AMG

AFF Port size 3/4B 1/8B 01 02 03 06 10 14 AMl 1B 1/4B Note) Please refer to p.4.7-7 about "How to Order" case assembly. 3/8B 11/2B Related products 2B 20 04 1/2B Option combinations Available Not available D J R AMG150 AMG250 AMG350 AMG450 Applicable model Accessories Options C C D J R Accessories/Optional specification AMG550 AMG650 AMG850 Symbol N.C. auto drain N.O. auto drain Drain guide

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

Thread Rc(PT) Table: Accessory/Option combinations Depends on model l Not available Available F G(PF) N NPT Accessories Options C C D -J -R D J T AMH150 R AMH250 AMH350 AMH450 Applicable models Port size Accessories Options AMH550 AMH650 AMH850 B 01 B 06 10 14 1 8 3 4 1B N.C. auto drain N.O. auto drain Drain guide 1/4B IN/OUT reversal -T Element service indicator Accessories 02 03 1 4 3

AMPSeries

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

VP4

Note) A/B port piping: Rc 3/8 or Rc 1/2 Option VFS 9 Other Base specifications Individual EXH VS4 1 2 Individual EXH Common EXH Valve stations 02 2 stations VQ7 10 10 stations EVS How to Order Manifold Assembly VFN Specify the valves and blanking plate to be mounted on the manifold along with the manifold base model no.

VHS20/30/40/50

Port size Body size Thread size Thread type Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.

Exhaust Cleaner for Clean Rooms AMP Series

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

Plate Cylinder with Lock Series MLU

. +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 9 11 13 16 142.5 150.5 8 10 10 14 9 11 13 16 0.2 0.4 0.2 0.4 0.2 0.4 0.2 0.4 159 169 CD-MU03 171 181 CD-MU04 205.5 221.5 CD-MU05 Single clevis (Double clevis bracket) Double clevis (Single clevis bracket) DX -01 -03 CX -02 -04 DY+0.4 +0.2 R (CJ) R (DJ) CDH10 DDH10 2-DT 2-CT 2-DR DZ 2-CR CZ DH CH DI CI DE

Modular Type Lubricator Series AL

03 04 06 10 Accessory When more than one specification is required, indicate in alphanumeric order.

Process Pump <Fluororesin Type> Series PA3000

Suction port 2 Series PA3000 How to Order PA 3 3 1 0 03 Assembly environment Standard Clean room Nil P Option Body material Nil Body only With foot With silencer (for automatic operation type only) 3 Fluororesin B N* Diaphragm material 1 PTFE * With silencer AN200-02 for AIR EXH. AN200-N02 for NPT.

LX Series Compact Electric Actuators

Max. 3.0A Number ol setting posilions 28 Position setting method Setting with dedicated teaching box (LC5-1-T1-02) Position control method Absolute and incremental moves Speed: 6 to 200mny's (with feed screw lead of 12mm) Input signal capacity Optically isolated input 24VDC Max.

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

Port size Body size Thread size Port thread Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.

VEX-OMV0001

AC200V 200V VK300-82-2-02 AC220V 220V VK300-82-2-04 ) AC240V 240V VK300-82-2-07 DC6V 6V VK300-82-4-51 () VEX1300-03 DC12V 12V VK300-82-4-06 G36-4-01 DC24V 24VD VK300-82-3-05 DC48V 48VD VK300-82-3-53 2 AC DC24V DC12V VEX1-11-2 DIN LED NL: LED (VEX110112011301 ) D R R R () (3.57) IP65() 7 VEX-OMV0001 VEX1 Series DIN (VEX110112011301 ) (VEX150117011901 ) 1) (G) DIN (D) () 2) 3

Nozzle Diameter: 15 (ø1.5mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 02 (Screw-in Rc 1/4), VAC: 03 (Screw-in Rc 3/8), EXH: 03 (Screw-in Rc 3/8)

Nozzle Diameter: 15 (ø1.5mm), Vacuum Pressure: S (-90 kPa), SUP: 02 (Screw-in Rc 1/4), VAC: 03 (Screw-in Rc 3/8), EXH: 03 (Screw-in Rc 3/8)

Nozzle Diameter: 15 (ø1.5mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 02 (Screw-in Rc 1/4), VAC: 03 (Screw-in Rc 3/8), EXH: 03 (Screw-in Rc 3/8), Accessories: N (w/o Bracket, w/o Silencer)

Nozzle Diameter: 15 (ø1.5mm), Vacuum Pressure: S (-90 kPa), SUP: 02 (Screw-in Rc 1/4), VAC: 03 (Screw-in Rc 3/8), EXH: 03 (Screw-in Rc 3/8), Accessories: N (w/o Bracket, w/o Silencer)

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50 How to Order 30 03 RZ VHS Made to Order Standard Nil Body: Red X1 Built-in silencer (EXH port) X502 Pressure relief Optional specifications 3 port valve Des

Body size Port size Thread type Nil N F Symbol Port size Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 A spacer or spacer with bracket is required if the valve is combined with modular FRL. SUP SUP Applicable air preparation equipment Spacer with bracket part no. Pressure relief 3 port valve VHS20 VHS30 VHS40 VHS40-06 VHS50 IN OUT Spacer part no.

ASD

Metric size Inch size With One-touch fitting 04 06 08 10 12 01 03 05 07 09 11 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 Flow

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

space relocation, VS7-6 SOL VALVE 4/5 PORT $54.90 Add to Quote Add To Cart Add to Cart SMC VV71-PR-03 sup reloc spacer 3/8 pt, VS7-6 SOL VALVE 4/5 PORT $54.90