High Vacuum Angle Valve

M: Size 16, 25, 40 only.

NCQ8

") Bushing I.D. 3/16" (Inch) Symbol Bore CJ CG CF CE CD CC 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2") 250 (2-1/2") 0.75 0.19 0.56 0.25 3/16 0.38 0.81 0.25 0.56 0.25 3/16 0.38 1.19 0.25 0.94 0.44 3/8 0.75 1.34 1.25 0.31 0.94 0.44 3/8 0.75 0.380.005 0.56 0.19 1.31 0.38 0.93 0.44 3/8 0.75 1.090.015 0.25 0.75 Symbol Bore 075 (3/4"), 106 (1-1/16"), 150 (1-1/2"), 200 (2"), 250 (2-1/2") CM CL

Aluminum High Vacuum Angle Valve

M: Size 16, 25, 40 only.

EXxx-OMZ0016

Bit area Input (RX) Output (RY) RDX EXW1-RDX* (16 points) 16 0 RDY EXW1-RDY* (16 points) 0 16 Compact wireless Remote RDM EXW1-RDM* (8 points) 16*1 16*1 *1: The number of inputs/outputs is fixed at 16 (16 bits), and only the lower 8 bits are valid. -72No.EX-OMZ0016-C EX600-W Series Unit name Model Unit product no.

EXxx-OMV0017-D

Input size* 16 points (16 bits) 16 points (16 bits) Fixed For the EXW1-RD#, the number is fixed at 16 (16 bits). * Although the number of occupied outputs of EXW1-RDM# is fixed at 16 (16 bits), only the lower 8 bits are available.

One-touch Fittings

type Oval type Round type Oval type Round type 4, 6 8 to 16 4, 6 8 to 16 4, 6 8 to 16 Different Diameter Double Union Y Union Y Different Diameter Union Y KQ2UD KQ2U KQ2U Round type Round type Round type 4 to 8 4 to 16 4 to 16 Branch Y Plug-in Reducer Tube Cap KQ2U-G KQ2R KQ2C Round type Oval type Round type Oval type Round type 4 to 12 4, 6 8 to 12 4, 6 8 to 16 1 Metric Size Stainless Steel

AS-FG/ASD-FG

Flow Rate and Effective Area AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tube O.D. 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 3/16" 1/8" 5/32" 5/16" 1/4" 5/32" Inch size 3/8" 5/16" 3/16" 1/4" Flow rate flow Controlled (Free) l/min (ANR) 100 180 230 260 390 460 660 790 920 1580

High Vacuum Angle Valve, XL Series

XLCV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L With single solenoid Port P (pressure port) (mm) N 3 3 3 3 6.5 6.5 M 6.5 6.5 6.5 6.5 11 11 L 9 9 9 9 11 11 K 14 16 29 42 32 45 P 17 15 2 6 Q Model XLCV-16 XLCV-25 XLCV-40 XLCV-50 XLCV-63 XLCV-80 16.5 16.5 17.5 17.5 29 29 Other dimensions are the same as XLA. 11 Series XLF Normally Clossed/O-ring Seal Air

ZP3

Form w 1 Material C 04 4 4.5 1.2 7 6 0.5 06 6 6.5 N S U F GN GS HS A 0.8 08 8 8.5 10 10 11 9 7 1 13 13 14 1.2 16 16 17 B ZP3 (10 to 16) (4 to 8) UM 2 1 N: NBR, S: Silicone rubber, U: Urethane rubber, F: FKM, GN: Conductive NBR, GS: Conductive silicone rubber, HS: Semiconductive silicone rubber Construction p. 160 Mounting Bracket Assembly From p. 162 With adapter 4 to 16 w q ZP3 T N 04 A5

CP95

94 4 4 4 6.5 26 146 190 46 32.5 15 4 M12 x 1.25 40 24 35 16 G 1/4 14 M6 x 1 6.5 13 27 16 105 4 4 4 9 30 163 213 52 38 17 4 M16 x 1.5 50 32 40 20 G 1/4 15.5 M8 x 1.25 8 16 31.5 16 106 6 4 5 10.5 37 179 244 65 46.5 24 5 M16 x 1.5 63 32 45 20 G 3/8 16.5 M8 x 1.25 8 16 31.5 16 121 6 4 9 12 37 194 259 75 56.5 24 5 M20 x 1.5 80 40 45 25 G 3/8 19 M10 x 1.5 10 21 38 16 128 8 4 11.5 14 46 218 300

CP95

64 16 32 32 50, 63 83 M16 x 1.5 C85 +0.60 +0.15 M20 x 1.5 GKM20-40 20 80 20 80, 100 105 40 40 C95 CP95 NCM NCA D-X 20Piston Rod Ball Joint KJ (ISO 8139) Steel Data Bore size (mm) d3 Part no. d1 H9 h d6 (max) b1 l a l3 KJ10D 10 43 28 14 20 13 14 32 M10 x 1.25 KJ12D 12 50 32 16 22 13 16 40 M12 x 1.25 KJ16D 16 64 42 21 28 15 26 50, 63 M16 x 1.5 80, 100 M20 x 1.5 KJ20D 20 77 50 25 33 15 26 6

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

For details, refer to page 6-16-1.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Flow Rate and Effective Area AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 Universal type 3.2 6 8 10 12 3.2 6 10 4 6 8 JIS Symbol 4 4 8 10 12 Metric size 6 10 Tubing O.D. 1/8" 5/32" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 5/16" 3/16" 1/4" 1/8" 5/32" Inch size 3/8" 5/16" 3/16" 1/4" Flow Direction Symbols on Body Meter-out type Meter-in

Profile Design ISO/VDMA Air Cylinder Series CP95

94 40 24 35 16 G1/4 14 M6 6.5 M12x1.25 13 27 16 105 50 32 40 20 G1/4 15.5 M8 8 M16x1.5 16 31.5 16 106 63 32 45 20 G3/8 16.5 M8 8 M16x1.5 16 31.5 16 121 80 40 45 25 G3/8 19 M10 10 M20x1.5 21 38 16 128 100 40 55 30 G1/2 19 M10 10 M20x1.5 21 38 16 138 4 4 4 6.5 26 146 190 46 32.5 15 4 4 4 4 9 30 163 213 52 38 17 4 6 4 5 10.5 37 179 244 65 46.5 24 5 6 4 9 12 37 194 259 75 56.5 24 5 8 4 11.5

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

range (mm) Effective thread length (mm) A B1 CD CX D E F GA1 GA2 GA3 GB1 GB2 GB3 H H1 I +0.109 0 +0.109 0 +0.109 0 +0.034 -0.015 20 18 13 16 10 8 16 10 12 12 8 10 10 41 5 31 10 25 to 300 15.5 25 22 17 16 12 10 16 10 12 12 8 10 10 46 6 34 10 25 to 400 19.5 32 24 22 16 16 14 19 11 13 13 8 10 10 53 8 40 12 25 to 500 21 40 24 24 24 18 16 21 12 17 17 11 16 16 54 10 48 16 25 to 500 21 (mm) Bore

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

(Refer to page 16 for details.)

MHK2

Refer to Auto Switch Hysteresis on page 12-6-16.

MHK2

Refer to Auto Switch Hysteresis on page 12-6-16.

Wedge Cam Operation Gripper Series MHK2

M5 X 0.8 (Finger opening port) 22.5 2.3 19 Series MHK2 Wedge Cam Operation Gripper Dimensions MHK2-20 /Standard model Scale: 37% (mm) 18.6 20 2-M5 X 0.8 thread 8 deep 4H9 4 deep +0.030 0 21H9 1.5 deep +0.052 0 2-M5 X .8 thread 10 deep 4-M5 X 0.8 thread 10 deep Bottom hole dia.4.3 through-hole 0 -0.1 8 Open 26 +1.2 0 5 13.5 16 0.02 60 58 32 42 30 0 -0.2 Closed 16 29 4H9 4 deep +0.030 0 21

HRX-OM-X084

External temperature sensor 13 ue own Blue 3B 8 14 ue 15 (CN7) Blue 5 7 ue 16 6 Blue 8 Brown 3 4 1 9 Brown Blue Serial communication 9 10 Blue Blue Blue 7 12 2 Blue 9 Blue 11 3 10 11 12 Blue Blue Blue External communication section for customer connection Brown 15 1 Blue 8 Blue 16 9 17 2 Brown Blue 18 10 (CN1) 1/2 Red Brown 19 3 1A White Blue 20 11 2A outlet White Blue 21 4 3A 22 12 Blue