube100, 150, 200, 250, 300, 350,400, 450, 500, 600, 700, 8001300(Both sides)?

HRX-OM-W032

Setting of response delay time Setting range: 0 to 250 ms to Setting/Checking: Communication range (simple communication protocol) 27. Press the [SEL] key once. Setting screen of communication range (simple communication protocol) is displayed on the digital display. PV SV 28. Set communication range (simple communication protocol) with [] key or [] key, and press [SEL] key to enter.

CG1-SMV13_en

250 0.13 0.21 0.34 0.54 0.86 1.30 2.10 300 0.15 0.25 0.40 0.64 1.00 1.60 2.50 400 0.20 0.33 0.53 0.83 1.30 2.10 3.30 500 0.25 0.41 0.65 1.00 1.60 2.60 4.10 Internal Volume (Litres) Page 1 of 2 CG1-SMV13 A vacuum pad is a consumable part, so it is warranted for a year after it is delivered.

Rotary Table

(g) Size 1 2 3 7 Basic Type 75 105 150 250 High precision Type 80 115 165 265 * Values excluding the weight of auto switch Effective torque 0.8 7 Effective torque (Nm) 0.6 3 0.4 2 0.2 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Operating pressure (MPa) 19 - Internal construction and parts MSQ1 to 7 20 11 18 12 17 23 21 2 24 7 1 15 14 13 6 14 15 24 5 10 9 16 22 8 4 3 19 24 O ring 4 23 Hexagon socket set

10% or less)150 mA or lessIP650 to 50C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M (500 VDC Mega) between external terminal and case10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller.490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?

10% or less)150 mA or lessIP650 to 50C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M (500 VDC Mega) between external terminal and case10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller.490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?

10% or less)150 mA or lessIP650 to 50C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M (500 VDC Mega) between external terminal and case10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller.490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?

10% or less)150 mA or lessIP650 to 50C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M (500 VDC Mega) between external terminal and case10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller.490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?

10% or less)150 mA or lessIP650 to 50C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M (500 VDC Mega) between external terminal and case10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller.490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?

10% or less)150 mA or lessIP650 to 50C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M (500 VDC Mega) between external terminal and case10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller.490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?

10% or less)150 mA or lessIP650 to 50C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M (500 VDC Mega) between external terminal and case10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller.490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?

10% or less)150 mA or lessIP650 to 50C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M (500 VDC Mega) between external terminal and case10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller.490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?