SMC Pneumatic Clean Series

Bore size NTJ-010A NTJ-006A 8 6 M3 x 0.5 2.4 5.5 6.4 5.5 6.5 M3 x 0.5 6 12.5 M4 x 0.7 3.2 7 8.1 7 8.5 M4 x 0.7 8 14.5 NTJ-015A 10 M5 x 0.8 4 8 9.2 10.5 M5 x 0.8 16.5 10 9 (mm) Standard C D E F B A J K L M N O P G H I Bore size 8 6 M2.5 x 0.45 13 7 7 10 9 19 3 5 4 9 3.5 8 7 5.3 24 M3 x 0.5 13 7 8 11 10 21 3 6 5 11 4.5 10 8 5.3 25 10 13.5 M3 x 0.5 7 8.5 11.5 10.5 22 3.2 6 6 12 5 11 8.5 5.6

JXCx-OMT0001CN

PLC 11.

AS-FG

Port size N M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 Needle Valve/Flow Characteristics AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Effective area (mm2) Effective area (mm2) Effective

IR1000/2000/3000

AF 4.5 M5 x P0.5 AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 8.5 M6 x P0.5 5.5 71 11 18 123 44 51 90 10 9.5 IR VEX Bleed Bleed 63 Exhaust SUP(1) OUT(2) 30 AMR OUT(2) SUP(1) 10 43 35 EXH ITV 2-Rc 1/8 Port size 2-Rc 1/4 Port size Rc 1/8 Pressure gauge port 43

Series GS40 Digital Pressure Sensor 1

SET 20 VY1 + G P.SET PPA AL 14-11-19

Series GS40 Digital Pressure Sensor 1

Accessory None Bracket (Available M5 type only) Nil B 14-11-17 2 Series GS40 Precautions Be sure to read before handling. Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions.

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Dimension in parentheses shows Q5 (M5 x 0.8). 13-4-11 11 Series ZM For Single Unit/With Valve Basic Type with Switch and Valve ZM1 -K-E H M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-4.5 Release flow adjusting needle Release valve Supply valve

Process Pump

152 2 x M5 x 0.8 Thread depth 9 139 PA PA(P) 114 116 95 19 PAX PB PAF PAF 4 x 7 Bottom view of body PA PB AIR SUP (P1) Rc, NPT, G 1/8" FLUID OUT Rc, NPT, G 3/8" 119 106 13 79 39 14 AIR SUP (P2) Rc, NPT, G 1/8" FLUID IN Rc, NPT, G 3/8" 74 59 Foot (Option) Tube extension: PAF3413P13 P13N P13F 152 2 x M5 x 0.8 Thread depth 9 139 114 116 95 19 4 x 7 Bottom view of body (9.50) FLUID OUT 1/2"

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

10 11 10 13 7.2 7.2 b 0.18 0.24 0.18 0.24 0.28 0.25 0.16 0.26 0.26 0.27 Cv 2.4 3.0 2.4 3.0 2.4 2.8 2.4 2.8 2.4 3.3 b 0.24 0.27 0.24 0.27 0.24 0.27 0.20 0.27 0.25 0.29 Cv 3.0 3.3 3.0 3.3 2.4 2.8 2.4 3.3 2.8 3.0 C 12 13 12 13 10 11 10 13 11 12 7.0 7.0 Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

13 13 8 10 10 53 8 9 40 25 to 500 21 40 24 24 41 18 16 21 12 17 17 11 16 16 54 10 11 48 25 to 500 21 (mm) Bore size (mm) K NN P S T V W ZZ MM NB IA NA -0.020 -0.053 -0.020 -0.053 -0.025 -0.064 -0.025 -0.064 20 5 M22 x 1.5 1/8 81 9.5 4.5 6.5 138 M8 x 1.25 15 23f8 17 25 5.5 M24 x 1.5 1/8 81 11 3.5 5.5 143 M10 x 1.25 15 25f8 17 32 7.5 M30 x 1.5 1/8 87 13 3 4 159 M14 x 1.5 15 31f8 18 40 7.5

HRX-OM-Q026

Terminal No.11 Inlet of the signal cable Fig. 3-11 Wiring of run/stop signal input and remote signal input (Example) HRSH Series 3.3 Installation 3-21 HRX-OM-Q026 Chapter 3 Transport and Setting Up 3.3.6 Wiring of external switch signal input This product can be monitored by sampling the signal of the external switch prepared by the user.

High Power Cylinder Series RHC

Applicable bore size C D d H Applicable bore size C D d H 5 12.5 15 26 30 M8 x 1.25 8 M22 x 1.5 26 13 20 20 SOR-20 NT-02 6 16.5 19.6 32 36.9 M10 x 1.25 8 M24 x 1.5 32 17 25/32 25 SOR-25 NT-03 8 21.0 25.4 38 43.9 M14 x 1.5 9 M30 x 1.5 38 22 40 32 SOR-32 NT-04 11 26 31 41 47.3 M18 x 1.5 11 M33 x 2.0 41 27 50 40 SOR-40 NT-05 11 26 31 M18 x 1.5 27 63 NT-05 13 31 37 M22 x 1.5 32 80 NT-08 16 39

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

D-X 20Bore size (mm) Cylinder fixing bolt Tightening torque Data Bore size (mm) Hexagon socket head set screw Tightening torque 10 15 25 0.55 to 0.72Nm M3 10 15 25 2.6 to 3.5Nm M3 0.37 to 0.45 Nm M5 M5 0.54 to 0.64 Nm Enlarged view of stepped part Surface D 3. Be careful about the tightening torque of the hexagon socket head screws.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

D-X 20Bore size (mm) Cylinder fixing bolt Tightening torque Data Bore size (mm) Hexagon socket head set screw Tightening torque 10 15 25 0.55 to 0.72Nm M3 10 15 25 2.6 to 3.5Nm M3 0.37 to 0.45 Nm M5 M5 0.54 to 0.64 Nm Enlarged view of stepped part Surface D 3. Be careful about the tightening torque of the hexagon socket head screws.

Quick Exhaust Valve Series AQ 1

01 02 03 04 06 M5 x 0.8 AQ1500 AQ1510/2000 AQ2000/3000 AQ3000 1 8 Standard 1 4 0 1 M5 x 0.8 8 3 1 8 Note) AQ150 only 1 2 AQ5000 3 4 Thread type Metric thread (M5) Rc NPT G Nil N F Caution Be sure to read before handling.

IDX-OM-W026

M 11 M 11-1 ( ) IDF Series 11-1 11 1 IDX-OM-W026 11 M 11-2 ADM200 IDF22E-**-M IDF37E-**-M IDF55E-**-M IDF75E-**-M IDF-S0090 1.0MPa 1 1 2 / AC200V(50/60Hz) 4W (10, 0.95m) (10, 0.95m) 11-3 (1 1 )() 11-4 M 6-4 6-3 T 13-6 13-3 IDF Series 11-2 11 2 IDX-OM-W026 12 R 12 R 12-1 12-2 1 AC100V AC200V INOUT IDF22E/37E/55E-**-R 10A 30mA IDF75E-**-R 15A 30mA IDF Series 12-

17

x 0.8 KK 9 NH NW 53 NE NF MY1B25 MY1B32 MY1B40 110 9 5.5 16 24.5 54 M6 x 1 9.5 5.6 18 40.2 39 110 40.5 55 42 9 M5 x 0.8 30 MY3A MY3B 140 11 6.6 19 M8 x 1.25 2 28.5 68 M5 x 0.8 16 10 6.8 22 50.2 49 64 140 70 52 50 12 M6 x 1 37 170 14 8.5 23 M10 x 1.5 2 35 84 M6 x 1 15 13 170 8.6 85 26.5 62.7 62 61.5 75 64 12 M6 x 1 45 MY3M Centralized piping YW P PA PB Q PP RR QW T TT WW XXX YH Z ZZ Model

VZS

VVZS3000-4-1 VVZS2000-4 14.4 x 12 x 1.2 7.5 x 4.5 x 1.5 VVZS2000-11-n (1) Seal B Seal A NBR NBR NBR NBR Carbon steel Carbon steel Note 1) n: Stations Note 2) Manifold block assembly is attached with tie-rod for increasing stations. w e O-ring O-ring r t Tie-rod y Tie-rod for station addition VVZS2000-11-1-1 (2) Assembly part no.

PSxx-OMR0001CN

m GH641 m3 m5 m 200 kPa ISA3-F ISA3-G 1 m3 m5 m 1 m3 m5 m [mm] [mm] 9 0 10010 ISA3-H 1 m3 m5 m [mm] 29 0 30030 -19No.PS-OMR0001CN-J 2 ISA3-() ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 C(4 ) C(6 ) F(G ) H 13 13.6 19 ISA-14() -20No.PS-OMR0001CN-J 2 ISA3-(DIN ) ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 L2 62.5 125 162.5 200 237.5 275 L3 73 135.5 173 210.5 248 285.5

VQ1000V-OMV0001

M5 M5 M5 1/6~1/4 1~1.5Nm 5 No.VQ1000V-OMV0001 VQ1000/2000 VQ1000/2000 VQ1000/2000 VQ1000/2000 5 5 5 5 / / / / DC ( ( ( ( ) ) ) ) 1) 1) 1) 1) [ [ [ [ ] ] ] ] 1 ISO VG32 IP65 IP67IEC60529 IP65 IP67 (MSDS) [ [ [ [ ] ] ] ] 1 ISO VG32 11 ISO VG32 2 ISO VG32 2 6 No.VQ1000V-OMV0001 VQ1000/2000 VQ1000/2000 VQ1000/2000 VQ1000/2000 5 5 5 5 / / / / ( ( ( ( ) ) ) ) 3 30 ( ) 1 VG32 2 (