HRX-OM-W060

(G thread)" or "N (NPT thread)" is selected, it becomes "G thread " or "NPT thread ". 2 When the piping screw type "F (G thread)" or "N (NPT thread)" is selected, a conversion joint is included.

HRX-OM-Y098

(G thread)" or "N (NPT thread)" is selected, it becomes "G thread " or "NPT thread ". 2 When the piping screw type "F (G thread)" or "N (NPT thread)" is selected, a conversion joint is included.

Silencers NAN, NAMC Series Compact Mufflers, Exhaust Cleaners

e E , q 1.5 8 1 2 1 6 2 0 Cylinder speed (in/sec.) Sl6ct a propr unit sccording to exhaust flo/, in lh6 following ordr: (l) Oete|mine air con6umplion ot actuaicrs uaed in tl|e ckc\rii.

VXA21/22

VDW Thread type Nil T F N VQ Orifice size Rc NPTF G NPT 2 3 4 5 6 3 mm 4.5 mm 6 mm 8 mm 10 mm VX2 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Refer to the table (1) given below for availability.

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

No indication is necessary for Rc; however, indicate N for NPT, and F for G. * Separate spacers are required for modular units.

Manifold Regulator Modular Type ARM2500/3000 Series

SRF Flow rate (L/min (ANR)) Example of mounting ITV Pressure Characteristics (Representative Value) Initial setting P1 = 0.7 MPa P2 = 0.2 MPa Q = 20 L/min (ANR) Bracket IC ITVH Set nut Outlet pressure (MPa) ITVX PVQ VY1 VBA VBAT Model Part no.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Body ported De-energized Base mounted De-energized Component Parts q Description No.

Stations: 3 Stations, Port Size: M5 (M5 Thread), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 2 (3.0m Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: None, Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust), CE Compliant: Q (CE Compliant)

How to Order

(For type 20 manifold) M 1 SYJ3 2 5 M M3 10 Body ported M 1 SYJ3 4 5 M 10 Base mounted CE-compliant Clean series Port size Nil Q CE-compliant 3 port Nil: Without sub-plate M5: M5 port With sub-plate Note) CE-compliant: For DC only.

10-SYJ3000

: With M5 port sub-plate Nil Standard With power saving circuit T For sub-plate, type 41, S41, 46, S46 manifold (24, 12 VDC only) Power saving circuit is not available for W type.

Type: 332 (Body Ported), Valve Option: Standard Type, Rated Voltage: 1 (100 VAC, 50/60 Hz), Electrical Entry: D (DIN Terminal), Light/Surge Voltage Suppressor: S (w/Surge Voltage Suppressor), Port Size: M5 (M5 x 0.8), Thread: Rc with sub-plate, or Nil, Bracket: F (w/Bracket, Not Assembled), CE-Compliant: Q (CE-compliant)

Type: 332 (Body Ported), Valve Option: Standard Type, Rated Voltage: 3 (110 VAC, 50/60 Hz), Electrical Entry: D (DIN Terminal), Light/Surge Voltage Suppressor: S (w/Surge Voltage Suppressor), Port Size: M5 (M5 x 0.8), Thread: Rc with sub-plate, or Nil, Bracket: F (w/Bracket, Not Assembled), CE-Compliant: Q (CE-compliant)

Type: 332 (Body Ported), Valve Option: Standard Type, Rated Voltage: 5 (24 VDC), Electrical Entry: D (DIN Terminal), Light/Surge Voltage Suppressor: None, Port Size: M5 (M5 x 0.8), Thread: Rc with sub-plate, or Nil, Bracket: F (w/Bracket, Not Assembled), CE-Compliant: Q (CE-compliant)

Type: 332 (Body Ported), Valve Option: Standard Type, Rated Voltage: 5 (24 VDC), Electrical Entry: D (DIN Terminal), Light/Surge Voltage Suppressor: S (w/Surge Voltage Suppressor), Port Size: M5 (M5 x 0.8), Thread: Rc with sub-plate, or Nil, Bracket: F (w/Bracket, Not Assembled), CE-Compliant: Q (CE-compliant)

Type: 332 (Body Ported), Valve Option: Standard Type, Rated Voltage: 5 (24 VDC), Electrical Entry: D (DIN Terminal), Light/Surge Voltage Suppressor: Z [w/Light/Surge Voltage Suppressor (Type D Only)], Port Size: M5 (M5 x 0.8), Thread: Rc with sub-plate, or Nil, Bracket: F (w/Bracket, Not Assembled), CE-Compliant: Q (CE-compliant)

Type: 332 (Body Ported), Valve Option: Standard Type, Rated Voltage: 3 (110 VAC, 50/60 Hz), Electrical Entry: D (DIN Terminal), Light/Surge Voltage Suppressor: Z [w/Light/Surge Voltage Suppressor (Type D Only)], Port Size: M5 (M5 x 0.8), Thread: Rc with sub-plate, or Nil, Bracket: F (w/Bracket, Not Assembled), CE-Compliant: Q (CE-compliant)

Type: 332 (Body Ported), Valve Option: Standard Type, Rated Voltage: 6 (12 VDC), Electrical Entry: G (Grommet, Lead Wire 300mm), Light/Surge Voltage Suppressor: None, Port Size: M5 (M5 x 0.8), Thread: Rc with sub-plate, or Nil, Bracket: F (w/Bracket, Not Assembled), CE-Compliant: Q (CE-compliant)

Type: 332 (Body Ported), Valve Option: Standard Type, Rated Voltage: 3 (110 VAC, 50/60 Hz), Electrical Entry: D (DIN Terminal), Light/Surge Voltage Suppressor: None, Port Size: M5 (M5 x 0.8), Thread: Rc with sub-plate, or Nil, Bracket: F (w/Bracket, Not Assembled), CE-Compliant: Q (CE-compliant)

AU

AU200/300 Effective thread depth 6.5 4-M5 x 0.8 AU200, 300 Float type auto-drain Port size H G F E D C B A Model Port size 1 4 / 3 8 AU200 / 50 70 61 30 40.5 31.5 164 165 AU300 50 70 61 30 40.5 31.5 188.5 165 14-3-12

Slit Valve

The product should be operated after thoroughly reading the manual and understanding its contents. 530 Slit Valve XGT Series Construction i u w q !2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.