Series: 2 (VQZ2000), Configuration: 1 (2 Position Single), Seal Type: 0 (Metal Seal), Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire, Light & Surge Suppressor), Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: C6 (ø6 One-touch Fitting)

Series: 2 (VQZ2000), Configuration: 1 (2 Position Single), Seal Type: 0 (Metal Seal), Function: Standard (0.35W DC, AC), Coil Voltage: 3 [110VAC (115VAC) 50/60HZ], Lead Wire: L (L Plug Connector w/Lead Wire, Light & Surge Suppressor), Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: N3 (5/32" One-touch Fitting), Thread: T (NPTF)

Series: 2 (VQZ2000), Configuration: 1 (2 Position Single), Seal Type: 0 (Metal Seal), Function: Standard (0.35W DC, AC), Coil Voltage: 6 (12VDC), Lead Wire: Y (DIN Terminal), Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: N7 (1/4" One-touch Fitting), Thread: T (NPTF)

Series: 2 (VQZ2000), Configuration: 1 (2 Position Single), Seal Type: 0 (Metal Seal), Function: Standard (0.35W DC, AC), Coil Voltage: 4 [220VAC (230VAC) 50/60HZ], Lead Wire: L (L Plug Connector w/Lead Wire, Light & Surge Suppressor), Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: C6 (ø6 One-touch Fitting)

Series: 2 (VQZ2000), Configuration: 1 (2 Position Single), Seal Type: 0 (Metal Seal), Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: G (Grommet - DC Only), Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: N7 (1/4" One-touch Fitting)

Series: 2 (VQZ2000), Configuration: 1 (2 Position Single), Seal Type: 0 (Metal Seal), Function: Standard (0.35W DC, AC), Coil Voltage: 2 (200VAC 50/60HZ), Lead Wire: M (M Plug Connector w/Lead Wire, Light & Surge Suppressor), Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: C6 (ø6 One-touch Fitting)

Series: 2 (VQZ2000), Configuration: 1 (2 Position Single), Seal Type: 0 (Metal Seal), Function: Standard (0.35W DC, AC), Coil Voltage: 4 [220VAC (230VAC) 50/60HZ], Lead Wire: Y (DIN Terminal), Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: C6 (ø6 One-touch Fitting)

Series: 2 (VQZ2000), Configuration: 1 (2 Position Single), Seal Type: 0 (Metal Seal), Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire, Light & Surge Suppressor), Manual Override: B (Locking Slotted Style), IP65 Compliant: No, Port Size: C4 (ø4 One-touch Fitting)

Series: 2 (VQZ2000), Configuration: 1 (2 Position Single), Seal Type: 0 (Metal Seal), Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire, Light & Surge Suppressor), Manual Override: B (Locking Slotted Style), IP65 Compliant: No, Port Size: C6 (ø6 One-touch Fitting)

Series: 2 (VQZ2000), Configuration: 1 (2 Position Single), Seal Type: 0 (Metal Seal), Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: MO (M Plug w/o Connector, w/Light & Surge Suppressor), Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: C6 (ø6 One-touch Fitting)

Rotary Actuator/Vane Type

q END w END q A B A B B A Switch for rotation END q Switch for rotation END q Switch for rotation END w Switch for rotation END w Auto switch B port A port * Solid-lined curves indicate the rotation range of the output shaft with single flat (key).

High Power Cylinder:

Q Q Q Connector 5V 12V 24V IC C80C Q Q Q No Q A33 PLC Q 12V Terminal conduit A34 Q 100V 200V 12V Yes DIN terminal Relay PLC A44 Q Grommet Diagnostic indication (2 color) B59W Q Q 3 wire (NPN) 3 wire (PNP) H7A1 Q q Q 5V 12V IC H7A2 Q Grommet q Q H7B Q q Q 2 wire 12V H7C Q Q Connector Q Q Solid state switch 3 wire (NPN) 2 wire 5V 12V G39 IC Q Terminal conduit K39 12V 3 wire (NPN

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

q END w END q END w END q Switch for end of rotation q Switch for end of rotation w Switch for end of rotation q Switch for end of rotation w Solid-lined curves indicate the rotation range of the output key (keyway).

Table of Contents

7 No. q w e r t y u i o !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

7 No. q w e r t y u i o !

Table of Contents

w No. q w e r t y u i o !

Vacuum System Peripherals:

m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.

Aluminum High Vacuum Angle Valve

0 o 102 0.2 2-1 132 q 134 O-ring Part No.

ZP

6 Q: 8 Model A B C D F H I J K P Q: 6 Q: 8 Y K P K P ZPT20F10-0-A14 ZPT40F10-0-A14 18.5 39 51.5 118 136.5 13 140 5 12.5 20 22 40 43 13 15.5 36 48.5 50 115 13 133.5 13 137 12.5 52.5 50 ZPT25F10-0-A14 ZPT50F10-0-A14 19.5 40 119 137.5 141 6 13.5 25 28 50 53 ZPT32F10-0-A14 16 36.5 49 115.5 134 135.5 13 32 35 Additional Dimensions by Stroke (mm) Additional Dimensions by Stroke (mm) K P Q: 6 Q

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

In the case of liquids: P Q = 53 Kv (9) G Q : Flow rate [L/min] Kv : Flow coefficient [m3/h] DP : Pressure difference [MPa] G : Relative density [water = 1] In the case of saturated aqueous vapor: Q = 232 Kv P (P2 + 0.1) (10) Q : Flow rate [kg/h] Kv : Flow coefficient [m3/h] DP : Pressure difference [MPa] P1 : Upstream pressure [MPa]: DP = P1 P2 P2 : Downstream pressure [MPa] 57 Solenoid