Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Low Vacuum Compatible / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: [Others] 2 positions universal, Pipe Port Type: NPTF, Port Size: 1/2, Pressure Rating(MPa): -0.1 to 0.9,

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Low Vacuum Compatible / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: [Others] 2 positions universal, Pipe Port Type: G, Port Size: 3/4, Pressure Rating(MPa): -0.1 to 0.9, Driving

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Low Vacuum Compatible / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: [Others] 2 positions universal, Pipe Port Type: NPT, Port Size: 3/4, Pressure Rating(MPa): -0.1 to 0.9, Driving

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Low Vacuum Compatible / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: [Others] 2 positions universal, Pipe Port Type: NPT, Port Size: 3/4, Pressure Rating(MPa): -0.1 to 0.9, Driving

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Low Vacuum Compatible / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: [Others] 2 positions universal, Pipe Port Type: G, Port Size: 1, Pressure Rating(MPa): -0.1 to 0.9, Driving

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Low Vacuum Compatible / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: [Others] 2 positions universal, Pipe Port Type: NPT, Port Size: 1, Pressure Rating(MPa): -0.1 to 0.9, Driving

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Low Vacuum Compatible / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: [Others] 2 positions universal, Pipe Port Type: NPT, Port Size: 1, Pressure Rating(MPa): -0.1 to 0.9, Driving

Pilot: External Pilot, Port Size: -, Thread: G, Safety Switch, Wiring: -, Check Valve, External Pilot Only: -

Pilot: External Pilot, Port Size: -, Thread: NPTF, Safety Switch, Wiring: -, Check Valve, External Pilot Only: -

Pilot: External Pilot, Port Size: -, Thread: NPT, Safety Switch, Wiring: -, Check Valve, External Pilot Only: -

Body Size: 5000, Thread: N (NPT), Port Size: 06 (3/4), Option: S (Silencer), Voltage: 5 (24 VDC), Lead Wire: Y (Type Y, DIN Terminal w/Connector), Surge Suppressor: Z (with Light/Surge Voltage Suppressor), Manual Override: B (Push-turn Locking Slotted Type), Flow Direction/Pressure Unit: Z (Name Plate and Pressure Gauge in Imperial Units)

Ionizer

0 o i u y t r e w q No. Description Type Contents Power supply indicator Illuminates when power is supplied. Flashes when the supply voltage is irregular. 1 LED (Dark green) Sensor indicator 2 Illuminates when the feedback sensor, autobalance sensor [high-precision type], or autobalance sensor [body-mounting type] is connected.

44

Description Material Note w y 1 Union nut Fluoro coated Stainless steel 316 2 Male connector body Stainless steel 316 t 3 Male elbow body Stainless steel 316 Swivel elbow body Stud 4 Stainless steel 316 5 Stainless steel 316 O-ring 6 Special FKM Fluoro coated Male connector Male elbow Swivel elbow 322 KFG2 Series Stainless Steel 316 Insert Fittings Applicable Tubing: Metric Size, Connection

Micro-Mist Separator with Prefilter Series AMH

-l ~ / /o~la ~ / /v 0.7MPa ~ /-Y ~0.04 V ~ 0.04 f-i-,I"''---c,..-f'''---c-l---l-l ~ /~/ VI Q) a. 0.3MPa_0.5MPs_ ~ 80021-W'--+---+---+0.3MP.~-1__1 ~ Max.fIowline ---o.7MPa 8 0.02 Max.fIow line ~~_-0.5M!,a -I _:---..

PF-OMN0009_C

9No.PF-OMN0009CN-F * , *PVC PVC PVC () PVC PVC , -10No.PF-OMN0009CN-F PF3W5 48 () 3 A : 04 20 40 11 21 0.5~4 L/min 2~16 L/min 5~40 L/min 10~100 L/min 50~250 L/min 2 04 20 40 11 21 R 04 20 40 11 21 S 250L/min G L/min(gal/min) / : SI : G : 1[L/min]=0.2642[gal/min] 1[gal/min]=3.785[L/min] 1=9/5+32 L/min 100L/min250L/min Rc N NPT F G IS0228 1 N M8(3m) 04 20 40 11 21 03 3/8 04 1/2 06

0.01

0 w q t e u Cover 2 Aluminum alloy Fitting body 3 Stainless steel alloy Bracket 4 Stainless steel alloy O-ring A 5 H-NBR O-ring B 6 H-NBR Rod cover 7 Stainless steel alloy Tie-rod 8 Stainless steel alloy Cap nut 9 Stainless steel alloy Plain washer 10 Stainless steel alloy Replacement Parts r y o No.

Clean Room Regulator/Fluoro Resin Type Series SRF30

Construction Tubing Integral fittings e y t e t i r y !6 r u i u q o q !0 o !1 !0 w !1 !2 w !2 Parts list !3 No.

Model: U (Union Y, Different Dia. Union Y), Applicable Tube O.D.: 06 (Ø6), Port Size/Applicable Tube: 00 (Same Dia. Tube)

Model: U (Union Y, Different Dia. Union Y), Applicable Tube O.D.: 04 (Ø4), Port Size/Applicable Tube: 06 (Tube A: Ø4, Tube B: Ø6)

Model: U (Union Y, Different Dia. Union Y), Applicable Tube O.D.: 06 (Ø6), Port Size/Applicable Tube: 08 (Tube A: Ø6, Tube B: Ø8)