XL-OMY0002

10. 10-1. 2 2P5P6 16 XL-OMY0002 10-2 1 2 3 c b 1 S 2 O 4 M a S aa M 0.2MPa b S 0.3MPa c S 25,40,50,160 O 3 4 O O O O O O 17 XL-OMY0002 10-3. 1 2 3 2 3 O 4 1 M O M O O O O O O 4 5 O S M XLD-25 S XLD-40,50,160 S XLD-63,80,100 S S 25 4050160 O S 18 XL-OMY0002 6 7 c Nm c O XLD-25 0.360.1 S XLD-25 0.630.1 O S S 0.3MPa S c c O O O O O 8

Steam Valve

1 8 1 4 1 4 1 4 1 2 1 1 2 105 120 140 77 96 113 53 60 74 26.5 30 37 121.5 138 161 20 24 24 130.5 148 171 8 10 12 55 63 74 Port size/Flange: 32F, 40F, 50F J (Valve open) Indicator (Option) Pilot port E 12(P1), 10(P2) Port size: refer to table below P1 P2 H H D B A 32 B C G F 4 x 2 x 18 mounting hole A Applicable flange 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H J Model VND50D-32F

ZSE40/ISE40

female threads) ZSM Rc 1/8 Reverse pressure two directions B R 1/8, NPT 1/8 PF2 M5 x 0.8 female threads Panel mount (ZS-22-A) Rc 1/8 IF Data E M5: M5 x 0.8 (Female threads) C4: With 4 One-touch fitting C6: With 6 One-touch fitting Wall mount Wall mount Panel mount + Front protective cover (ZS-24-C) M5 x 0.8 F 4, 6 One-touch fitting Option When optional parts only are required, order

Refrigerated Air Dryer For Use in North, Central and South America

Thread type and port size C D E Material Number of 1 set Male thread A side Female thread B side Mounting hole dia.: 10.5 IDF-AP604 NPT1 Rc1 1.97 (50) 1.06 (27) 1.81 (46) [inch (mm)] Brass 2 IDF-AP606 NPT1 1/2 Rc1 1/2 2.17 (55) 1.22 (31) 2.13 (54) Part no.

XL-OMY0003

SUS304> 5 (SUS304) () 2 4 (A6063) < A6063> C D E E F C H B G A A mm A B C D E F G H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41 XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 8 XL-OMY0003 5 10 []18 12 O 1) FKM M 10 FKM : 110 Pa <> 9 XL-OMY0003 6 6-1. 1 1P4P5 10 XL-OMY0003 6-2 1 2 b 3 1 2 O 4 a aa b O O

Pressure Control Equipment

gauge 0.05 to 0.83 0.02 to 0.2 0.05 to 0.7 Manifold 14-4-19 1 8 14-4-52 Pressure gauge 0.08 to 0.7 / Manifold regulator ARM1000/2000 Manifold (Common IN/Individual IN) Direct operated relieving type Back flow function , 3 8 1 4 14-4-55 Bracket Pressure gauge 0.05 to 0.85 / / Manifold regulator ARM2500/3000 Manifold (Common IN/Individual IN) Modular type 1 4 Direct operated precision regulator

Support Guide/11-LEFG Series

Environment Clean Room Specification ISO Class 4*1 (ISO14644-1) Built-in vacuum piping Possible to mount the main body without removing the external cover etc. Body-integrated linear guide specification *1 Changes depending on the suction flow rate.

PA3145/3165/3185

Rc 1/8 pilot port 2-Mounting hole Port size Rc (EXH port) Port size 2-Rc (IN, OUT port) IN, OUT EXH Port size Rc A Model Mounting hole C D E F G H K L B J 3 8 1 2 3 4 VPA3145 71 3 4 85 14 52 55 93 32 87.4 36 71 80 8.5 3 4 VPA3165 82.6 1 4 1 1 110 17 68 75 118 45 113 36 71 95 8.5 1 4 1 1 1 1 4 VPA3185 118 1 2 132 14 80 95 140 52 140 41 81 105 13 2 2 5-5-26

PSE100

ISA ZSE1 ISE1 Current draw on Output 1 and 2 too high (>120mA). Check load and/or wiring for Output 1 and 2. ZSE2 ISE2 Pressure is 2% above rated pressure during 0 clear. Panel mount Apply atmospheric pressure then do 0 clear. ZSP ISl ZSM 1 Turn screw 1/4 to 1/2 turn after panel makes contact with the sealing surface of the PSE.

3 Port Air Operated Valve VPA3145/3165/3185 Series

VZA 3 x Rc Pilot port 1 8 VTA VGA VPA VPA3 VPA3 2 x Mounting hole Port size Rc (EXH port) Port size 2 x Rc (IN, OUT port) Port size Rc Model Mounting hole IN, OUT EXH A B C D E F G H J K L 3 8 1 2 3 4 VPA3145 71 3 4 8.5 85 14 52 55 93 32 87.4 36 71 80 3 4 VPA3165 82.6 1 4 8.5 1 110 17 68 75 118 45 113 36 71 95 1 1 4 1 1 1 1 4 1 2 VPA3185 118 13 2 132 14 80 95 140 52 140 41 81 105 2 1575

3M/SMseries

5 1 28 PSI (1 9kgf/cm'?

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

1 !

I

Pod NVF3000 NVF5000 Supply SUP Cylindet cYL.1, CYL.2 A , B Exhaust EXH.1, EXH.2 Rl, R2 Symbol (SirEle solenoid) l c 1 : c Y L . 1 l IC2:CYL.2 lEl :EXH.r I {E2:EXH.2] Lubricant 1.

Serial Network

Built with two self-diagnostic features: 1. Over-current protection of input blocks (mechanical fuse) 2.

Turntable Cylinder Series MGT

1) D-Z8 type D-A9 type D-F9 type D-Y6 type Ball bushing D-Y7 type Note 1) Vertical outlet types cannot be mounted.

Booster Relay Series IL100

Max. 1.0 MPa Input pressure Max. 0.7 MPa 0.7 Supply pressure: 0.7 MPa Output pressure Max. 0.7 MPa 0.6 Pressure ratio 1 : 1 Air consumption 3 L/min (ANR) or less (OUT = 0.5 MPa) 0.5 Output pressure MPa Linearity Within 1% Hysteresis Within 1% 0.4 Ambient and fluid temperature 5 to 60C Port size 1/4, 3/8 0.3 Weight 0.56 kg 0.2 0.1 0 0 200 400 600 800 1000 1200 1400 Flow rate L/min (ANR) 53

Thermo-chiller

4.5 1 6.5 1 Temperature stability4 [C] CH1: 0.1/CH2: 0.5 Rated ow (Outlet) [L/min] 45 (0.43 MPa) 10 (0.45 MPa) 45 (0.45 MPa) 10 (0.45 MPa) 125 (0.45 MPa) 10 (0.45 MPa) Maximum ow rate [L/min] 120 16 130 16 180 16 Maximum pump head [m] 50 49 55 49 68 49 Settable pressure range5 [MPa] 0.10 to 0.50 0.10 to 0.49 0.10 to 0.55 0.10 to 0.49 0.10 to 0.68 0.10 to 0.49 Minimum operating ow rate6 [L

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

A drawing of a recommended mounting method is shown in Fig. 1. 12-REA25/32/40 End collar A Lock nut Fig. 1 Guide rod Stopper Forward Backward 1 Forward Backward 12-REA50/63 Lock nut A Cushion ring holder Wrench Forward Backward Rodless cylinder With adjusting screw 4. When used vertically for applications, use caution regarding allowable load.

Multi-connector with One-touch Fittings DMK Series No. of Connecting Tubes: 6, 12

34 11 4 12 5 7 11 43 55 38 Click here for applicable color caps. 250 B

VX

G 53 55 56 (? ! C ) ! ! D !"# Coil insulation type # 9% ,* /) 3 ? $% % 33 1 ,) % % 1 ) ,, ) /) H B 7 !"# ! , & Ordering example VX021-001GB-01 !"# $ % & VX021-002DBT-04 ' ( !