Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

47 (48) AS321FSG-02-08 (S) 8 13.2 22.7 33 14.2 AS321FSG-02-10 (S) 10 15.9 26.7 37 35.7 15.6 48 (49) AS321FSG-02-12 (S) 12 18.5 29.7 40 34.5 17 50 (51) AS321FSG-03-06 (S) 6 1/4 19 16.6 10.4 21.8 32.1 28.7 55.4 54 50.2 48.8 13.3 24.5 28.5 9.3 19.2 38 (39) AS321FSG-03-08 (S) 8 13.2 22.7 33 14.2 AS321FSG-03-10 (S) 10 15.9 26.7 37 28 15.6 39 (40) AS321FSG-03-12 (S) 12 18.5 29.7 40 26.8 17 41 (42

Large blow and

Do not use in an atmosphere having corrosive gases, chemicals, sea water, water steam, or where there is direct contact with any of these. 13 21.6 30 42 ZH -X185 ZH -X185 Air 0 to 0.7 MPa 5 to 80 (with no freezing or condensation) Refer to back page 50 for Safety Instructions and pages 49 to 51 for Vacuum Equipment Precautions.

A

3 57 52 47 127 98 115 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 128 143 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5

Rotary Table Series MSU

Dimensions (mm) 1in = 25.4mm Scale: 60% With auto switch: MDSUA7-S 19 25.5 (34.5: Connector type) Angle adjustment bolt 58.5 30 2-M5 x 0.8 (Port position: Side port type only) A port B port 30 25 20.5 (26.5: Connector type) 42 65 Connector type 8 4 34.5 26.5 Connector type 8 Series MSUA Rotary Table High Precision Type These drawings indicate the condition when the B port is pressurized.

Soft Start-up Valve AV2000/3000/4000/5000

3 57 52 47 127 98 115 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 128 143 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5

Digital Flow Switch Series PFA For Air Series PFW For Water

DC (+) 1 NC 2 DC () 3 4 OUT 4 43 2-3.4 Flow direction PFA511/521/551 62 116 23 1.6 76.2 54 44 34 44.5 2-Port size 30 40 50 (43.5) 42 6 Flow direction 9 Series PFA Dimensions/Remote Type Display Unit for Air PFA3-A Panel mount type Internal circuit and wiring examples to are terminal numbers. 41.8 40.3 Sensor 4.3 40 Blue Brown Black N.C. 1 2 3 4 SMC FLOW SWITCH 5 6 7 8 OUT1 OUT2 35.8 A 40

SFOD-OMT0012

(1) Parallel I/O forced output . 42 4.8.

SFOD-OMT0011CN

No.SFOD-OMT0011CN-A (4 ) // JXC-W1 (JXC3 Series) 1. . 3 2. . 5 2.1 . 5 2.2 . 5 2.3 . 5 3. . 6 3.1 . 6 (1) . 6 (2) . 6 3.2 . 6 (1) . 6 (2) . 6 (3) . 8 4. . 9 4.1 . 9 (1) . 9 (2) . 16 (3) . 19 (4) . 22 (5) . 23 (6) . 24 (7) . 26 4.2 . 28 (1) . 28 (2) . 31 (3) . 32 4.3 . 33 (1) . 33 (2) . 35 4.4 . 36 4.5 . 36 4.6 . 39 (1) . 39 (2) JOG . 40 (3) 1 . 40 4.7 . 42

VND

mounting hole Applicable flange Pilot port Rc A B C D E F G H J Model 8 10 12 50 40 32 1 8 1 4 1 4 VND50D-32F VND60D-40F VND70D-50F 130 150 180 211.5 227 251 135 140 155 135 147 163.5 20 24 24 100 105 120 36 42 54 12 12 14 17-4-41 6 Series VND Precautions Be sure to read before handling.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

Size: 10 to 50 B A Magnet Operating range at proper mounting position (Lm/2) Most sensitive position Operating range of single auto switch Lm Reed auto switch Solid state auto switch Hysteresis angle DM9 DA9, DA9V Size Rotating angle Operating angle m 10 10 10 10 Operating angle m 10 10 10 10 B 45 62 68 83 B 49 66 72 87 A 27 35 39 49 A 31 39 43 53 Hysteresis angle 90 80 65 50 42 35 30 24

Aluminum High Vacuum Angle Valve

Power/Voltage At the Rated Voltage Model Starting Power (W) Current (A) Power (W) Current (A) Holding G/C/D/T, P5G 1.5 36 4.8 14.8 10 4.9 2.3 5.3 20 13.5 6.7 3.0 0.38 0.35 0.27 0.11 0.10 0.5 0.46 0.36 0.15 0.12 50 Hz 60 Hz 50 Hz 60 Hz P1G 0.47 30.5 XLS-16P2G 0.24 30 G/C/D/T, P5G 2.0 47 50 Hz 60 Hz 50 Hz 60 Hz P1G 0.62 42 XLS-25P2G 45 0.35 XLA Construction/Operation XL XL Internal control

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

auto switch mounting position for table position detection Auto switch A B Auto switch a b d c Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Proper Mounting Position (mm) A B Bore size (mm) 63 80 100 10 13 17.5 14 18.5 23.5 Proper Mounting Position (mm) a b 14 18

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

53.5 28 40 242 36.5 30 6.8 6.6 12 16 M6 x 1 M8 x 1.25 14 372 354 186 190 124 158 118 116.5 73 106 144 140 64 30.5 43 286 40.5 35 8.6 8.5 14 15 M8 x 1.25 M10 x 1.5 Model FF II NN AA BB CC DD EE GG JJ KK LL MM WW XX ML1C25 ML1C32 ML1C40 1/8 5 5 5 5 7 28 26 14 44 20 16 12.5 120 42 1/8 6 5 6 5 8 36 28 18 54 36 18 12.5 140 48 1/4 6 5 6 5 8 47 30.5 17 62 30 22 16.5 170 51 9-14-8 9 Series ML1C Mechanically

Refrigerated Air Dryer

IDFB IDFB Corrected air flow capacity = 14 SCFM (0.82 x 0.98 x 0.95) = 18 SCFM Obtain the corrected air flow capacity from the following formula. Corrected air flow capacity = Air consumption (Correction factor A x B x C) IDH ID 3 Select the model. According to the corrected air flow capacity of 18 SCFM, the IDFB6E will be selected because its air flow capacity at 60 Hz is 25 SCFM.

Quick Exhaust Valve Series AQ

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. 15-12-1 2 Series AQ Construction AQ1500/1510 AQ2000/3000/5000 Component Parts Material/Model No.

EXxx-OMW0014CN

(PROFIenergy)LED . 6-8 (PROFIenergy)LED LED LINK/ACT OFF FO OFF SF OFF BF OFF US1 0.5 sec ON 3 sec OFF US2 OFF PROFIenergy 4.2.2 (PROFIenergy) 42 No.EX-OMW0014CN-A 6.5.

CEx-OMQ0013

No.1 OFF ON P2 No.2 OFF ON P3 No.3 OFF ON P4 No.4 OFF ON P5 P6 P7 P8 7 8 1 2 3 4 5 6 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 50 13 14 15 16 9 10 11 12 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 51 F : 2019 1 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +

CEx-OMG0106

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

Parallel Type Air Gripper

External gripping 11 34 42 65 158 254 force D I.D. Internal 17 45 66 104 193 318 Note 1) Gripping force per finger Effective value (N) gripping force O.D. External gripping S 7.1 27 33 45 131 217 force I.D.

MHx-OMU0057

General requirements) ISO 10218-1992: Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 2 - / *3) 1 1.5 *3)1 1 () 3 - 1 1-1. 1)0.5MPa L = 20mm MHZ2-10* MHZ2-16* MHZ2-20* MHZ2-25* MHZ2-32* MHZ2-40* mm 10 16 20 25 32 40 D 0.20.7 0.10.7 MPa S 0.350.7 0.250.7 C oC -1060 mm 0.01 0.02 c.p.m. 180 60 D 11 34 42