3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

C6: One-touch fitting for 6 VVQZ200-10A-2 VV3QZ22-05C 2.10-13 VQZ100/200/300 Body Ported Dimensions: VQZ100 VV3QZ12C Station (5.5) (35) Grommet (G) (11) 27 2-4.5 Mounting holes n-C3, C4, C6, M5 C3: One-touch fittings for 3.2 C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread (4.5) (7.5) 20 DIN rail clamp screw 5.5 U side n Manual override 5 A 2 A 2 A 2 A 2 4 P=10.5 (L4

VXA21/22

( ) VXA223l VXA224l VXA225l VXA226l VX070-022 1 4 1 4 03 ( ) 3 8 04 ( ) 1 2 VX070-029 Ordering Example (Example) Series VXA21, Orifice size 4.5mm, Normal closed, Rc(PT)1/4 (Part number)VXA2130-02 4.1-59 VXA21/22 Dimensions (Orifice size 3 mm, 4.5 mm, 6 mm) VXA212m, VXA213m, VXA223m, VXA224m Model Port size P Rc(PT) A B C D E F With bracket G H I J VXA21 VXA22 , , 18 21 9 10.5 40 45 21 27

XL

For further details, refer to mounting positions under Replacement heaters/Part Nos. on page 46. 27 Series XLS Electromagnetic Type Bellows Pressure Balance How to Order Starting voltage 5 24VDC 9 Other (48VDC, 100VDC) Note) Holding voltage is 25% of starting voltage.

Air Suction Filter With One-touch Fittings Series ZFB 1

M Element Replacement Procedure Body Model A B C D E F G H I J K L M N Size Collar part arrow ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 12.8 4 6 8.5 14.4 15.5 50 15 17.5 24 12.5 22.5 53 26 48 Metric size Inch size 15.2 6 8 Transparent cover 9.5 16.6 17.5 61 16 19.5 27 13.5 24.5 65 28 52 57 8 10 18.5 11 18 21.5 65 17 21 29.5 14.5 27 69.5 30 3 16 ZFB101-05 ZFB101-07 ZFB201

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL Dimensions Dimensions (mm) (mm) ZY A B C D F Y A B C D F N NL P Model Model ZPT10F-B5 ZPT20F-B5 10 12 10 12.5 27 32 M5 x 0.8 5 9 ZQ 1.5 ZPT13F-B5 ZPT20F-B8 13 15 20 22 M8 x 1.25 8 12 10.5 13 27.5 36 ZPT16F-B5 ZPT20F-B01 2 16 18 Rc 1/8 6.2 14 ZF 15.5

ZX

Without switch and filter ZX1-K8 Filter unit (F) ZX1-K8-F 70.2 11.5 7 1 20 41 1 51 8 Bracket B (Standard accessory) 2-R1.8 (Mounting hole) 3.6 (Mounting hole) (Mounting hole) 1 10 19 8.8 4.8 Filter M5 (or M6) (V port) Vacuum pad connection port 38 35.4 (Mounting hole) (Mounting hole) 1 5.4 13-2-27 27 Series ZX Ejector exhaust Vacuum pad connection V port Air supply PV port Valve Unit: Type

Series SY offers major advances in valve performance for cost-effective solutions to your requirements. The series offers high flow with low power consumption in a compact design. The SY is available in body ported or base mounted styles and can be used individually or manifold mounted.Fluid: air , Operating pressure range: (internal pilot) 0.1 - 0.7MPa (external pilot) -100kPa to 0.7MPa

Series SY offers major advances in valve performance for cost-effective solutions to your requirements. The series offers high flow with low power consumption in a compact design. The SY is available in body ported or base mounted styles and can be used individually or manifold mounted.Fluid: air , Operating pressure range: (internal pilot) 0.1 - 0.7MPa (external pilot) -100kPa to 0.7MPa

Type: Solenoid Valves, Application: Unit for Manifold Mounting, Mounting Orientation: Manifold Base, Voltage: AC200V, Specification: Standard / Lubrication Free, Valve Type: 5-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Exhaust, Applicable Cylinder Diameter(Ø): -, Pipe Port Type: -, Port Size: -, Pressure Rating(MPa

Function: 1 (2 Position Single), Body Option: 10 (Base Mounted Non Plug-in), Pilot: Internal Pilot, Voltage: 2 (200VAC 50/60HZ), Lead Wire: T (Conduit Terminal)

Function: 1 (2 Position Single), Body Option: 10 (Base Mounted Non Plug-in), Pilot: Internal Pilot, Voltage: 2 (200VAC 50/60HZ), Lead Wire: T (Conduit Terminal)

Function: 2 Position Single, Body Option: Base Mounted Non Plug-in, Pilot: Internal Pilot, Voltage: 200VAC 50/60HZ, Lead Wire: Conduit Terminal, Surge Suppressor: -, Manual Override: -, Piping: -, Port Size: -, Thread: -, Option: -

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

AS-F (Hexagon width across flats) (Hexagon width across flats) AS22 1FE-01-04SK 12.7 27.5 20.4 4 9.3 26 TMH AS22 1FE-01-06SK 13.5 27.5 20.4 13.4 6 11.6 27 12 12 R 1/8 44.9 49.9 48 53 14.2 AS22 1FE-01-08SK 18.5 32.4 25.3 8 15.2 29 ASD AS22 1FE-01-10SK 21 40.2 33.1 14.1 10 18.5 31 Applicable tubing O.D. d AS22 1FE-02-04SK 16 34.4 25.2 4 10.4 36 AS AS22 1FE-02-06SK 17 34.4 25.2 17.7 6 12.8 37

76

F (C) Correction factor 1.41 41 to 86 (5 to 30) Air ow capacity scfm (m3/min) (ANR) 50 Hz 565 (16) 709.8 (20.1) 882.8 (25) 50 (10) 1 1.21 95 (35) 60 Hz 663.8 (18.8) 836.9 (23.7) 953.4 (27) 59 (15) 1.4 1 104 (40) 61 (16) or more 1.5 0.92 113 (45) The maximum coefficient value is 1.5 due to the drainage separation performance. 0.75 122 (50) 0.63 131 (55) Data D: Inlet Air Pressure 0.53 140

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

06A 6 10.4 21.8 33 36.4 1/4 21 16.6 50 48.4 43.5 41.9 13.3 37 AS32l1FG-G03-08A 8 13.2 22.7 33.9 14.2 38 AS32l1FG-G03-10A 10 15.9 26.7 37.9 28 15.6 39 AS32l1FG-G03-12A 12 18.5 29.7 40.9 26.8 17 41 AS42l1FG-G04-10A 10 10.4 21.8 33 28.7 3/8 21 16.6 42.3 40.7 34.8 33.2 15.6 69 AS42l1FG-G04-12A 12 18.5 30.8 45.2 35.1 17 71 AS42l1FG-G04-16A 16 23.8 34.8 49.2 32.7 20.6 75 15.9 27.4 41.8 36.2 1/2 27

COQ2BP

OJ 1A22x1.5 2. 1I 1 8 --g07D 28-03 ~ , Y-G08 80 71 23 038 SO r.122x15 21 27 lS'g.070 28 ~ 3 ~, 56 84 IV -GOS ~iTt .1 , m_ , m , L , CQ2 Double Rod Clevis Pin (mm) C02 Jam Nut J r ,..,. No. AppI_ bon~.. Dd9 L d I m 1 Soap ring ly-(l05 50,63 14

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

8.2 8.2 GW 18.5 25.5 31.5 37.5 42.5 53.5 63.5 81.5 93.5 CB 2 2 2 3 3 3 5 5 5 H 19 26 32 39 44 55 67 85 97 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 Model 12-CY3R6 12-CY3R10 12-CY3R15 12-CY3R20 12-CY3R25 12-CY3R32 12-CY3R40 12-CY3R50 12-CY3R63 L 34 38 53 62 70 76 90 110 118 W 20 20 25 40 40 50 60 60 70 X 10 15 18 22 28 35 40 50 60 LD 3.5 3.5 4.3 5.4 5.4 7 7 8.6 8.6 WP 9.5 13 16 19 21.5 27

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

Rotary Actuated Air Gripper MHR2 1122Without Auto Switch: MHR2-15R 1122B 1122MHR2-15E port location 44 42 45 120 120 A C 36 11 11 3 x M3 x 0.5 thread depth 6 10 25 25 P.C.D.29 Finger closing port Finger opening port M3 x 0.5 M3 x 0.5 M3 x 0.5 Finger closing port (Mounting thread) M3 x 0.5 Finger opening port 35.5 12h9-0.043 0 1.5 41.5 +0.02 0 3 x 3 depth 6 (A, B, C common view) 5 19.5 12 27

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

5 2 x M4 x 0.7 Piping port F QL 6 13.5 Prepared hole diameter 3.3 2 x M3 x 0.5 (Plug: M-3P) 170.05 6 (fitting seat surface dimension) M3 x 0.5 Vacuum suction port Stroke: S M 1 Mounting base side B D Piping port A 2 x M3 x 0.5 A 5 5.5 3.2 J 2.4 Z Section AA 3.5 depth 2 2.5 +0.030 0 7 +0.030 0 depth 2 2.5 Q QL 11-/22-MXPJ6-10 4 x M3 x 0.5 depth 3 F (mm) E F H J M Q QL S Z Model 23 25 38 27

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Please adjust in an actual setting after confirming the operating state of the auto switch. 24.5 30.5 59.5 34 55.5 27 36 63 40 59 30.5 38.5 73.5 42.5 69.5 35 Specific Product Precautions Be sure to read this before handling. Speed Adjustment Cushion Adjustment Caution Caution 1. Cushion adjustment mechanism is not provided.