SMC Corporation of America
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] 1000 32 32 25 25 1000 5 5 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circullating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9-11 Heating capacity (HRR050-A/W-20-) 9.5.2 HRR050-A/W-402000 2000 Ambient temp Ambient temp 1500 1500 Heating capacity[W] Heating capacity[W] 40 40 32 32 25 25 1000 1000 5 5 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature

(Example 1) The least significant bit was a 1. 0 0 0 0 0 0 0 1 1bit shift in the lowest direction 0 0 0 0 0 0 0 0 1 Add 0 to the top Execute ExOR (Example 2) The least significant bit was a 0. 0 0 0 0 0 0 0 0 1bit shift in the lowest direction 0 0 0 0 0 0 0 0 0 Add 0 to the top Not execute ExOR 3.10 Checksum calculation method HRS400-A-46 3-10 DOC1003626 Chapter 3 Serial communication

0 4 2 0 0 3.5 1.5 5.5 3.5 3 1 40 9 9 5 5 5.5 5.5 10.5 10.5 0 0 3 3 0 0 2.5 2.5 4.5 4.5 2 2 50 10 9 6 5 6.5 5.5 11.5 10.5 0 0 4 3 0 0 3.5 2.5 5.5 4.5 3 2 63 10 9 6 5 6.5 5.5 11.5 10.5 0 0 4 3 0 0 3.5 2.5 5.5 4.5 3 2 80 14.5 11.5 10.5 7.5 11 8 16 13 4.5 1.5 8.5 5.5 4.5 1.5 8 5 10 7 7.5 4.5 100 14 12 10 8 10.5 8.5 15.5 13.5 4 2 8 6 4 2 7.5 5.5 9.5 7.5 7 5 125 16 16 12 12 12.5 12.5 17.5 17.5

0 i !4 o !8 q @0 !2 e !3 !5 MX MTS t !6 r u y w !

0 1 3 4 5 2 6 7 8 9 1 2 3 6 7 0 4 5 Sl unit output No. Sl unit output No.

lowest direction 0 0 0 0 0 0 0 0 1 Add 0 to the top Execute ExOR if 1 (Example 2) The least significant bit was a 0. 0 0 0 0 0 0 0 0 1 bit shift in the lowest direction 0 0 0 0 0 0 0 0 0 Add 0 to the top If it is 0, do not ExOR HRLE Series 3.10 Checksum calculation method 3-9 HRX-OM-Z015 Chapter 3 Serial communication Calculation example Example) Change circulating fluid set temperature

V 0 V 24 V G D G D SI unit SI unit Master unit D 0 V24 V G D 0 V24 V G D 0V 24V G D 0V 24V L2 L1 G LINE1 LINE2 SHIELD L1 L2 Power supply 24 V 0 V 0 V 24 V SHIELD SHIELD Transmission line L1 L2 FG 24 V 0 V L1 L2 FG 24 V 0 V Black White Brown Blue Terminal resistor Main transmission line Transmission line Crimped connector SL-J1A Power supply 24 V 0 V 0 V 24 V Type 3 ground Type 3 ground G

Blue 0-010-062 0-010-125 .012 Green 0-012-062 0-012-125 .014 Orange 0-014-062 0-014-125 .016 Grey 0-016-062 0-016-125 .017 Brown 0-017-062 0-017-125 .019 Red 0-019-062 0-019-125 .020 Dk. Blue 0-020-062 0-020-125 .025 Black 0-025-062 0-025-125 .030 Beige 0-030-062 0-030-125 .035 Dk.

0 0 100 200 300 400 500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 0 100 200 300 400 500 600 V (mm/s) LEFS 16 LEFS 25 LEFS 32 50 12 20 W(kg) W(kg) 10 W(kg) W(kg) W(kg) W(kg) 6 40 6 15 8 30 8 6 8 10 5 5 20 4 5 12 10 16 10 12 16 10 2 0 0 0 0 100 200 300 400 500 600 V (mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) -9- (1)(DC24V) LEFS40 (mm) 1) 200

bit was a 1. 0 0 0 0 0 0 0 1 1 bit shift in the lowest direction 0 0 0 0 0 0 0 0 1 Add 0 to the top Execute ExOR if 1 (Example 2) The least significant bit was a 0. 0 0 0 0 0 0 0 0 1 bit shift in the lowest direction 0 0 0 0 0 0 0 0 0 Add 0 to the top If it is 0, do not ExOR 3.10 Checksum calculation method HRL Series 3-10 HRX-OM-W069 Chapter 3 Serial communication Calculation example

No, Yes MENU 2 Signal Direction Open, Close 3 Position Limit Low 0.0% [0..100%] METHOD 4 Position Limit High 100.0 % [0..100%] 5 Travel Rate Open 0.0 %/s [0..1000%/s] Editable variable 6 Travel Rate Close 0.0 %/s [0..1000%/s] 7 Low Cut-off 2.0 % [0..100%] Read-only variable 8 High Cut-off 100.0 % [0..100%] 9 Split Range Low 0.0 % [0..100%] in ND9000HT only Split Range High 100.0 % [0..100%

ON / 3 0> OFF / 3 2 1 No.0 4 3 No.1 5 0/> No.0 No. mm/s mm % % mm 0 ABS 250 50.00 40 40 20.00 50mm 40mm 60 40% 60% 40 No. mm/s mm % % mm 0 ABS 250 40.00 60 40 20.00 No.1 No. mm/s mm % % mm 0 ABS 250 40.00 60 40 20.00 1 ABS 250 0.00 0 0 0.50 0mm 20mm 20 No. mm/s mm % % mm 0 ABS 250 40.00 60 40 20.00 1 ABS 250 20.00 0 0 0.50 (6) 4.3 []P21~P29 ACT

9 6 9 6 9 6 9 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 IN IN 0.15 0.1 0.05 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 0 MPa 0.2 Left Right Bracket Bracket Stations 3 2 1 Stations 1 2 3 IISA2CSL-3B5DLCE21 set (3 stations manifold part number) ISA2-HE41P 3 sets (Air catch sensor part number) IISA2VPR-3B5DLC1 set (3 stations manifold part number

0 40 80 120 160 20 40 60 80 0 Outlet air flow rate (l/min (ANR)) Outlet air flow rate (l/min (ANR)) IDG20 (Type A products group) IDG30 (Type B products group) P1 = 0.3 MPa P1 = 0.3 MPa 0 0 Outlet air atmospheric pressure dew point (C) Outlet air atmospheric pressure dew point (C) P1 = 0.5 MPa 10 P1 = 0.5 MPa 10 P1 = 0.7 MPa 20 HA 20 P1 = 0.7 MPa 30 AT 30 40 ID 50 0 40 100 200 300 0 100

Movement Speed Position Acceleration Deceleration Area 1 Area 2 In pos force Force speed force 2 2 mode mm/s mm mm/s mm/s mm mm mm Value mm/s 0 1 Absolute 100 100.00 1000 1000 50 40 10 100 0 0 5 2 Absolute 50 50.00 1000 1000 0 0 0 100 0 0 0.1 () (1)No.

Performance Charts IDG1 IDG3 P1 = 0.3MPa Outlet air atmospheric pressure dew point C 0 0 Outlet air atmospheric pressure dew point C P1 = 0.3MPa P1 = 0.5MPa P1 = 0.5MPa 10 10 20 20 P1 = 0.7MPa P1 = 0.7MPa 30 30 40 40 4 8 12 16 0 10 20 30 40 0 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG10 IDG5 P1 = 0.3MPa P1 = 0.3MPa 0 0 Outlet air atmospheric pressure dew point C

VQ5000 0 5 72.0 (4.0) VQ54 0 53 or less Metal seal 50 or less Exhaust center 79.2 (4.4) 0 5 VQ54 1 63 or less Rubber seal 60 or less Plug lead unit 0 5 61.2 (3.4) VQ55 0 53 or less Metal seal 50 or less Pressure center 0 5 63.0 (3.5) VQ55 1 63 or less Rubber seal 60 or less Symbols 0 5 41.4 (2.3) VQ56 0 65 or less Metal seal 62 or less 2 position single Perfect (A) 4 (B) 2 0 5 45.0 (2.5)

Output deviation (%F.S.) 0.5 0.5 Out VE 40 0 0 Return VY G 60 0.5 0.5 AL 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Input signal (%F.S.)