ATEX Compliant 5 Port Solenoid Valve Series 52-SY Note 3) 52-SY series are not available with resin type manifold (45 type). 4 B ATEX Compliant Body Ported Type Series 52-SY5000 Dimensions 2-position single L plug connector (L) 52-SY5120-L-01 (-F2) In case with foot bracket 52-SY5120-L-01-F1 22.6 21 47 16.7 4.5 38 16.6 1.2 22 29 2 x M3 x 0.5 Threads depth 3.5 (For bracket mounting) 65 2 x 3.2 (Mounting holes) 14.7 Insulation: Black () 11.6
Description Note Material Bracket set 1 SFD-BR100 With 2 countersunk head screws (M3) IDK e AMG AFF SFD200-C Component Parts No. Description Note Material AM Element 1 PC, Polyolefin, PU o !
Assembly is required. 7 Technical Data Pressure dew point Condensed water calculation Atmospheric pressure 45 Relative humidity 100% 40 0.1MPa Amount of water in air g /m3 35 80% 60% 0.2 40% 0.3 0.4 0.5 30 0.6 0.7 0.8 25 Amount of condensed water 20% 3 8 1.0 18.2 3.0 = 15.2g/m3 20 2 3 4 1.5 15 10 5 8 7 3.0 1 6 0 5 Intake air temperature C (atmospheric pressure) Air temperature (Pressure
Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations
(Tightening torque of M3 screw should be 0.5 to 0.7 Nm.) 5. Modification of the detecting position should be made in the condition of 3. Auto switch Auto switch mounting nut Auto Switch Mounting Bracket Part No.
NTJ-015A NT-02 NT-04 NT-05 12 M5 x 0.8 4 8 9.2 7.8 H B 20 M8 x 1.25 5 13 15.0 12.5 32 . 40 M14 x 1.5 8 22 25.4 21.0 50 . 63 M18 x 1.5 11 27 31.2 26 Electrical Wiring Output type The output signal of the stroke reading cylinder is A/B phase difference output (open collector output) as shown in the figure below.
Dimensions Model Metric size D2 D1 H1 H2 H3 H4 H5 L1 L2 L3 Inch size TMH-05 21 8.3 8.5 15.4 7.7 9.3 6.4 6.3 3.3 11.7 TMH-06 13.1 TMH-07 26.5 10.6 11 20 10 11 7.2 7.1 4.3 13.5 10 TMH-08 TMH-09 15.5 TMH-10 18.5 34 14.6 14.2 28 14 14 9.6 9.5 4.3 TMH-11 18.8 5
Inspection record . 11-1 11.1 Inspection record . 11-1 IDF190D/240D Series IDX-OM-Y002 Chapter 1 Safety Chapter 1 Safety 1.1 Before Using the Air Dryer Before using the product, be sure to read and understand all the important actions highlighted in this manual.
Dimensions(mm) 1in = 25.4mm Model Metric size D2 D1 H1 H2 H3 H4 H5 L1 L2 L3 Inch size TMH-05 21 8.3 8.5 15.4 7.7 9.3 6.4 6.3 3.3 11.7 TMH-06 13.1 10 TMH-07 26.5 10.6 11 20 10 11 7.2 7.1 4.3 13.5 TMH-08 TMH-09 15.5 TMH-10 18.5 34 14.6 14.2 28 14 14 9.6 9.5 4.3 TMH-11 18.8 SMC Pneumatics, Inc. 6 SMC Pneumatics, Inc. 7 World Wide Support...
20 12 11 21 15 23 30 40 40 65 11 37 4 17 4 4 10.4 10.4 KDM 14 41 M 13 40.5 6 18.5 10 10 12.8 12.8 KB 8 A L 14 44.5 48.5 53.5 57 54 59.5 62.5 4.2 8 17 15.2 20.5 26 18 15.2 KR (R) Connection threads H 10 19 18.5 23 41 29 18.5 KA (R) 12 22 20.9 20.9 24 58 46 2 x Applicable tubing KQG2 Reference dimension for R threads after installation Note 1) D indicates the maximum diameter.
22 1 12 2 13 3 14 4 15 5 16 NBR 6 17 7 18 8 A 19 9 B 20 10 21 11 22 -15- 1 14 2 15 3 16 4 17 5 18 6 19 NBR 7 20 8 21 9 A 22 10 23 11 24 12 25 13 -16- 3. 3.1. 1 I/O LEC-CN5-* / PLC 1 2 DC24V CN5 1 LE-C*-*-* LE-C*-*S-* CN4 CN3 CN2 120.3 120.3 mm mm 200 200 mm/s mm/s 2 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200
Bolts Size Tightening torque (Nm) M3 0.6310% M4 1.510% M5 310% 8.Troubleshooting When a fault occurs during the operation, the corresponding alarm or warning is displayed.
OFF ON Mounting screw (M3) Proper tightening torque (Nm) Orange 0.8 to 1.2 VQC2000 2-2-2 3 Base Mounted Series VQC Plug-in Unit Precautions 2 Be sure to read before handling. For Safety Instructions and Solenoid Valve Precautions, refer to page 2-9-2.
1.5 3) 3)1 1 () [] -3No.PS-OMM0006CN-E () () () () -4No.PS-OMM0006CN-E () * UL UL1310 2 UL1585 2 30[Vrms] 42.4[V ]2 UL (100 ) JIS B 8392-1 1.1.21.6.2:2003 () -5No.PS-OMM0006CN-E * (16 ) / / FG (49 N ) () () M8(3 ) * 6 33 () () 10m DC(-)() ( ) -6No.PS-OMM0006CN-E * ( ) () CE CE -550 (5 ) * ON , 1015 10 /1 2351 LCD -7No.PS-OMM0006CN-E * -8No.PS-OMM0006CN-E (M8(3 )11
General requirements) ISO 10218-1992: Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 2 - / *3) 1 1.5 *3)1 1 () 3 - 1 1-1. 1)0.5MPa L = 20mm MHZ2-10* MHZ2-16* MHZ2-20* MHZ2-25* MHZ2-32* MHZ2-40* mm 10 16 20 25 32 40 D 0.20.7 0.10.7 MPa S 0.350.7 0.250.7 C oC -1060 mm 0.01 0.02 c.p.m. 180 60 D 11
Series AS-FG Speed Controller with One-touch Fittin Stainless Series. 5 5 6 7 9 11 11 11 11 12 13 13 13 15 15 16 16 16 17 17 18 19 21 22 22 23 24 25 27 27 27 29 30 31 31 31 32 34 35 35 35 36 36 37 37 37 38 38 39 39 39 41 42 43 43 43 44 45 46 46 Specifications. How to Order . Construction. Dimensions . Series AS-FG Speed Controller with One-touch Fittings Stainless Series In-line Type.
3 x 1/8, 1/4 [Port 1(P), 2(A), 3(R)] 16 Bracket assembly (Option) 26 2 2 x 4.5 (For mounting) 20 29 2 x M3 Thread depth 6.5 (For bracket, foot bracket mounting) 4 x 4.5 (For mounting) 20 29 Foot bracket assembly (Option) 22 44 52 DIN terminal (D) Air operated: VEX3120 Caution How to Use DIN Terminal Connector Refer to page 1739.
OUT Standard specification Option Note) Water (Standard, up to 40C) Air (Standard, Dry) Turbine oil Vacuum (up to 1.3 x102 Pa) Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x101 Pa) (V, M) Non-leak (106 Pa m3/s or less) (V, M) IN N.O.
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 8 Stations, A B Port Size: M3X0.5 Type 31, S31, P R Port Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 12 Stations, A B Port Size: M3X0.5 Type 31, S31, P R Port Thread: -