CNS

PLC 100 V, 200 V Yes Yes 12 V PLC Terminal conduit 24 V 2-wire 100 V, 200 V DIN terminal Grommet Relay, PLC Diagnostic indication (2-color indication) 3-wire (NPN) IC circuit 24 V 5 V, 12 V 3-wire (PNP) Grommet 100 V, 200 V 12 V 5 V, 12 V 12 V 2-wire 3-wire (NPN) IC circuit Terminal conduit Relay, PLC 2-wire 3-wire (NPN) 3-wire (PNP) IC circuit 24 V Diagnostic indication (2-color

MGQ

B 19.5 25 29.5 C 6.5 7 14.5 A 8 8 8 8 10 10 Model MGQ32 MGQ40 MGQ50 MGQ63 MGQ80 MGQ100 Detailed figure of a section Detailed figure of b section a a a b MGQ32 to 50 MGQ63 to 100 8-20-10 11 Compact Guide Cylinder Series MGQ Proper Auto Switch Mounting Position (Detection at stroke end) Minimum Stroke for Auto Switch D-Z7/Z80 D-Y5/Y6/Y7(V) D-Y7W(V) 1 pc. 2 pcs. 5 10 5 5 10 15 Auto switch D-Z7

VXD21/22/23

TI/ TIL Table (2) Rated Voltage-Electrical Entry-Electrical Option Table (1) Connection Size and Applicable Model PA Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) Class B Class H G Connection Applicable model VXD2130-02 VXD2130-03, VXD2140-03 VXD2130-04, VXD2140-04 VXD2150-06 VXD2260-10 VXD2270-32 VXD2380-40

Series VQ Base Mounted Metal Seal/Rubber Seal

SX L VK C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C8 (8) kit VZ VF N1 (1/8) N3 (5/32) N7 (1/4) N9 (5/16) VFR VP7 Built-in silencer P.1.10-136 P.1.10-140 P.1.10-144 VP4 Terminal box L Enclosure IP65 available C4 (4) C6 (6) C8 (8) C10 (10) VQ kit VQ4 N3 (5/32) N7 (1/4) N9 (5/16) N11 (3/8) VQZ VQD Enclosure IP65 available Enclosure IP65 available VZS Built-in silencer P.1.10-136

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Input voltage 1 V 5 V The sensor input range can be set to the required value and displayed. (Voltage input: 1 to 5 V) Pressure switch/Flow switch can be displayed. M For Flow Sensor / PFMV5 Setting of the display for analog voltage A is displayed for 1 V. B is displayed for 5 V. The range can be set as required.

V100

AC (50/60Hz) 1 2 3 4 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] VFN Light/Surge voltage suppressor Electrical entry Nil R U Z For DC, AC Without light/surge voltage suppressor With surge voltage suppressor With light/surge voltage suppressor With light/surge voltage suppressor 24 V, 12 V, 6 V, 5 V, 3 VDC/100 V, 110 V, 200 V, 220 VAC Grommet L plug connector M plug connector For DC

ZCUK

Applicable auto switch Number of auto switches D-A9, D-A9V D-M9, D-M9V D-F9W, D-F9WV 5 5 5 1 pc. 10 5 10 2 pcs.

Square Tube Type Air Cylinder Series MB1

37 46 52 65 75 95 114 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 13 14 15.5 16.5 19 19 47 51 58 58 72 72 4 4 5 5 5 5 M6 x 1.0 M6 x 1.0 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 6 6 7 7 10 10 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 26.5 26.5 31 31 37.5 37.5 1/8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 4 4 5 9 11.5 17 6.5 9 10.5 12 14 15

MXH

Solid state switches marked with are produced upon receipt of order. 3-wire (NPN) 2-wire Relay, PLC IC circuit 5 V, 12 V 3-wire (PNP) 2-wire 12 V Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Lead wire length symbols: 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) F9NWZ Since there are other

PSxx-OMV0008CN

* 1015 10 1% 2162 LCD * -8No.PS-OMV0008CN-E ISE70G 02 L2 M 3 Y K T ISE70G 0~1 MPa ISE75G 0~2 MPa ISE76G 0~5 MPa ISE77G 0~10 MPa ISE78G 0~16 MPa 2 A A B B 02 Rc1/4 N02 NPT1/4 F02 G1/4 :ISO1179-1 1 M12 5m M12 5m T S : L IO-Link/1+2 NPNorPNP L2 1 M SI2 1 2kPaMPa / A ZS-50-A M46 2 B ZS-50-B M46 2 ZS-48-A ZS-31-B 5 m M12 ZS-31-C 5 m -9No.PS-OMV0008CN-E M12 4 24 OUT1 IO-Link

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

Grommet Yes 3-wire (NPN) 3-wire (PNP) 24 V Diagnostic indication (2-color indicator) 5 V, 12 V IC circuit 2-wire 12 V Water resistant (2-color indicator) 3-wire (NPN equivalent) Z76 5 V IC circuit Yes Grommet 12 V 100 V Z73 Relay, PLC 24 V 2-wire None IC circuit 100 V or less Z80 Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee

ZL3-OM00801

ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 V A M W 1 1 2) 3) 4) 5) 6) 7) 8) 9) 10) 11) 12) 13) 14) 4) 2) 1) 3 300L/min(ANR) M 0.35MPa *2 P 6 600L/min(ANR) H 0.50MPa 3)P V/ *23 (V) (P) 5/ 06 Rc3/4 K1 N.C.+N.C. 8() 04 2xRc1/2 K2 N.C. *1 F06 G3/4 B1 N.0.+N.C. *1 F04 2xG1/2 B2 N.O.

High Vacuum Angle Valve

Chemraz is a registered trademark of Greene, Tweed Technologies, Inc. 4 XLA/XLA V Series Specifications Model XLA(V)-16-2 XLA(V)-25-2 XLA(V)-40-2 XLA(V)-50-2 XLA(V)-63-2 XLA(V)-80-2 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature [C] XLA 5 to 60 (High-temperature type: 5 to 150) XLAV 5 to 50 Operating pressure [Pa(abs)] 1 x 106

CRBB-OM00004

For sizes 10, 15 : D-S/T99(V), S9P(V), 97/93A, 90/90A External view and descriptions of auto switch unit For sizes 20 to 40 : D-S/T79, S7P, R73/80 Solid state auto switch 3-wire typeD-S99(V), S9P(V) 2-wire typeD-T99(V) Reed auto switch D-97/93A (With indicator light) D-90/90A (Without indicator light) 1. Preparations 1.

MRHQ

M9NV 3-wire (NPN) 5 V 12 V IC circuit Grommet Solid state switch Relay PLC M9PV Yes 24 V 3-wire (PNP) M9BV 12 V 2-wire Lead wire length symbols: 0.5 m .

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Auto switch model Electrical entry direction Lead wire length (mm) Load voltage Type Electrical entry Indicator light Wiring (Output) Special function Applicable load 5 (Z) AC DC 0.5 (Nil) 3 (L) Perpendicular In-line Z76 5 V IC circuit 3-wire Yes Reed switch Z73 12 V 100 V Grommet Relay, PLC 24 V 2-wire Z80 5 V, 12 V 100 V or less No IC circuit Y59A Y69A 3-wire (NPN) IC circuit 5 V, 12

HRX-OM-Y098

will display. . 5-8 Menu key . 5-9 Display and setting of date and time . 5-9 Operating condition display . 5-9 Current circulating fluid temperature [PV] . 5-10 Circulating fluid set temperature [SP] . 5-10 Circulating fluid discharge pressure [Press PV] . 5-11 Circulating fluid flow rate [Flow PV]. 5-11 Circulating fluid flow rate [DI PV]. 5-11 Independent pump operation [Pump] . 5-12 Operation

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

Manual override (Non-locking) 41.5 [48] 29.1 22.5 13 [ ] for AC L plug connector (L) M plug connector (M) 33.5 5 33.5 2.5 5 2.5 10 5 10 5 48.9 [50.2] 58.5 44.9 4-M5 X 0.8 (Lead wire length) (P/R port) 4-M5 X 0.8 (P/R port) 300 41.5 [48] 52.6 [59.1] 300 29.1 (Lead wire length) 41.5 [48] [ ] for AC Other dimensions are the same as the grommet.

AR Series Modular Type Regulator

V V V V Y Upward V V V V + f Pressure unit Nil Name plate and caution plate for bowl in imperial units: MPa V V V V Z Note 4) Name plate and caution plate for bowl in imperial units: psi Note 5) Note 5) Note 5) Note 5) Note 1) Option B, G, H, M are not assembled and supplied loose at the time of shipment.

Heavy Duty Stopper Cylinder Series RSH/RS1H

21 24.5 31 T 2 3.5 3 U 5.5 6.4 6.7 V 15.5 16 19.4 W 72 87.5 109 WB 32 38.5 49 X 5 5 6 Y 10 10 12.5 Stroke 30 30 40 Bore size (mm) 50 63 80 Model 24 24 23 Nil Rc 1/8 Rc 1/4 Rc 1/4 TF G 1/8 G 1/4 G 1/4 RS1H50 RS1H63 RS1H80 Note 1) Dimensions with auto switch are identical to the above.