air pressure (MPa)Inlet air temperature (oC) Note 1)Ambient temperature (oC) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG10HCompressed air0.3 to 0.85 5 to 55 5 to 55 15111100110.72525251

HRX-OM-W002

WH WH YL YL OR OR BK RD RD RD BL BK BK 2/2 1/2 1/2 2/2 3 3 (CN7) (CN2) (CN3) 2 2 1 1 (CN5) (CN1) (CN1) 22 23 25 26 27 28 23 35 36 (CN6) 20 34 21 21 12 10 15 16 17 18 19 13 15 10 16 17 24 11 14 9 8 6 3 9 3 3 7 5 2 2 5 2 5 4 4 4 1 1 1 1 1 1 21 21 11 9 8 6 3 9 3 3 22 23 25 26 27 28 23 7 5 2 2 5 2 5 35 36 20 12 10 15 16 17 18 19 13 15 10 16 17 4 4 4 24 14 34 2B 1B 1A 3A 2A 3B Main Board PCB2

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

LE CP 1 B A1 1 2 5 6 (17.7) (10.2) (14) (18) A6 B1 B3 A1 A3 B6 (13.5) Cable length (L) [m] 1 2 1 1.5 3 3 5 5 8 8*1 A 10*1 B 15*1 C 20*1 15 16 Connector B Connector D (14.7) (30.7) L (11) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m (*1 Produced upon receipt of order) Controller side (5.5) (6.3) (5.7) (14.2) Connector C Actuator side (Terminal no.)

Micro Mechanical Valve Series VM1000

(R) 1 (P) Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 13 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)

HRX-OM-X084

For HRR010-AF-10/20G thread adapter set 1 set (5) For HRR010-AN-10/20NPT thread adapter set 1 set 1 In the case of option Z, not included.

NCQ8

1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-7/8 2-1/8 2-3/8 2-5/8 3-1/8 3-5/8 4-1/8 4-5/8 #6-32UNC3/4 7/8 1 1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-7/8 2-1/8 2-3/8 2-5/8 3-1/8 3-5/8 4-1/8 4-5/8 #6-32UNC1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-3/4 1-7/8 2 2-1/4 2-1/2 2-3/4 3 3-1/2 4 4-1/2 5 #10-24UNC1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-3/4 1-7/8 2 2-1/4 2-1/2 2-3/4 3 3-1/2 4 4-1/2 5 #10-24UNC1-1/4 1-3/8 1-1/2 1-5/8 1-3/4 1

CRQ2

Size 20, 30, 40 (mm) (mm) (mm) Y 1 to 9 1 to 10 1 to 15 1 to 18 1 to 20 Size 10 15 20 30 40 X 2 to 18 2 to 20 Size 10 15 Size 10 15 CRQ2 Y 1 to 9 1 to 10 X 2 to 18 2 to 20 MSQ MRQ Symbol: A20 Symbol: A21 Symbol: A22 The long shaft can be further shortened by machining it into a stepped round shaft with a double-sided chamfer.

Flow Control Equipment

Style Inch Millimeter Elbow Universal 2 3 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 23 04 06 08 10 12 03 05 07 09 11 13 4 6 8 10 12 Control Meter out Meter in 0 1 1/8" tube should be used.

Title not found

1/4-28 3/8-24 B Hex 9/16 9/16 9/16 9/16 9/16 9/16 7/16 7/16 5/16 5/16 7/16 C Thread 10-32 10-32 1/16 NPT 1/8 NPT 1/16 NPT 1/8 NPT 10-32 1/16 NPT 10-32 10-32 10-32 D Height 3/4 1/2 1/2 1/2 3/4 3/4 9/16 9/16 17/32 17/32 1/2 Part # RB 1/4-10 RB 1/4-10 Short RB 1/4-1/16 Short RB 1/4-1/8 short RB 1/4-1/16 RB 1/4-1/8 RB 1/8-10 RB 1/8-1/16 RB 1/16-10 RB 428-10 RBB3/8-10 72 Caps & Swivel Nipple Swivel

Thermo-chiller/Rack Mount Type

1 w !2 y u !3 !4 i !5 !9 !6 !7 @0 @1 !8 No.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

2 5 (Ch0&1 in) Monitor under range 0: disable, 1: enable 6..7 Data format 0: offset binary, 1: signed magnitude, 2: 2s complement Channel parameter Channel 0 to 1 0: -10..+10 V, 1: -5..+5 V, 2: -20..+20 mA 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 0..2 (Ch0 in) Analogue input range 3 Reserved 3 0: -10..+10 V, 1: -5..+5 V, 2: -20..+20 mA 3: 0..10 V, 4: 0..5 V, 5: 1..5 V,

CJ2X/CUX/CQSX/CQ2X/CM2X

ML2B Bore size (mm) Contents C J G5-S Kit no. 16 20 25 32 CUX16-PS Piston seal: 1 pc. CV Bore size (mm) Proper tightening torque (Nm) (Cylinder body) Hexagon socket head (mm) CUX20-PS Rod seal: 1 pc. CUX25-PS Gasket: 1 pc. MVGQ 10 16 20, 25 32 0.54 10% M3 CUX32-PS Grease pack (10 g): 1 pc. 1.23 10% M4 It is impossible to replace seals in bore size 10 mm. CC 2.55 10% M5 4.02 10% M6 2.

CJ2X/CUX/CQSX/CQ2X/CM2X

ML2B Bore size (mm) Contents C J G5-S Kit no. 16 20 25 32 CUX16-PS Piston seal: 1 pc. CV Bore size (mm) Proper tightening torque (Nm) (Cylinder body) Hexagon socket head (mm) CUX20-PS Rod seal: 1 pc. CUX25-PS Gasket: 1 pc. MVGQ 10 16 20, 25 32 0.54 10% M3 CUX32-PS Grease pack (10 g): 1 pc. 1.23 10% M4 It is impossible to replace seals in bore size 10 mm. CC 2.55 10% M5 4.02 10% M6 2.

EXxx-OMY0006CN

1 0 1 0 0 1 1 5 sec 1 0 0 1 sec 1 0 1 500 msec 1 1 0 200 msec 1 1 1 100 msec Bit 6 Zone M Output feedback 0 Disable 1 Enable Bit 7 55 No.EX##-OMY0006CN Table 10-9 Safety Mode (Module Passivation/xxx)Byte2Zone 1 Output feedback parameter Bit 2 Bit 1 Bit 0 OFF Table 10-8 Bit 5 Bit 4 Bit 3 ON Table 10-8 Bit 6 Zone1 Output feedback 0 Disable 1 Enable Bit 7 Table 10-10 Safety Mode (Module

HRX-OM-X071

HRX-OM-X071 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before using the product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety instructions for use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.

MLGP

50 50 100 200 1 10 100 200 Eccentric distance 1 (mm) Eccentric distance 1 (mm) MLGPL32 to 100 (23) 50 Stroke or Less V = 400 mm/s (24) Over 50 Stroke V = 400 mm/s 100 100 100 80 100 80 63 63 10 Load weight m (kg) 50 50 10 40 40 32 1 32 2 10 100 200 0.3 10 50 50 100 200 Eccentric distance 1 (mm) Eccentric distance 1 (mm) 9-11-14 14 Compact Guide Cylinder with Lock Series MLGP Horizontal Mounting

MLGP

50 50 Load weight m (kg) Load weight m (kg) 40 40 50 50 40 40 32 32 10 10 25 25 32 32 20 20 25 25 20 20 1 1 10 50 100 200 10 50 100 200 Eccentric distance l1 (mm) Eccentric distance l1 (mm) (16) Over 50 Stroke V = 400 mm/s (15) 50 Stroke or Less V = 400 mm/s 100 100 100 100 50 50 80 80 63 63 Load weight m (kg) Load weight m (kg) 50 50 10 10 40 40 32 32 25 25 1 20 20 1 10 50 100 200 0.7 10

Compact Guide Cylinder

50 mm stroke, V = 200 mm/s or less 100 100 50 50 40 40 32 32 10 10 Load mass m [kg] Load mass m [kg] 25 25 20 20 16 16 12 1 1 12 0.1 0.1 10 100 10 100 Eccentric distance L [mm] Eccentric distance L [mm] 50 mm stroke or less, V = 400 mm/s Over 50 mm stroke, V = 400 mm/s 100 100 10 10 50 50 Load mass m [kg] Load mass m [kg] 40 40 32 32 25 25 1 1 20 20 16 16 12 12 0.1 10 100 0.1 10 100 Eccentric

Vacuum Pad: Ball Joint Type

Mounting (Male thread) ZP3 M5 x 0.8 Mounting Vacuum entry port Female thread Connection 10 to 16 20 to 32 40, 50 20 M8 x 1 ZP3E Male thread 24 M10 x 1 10 to 16 M8 x 1 ZP2 55 M14 x 1 Pad diameter 20 to 32 M5 x 0.8 M10 x 1 40, 50 M14 x 1 ZP2V Ball joint rotation ZP ZPT ZPR ZPT ZPR XT661 709 ZPT Series 20 25 32 10 13 16 ZPT F-B5-A8 (Without buffer/Male thread) ZPT F-B5-A10 (Without buffer/Male

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) Mounting (Male thread) M5 x 0.8 Vacuum entry port Mounting Connection 20 M8 x 1 Female thread Male thread 10 to 16 24 M10 x 1 M8 x 1 20 to 32 10 to 16 55 M14 x 1 M10 x 1 M5 x 0.8 40, 50 20 to 32 Pad diameter (mm) M14 x 1 40, 50 Ball joint rotation 15 Pad Type Pad form Ball joint type Pad diameter (mm) 10, 13, 16, 20, 25, 32, 40, 50 Material Urethane rubber NBR Silicon rubber Fluoro rubber