NARM Series

0.05 to 0.7) Ambient and fluid temperature 23~140F (5 to 60C) (No freezing) Fluid Air Cracking pressure (Valve) psig (MPa) 3 (0.02) Construction Relief style Port size/Weight Model Porting Port size Weight lb (g) Small Size Pressure Gauge 15mm Reverse flow function available on the standard model IN OUT Total weight (n: stations) Regulator (Except manifold) (80 X n) + 23 Common IN 1 8 1 8 .13

PF2D

1 q t i 16-11-40 5 Series PF2D Digital Flow Switch For Deionized Water and Chemicals Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuit and wiring example 60 70 176 z to , are terminal numbers.

Series SYJA300 3 Port Air Operated Valve

holes) 22 SlA 16.4 10 VlA Manual override (Non-locking) M3 X 0.5 (Pilot port) 3-M3 X 0.5 (P, A, R port) 1 (Bleed port) 1.5 SlA VlA R P 30 2 27 7 A 12.7 9.2 VM/VR 2 15 Bracket 10 VH 11 Base mounted: SYJA3l4-M5 14 5 10 Manual override (Non-locking) 2-3.2 (External pilot style) (Mounting holes) 17 3 (For solenoid valve) M3 X 0.5 2.5 (Pilot port) A 11 17.5 1.5 21 27 30 28.5 P R 1 (Bleed port) 13

Please contact us for the latest version.sales@ocaire.com, MANIFOLD ASSY, VALVE, SS5YJ3 MFLD SYJ3000, 1J, SS5YJ3 OTHER SIZE RATING, .57200 lb

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

13 12 14 15 3H9 4H9 4H9 5H9 3H9 4H9 4H9 5H9 M5 x 0.8 19 24 28 33 3.5 4.5 4.5 5.5 3H9 4H9 4H9 5H9 27 36 39 45 32 43 48 55 M10 x 1.5 M5 x 0.8 M6 1 M10 x 1 M6 x 1 M10 x 1.5 Rc1/8 M6 1 M10 x 1 M6 x 1 M12 x 1.75 Rc1/8 M8 1.25 M14 x 1.5 M8 x 1.25 913

With Factory Installed

D.8 AR3001 1/4 3/8 53 127.5 35 53 29.5 41 2.3 40 46 6.5 8 53 52.5 36

PF-OMM0004_C

No.PF-OMM0004-D / / PF3W7## SMC 2 11 13 14 16 17 19 21 24 26 26 F1 OUT1 60 F2 OUT2 36 F3 42 F10 43 F20 47 F22 48 F30 50 F80 51 F81 52 F82 53 F90 54 F98 55 F99 56 57 61 61 65 65 71 79 81 88 -1No.PF-OMM0004-D (ISO/IEC) (JIS) 1 2 1) ISO 4414:Pneumatic fluid power -General rules relating to systems.

PF-OMN0011_C

No.PF-OMN0011CN-C / / PF3W3## SMC 2 9 12 13 15 15 16 21 23 23 F0 25 F1 OUT1 26 F2 OUT2 34 F3 40 F10 41 F20 45 F22 46 F30 48 F80 49 F81 50 F82 51 F90 52 F96 53 F97 54 F98 57 F99 58 59 62 63 66 66 69 71 -1No.PF-OMN0011CN-C (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

LV50-OMQ0002

[F10] Sub screen Page 41 Flow direction [F20] External input Page 45 [F22] Analogue output Page 46 Free range analogue output for instantaneous flow: OFF [F30] Accumulated value display Page 47 OFF [F32] Setting of flow direction / back flow detection function.

Series 10-MGF Guide table ø40, ø63, ø100

Specifications Bore size(mm) Item 40/63/100 1.5MPa 1.0MPa 0.1MPa 10 to 60C (With no freezing) Proof pressure Max. operating pressure Min. operating pressure Ambient and fluid temperature Piston speed +1.0 0 20 to 200 mm/s mm Stroke length tolerance Grease Particle generation grade Fluorine grease Grade 2 (Refer to front matter pages 13 to 22 for details.) 94 Guide table10-MGF Auto switch

ML1C

OO PP QQ RR SS TT UU VV Model Applicable gasket ML1C25 ML1C32 ML1C40 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C11.2 17 23.5 12.5 10 53 40 34 26 C14 A B C D E F G H I J K L M N O P Q R S T U V W Y Z Model ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 M5 x 0.8 8.5 M6 x 1 9.5 11 M8 x 1.25 322 306 161 160 108 131 101 99.5 64 92 118

Hand Valve Series VH 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 94 VR VH 144(191) 144(191) 97(145) 97(145) VHS 8 (10) 8 (10) 125(136) 123(134) M8 x 1.25 M8 x 1.25 107.5 105.5 1 (P) 3 (R) 1 (P) 3 (R) 17 25 19 2 4-Rc 1/4, 3/8, 1/2 4-Rc 3/4 VH42-06 (Bottom ported) VH42-02 to 04 (Bottom ported) 2 (A) 2 (A) 46 54

Compact Guide Cylinder End Lock Type SeriesMGP

Bore size (mm) Bore size (mm) DL DM HR LL MO DB Over 25 to 75st 98 Over 75 to 175st 118 Over 25 to 75st 13.5 Over 75 to 175st 33.5 Over 175st 25st or less 25st or less Over 175st 22 22 9.5 21 15 15 84.5 140 16 0 55.5 32 32 26 23 11.5 25.5 21 19 91 98 118 140 16 0 7 27 49 40 40 24 23 13 27 21 19 50 97 114 134 161 20 0 17 37 64 50 25 25.5 11 25 21 19 63 102 114 134 161 20 0 12 32 59 63

Compact Vacuum Ejector Series ZQ

Please refer to the catalogue to confirm the sizes of the fittings to be used. n: Number of stations (mm) Dimensions 5 6 1 26 52 2 36 52 3 46 62 4 56 72 5 66 82 6 76 92 7 86 102 8 96 112 n L1 L2 EXH EXH P PE P PE V V V V Circuit ZQ13M-K1-D ZQ13M-K2-DK ZQ13M-J1-F ZQ13M-Q1-FK 9 Series ZQ Manifold Exploded View 6 3 6 4 6 b b view 4 6 2 a 5 a 5 5 Component Parts No.

PSxx-OMF0005CN

No.PS-OMF0005CN-E / / ISA2 2 11 13 14 15 17 18 20 23 26 26 27 -1No.PS-OMF0005CN-E (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating industrial

Booster Regulator Series VBA1110 to 4200 1

G H AV OUT port AU AF 4-12 mounting hole Silencer (Option) O EXH port: 1 position AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com F EXH port: 1 position D E IR A 300 404 B 126.5 167 C 53 96 D 73 116 E 118 150 F 98 130 G 46 62.8 H 43 62 I 60.5 90 J 18 17 K 15 15

VNH

210 15.7 Rc 46 Pilot port size Weight (kg) Face-to-face dimension (mm) VX 1 8 Rc 1 4 Rc 1 8 Rc 1 4 Rc 1 8 Rc 1 4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3.1 80 5.6 100 8.2 115 3.1 80 5.6 100 8.2 115 2 60 3.1 80 5.6 100 8.2 115 2 60 2 60 VX3 No freezing

VXZ

operating pressure differential (MPa) Oil DC Av x 10 m2 -6 Cv converted C[dm /(sbar)] b Cv Water, Oil, Steam Air Flow characteristics Min. operating pressure differential (MPa) Orifice size (mm) Port size Weight (g) Max. system pressure (MPa) 3 1 4 3 8 1 2 3 4 2.4 2.8 6.0 9.5 550 550 760 1300 0.44 0.42 0.34 0.20 8.5 11 23 38 10 VXZ2230-02 VXZ2230-03 VXZ2240-04 VXZ2350-06 1.9 2.4 5.3 9.2 46

Hand Valve Series VH

54 1 (P) 3 (R) 1 (P) 3 (R) 4 (B) 4 (B) 4-Rc3/4 4-Rc1/4, 3/8, 1/2 3.6-13 Hand Valve Series VH Precautions Be sure to read before handling.

Title not found

) 0.67 ( 1 7 ) 0 2 8 t7l M l a x 1 5 1.22 ( 3 i ) 3.86 (98) 3.39 (86) 0.45 11 5) 0.59 (15) 1105) 2.32 (59) 5 . 1 2 1130) 2.24 (56) 6.73 (171) 2.O5 (52) 11.2) 2.60 (66) 7.05 (179) 5.12 l130) 2.99 (76) 6.30 tr60) 2.80 l71l 4.07 (205) 2.56 (65) 0.49 12 s) 3.15 (80) 8.43 (214) 1.57 (40) 4.69 (1r9) a.o2 (1021 3.O7 (78) 0 9 4 (25) 2.05 (52t 0.55 (14) 0.83 l21l M10r1.75 0 4 3 ( 1 1 ) M22r1.5 i.46