Stations: 5 Stations, Exhaust Style: 2 (Common Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: T (NPTF)

Stations: 10 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 02 (1/4 Individual Exhaust), Thread: T (NPTF)

Stations: 5 Stations, Exhaust Style: 2 (Common Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: F (G)

Stations: 20 Stations, Exhaust Style: 2 (Common Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: T (NPTF)

Stations: 6 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 02 (1/4 Individual Exhaust), Thread: T (NPTF)

Stations: 11 Stations, Exhaust Style: 2 (Common Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: N (NPT)

Stations: 14 Stations, Exhaust Style: 2 (Common Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: T (NPTF)

Stations: 14 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: T (NPTF)

Stations: 4 Stations, Exhaust Style: 2 (Common Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: F (G)

Stations: 16 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 02 (1/4 Individual Exhaust), Thread: N (NPT)

Stations: 16 Stations, Exhaust Style: 2 (Common Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: N (NPT)

Series VT 3port, direct operated poppet valves are compact in size, yet provide large flow capacity, and low power consumption.  The series is suitable for use in vacuum applications.  The VT valve is a single valve with 6 functions (universal porting type) such as N.C. valve, N.O. valve, divider valve, selector valve, etc.  The manifold style valve, series VO, can be easily converted from

Series AP500

) Sub-atmospheric (A): 100 mm Hg absolute to 10 psig (-88 kPa to 0.07 MPa) Delivery pressure Ports Option Code Ports 2 ports 3 ports Code Specification Standard Friction dampener6) High flow 7) Cv 2PW 3PWG 01 No code FI HF 0.06 Range options1) 02 06 10 0.1 0.5 to 30 psig (0.0034 to 0.2 MPa) 1 to 60 psig (0.007 to 0.4 MPa) 1 to 100 psig (0.007 to 0.7 MPa) Code Specification Standard Sub-atmospheric

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

M3 Port size With One-touch fitting AS M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 Thread type U10/32 01 02 03 04 ASP R Unified thread (10-32 UNF) Metric thread (M3, M5) Nil ASN N NPT AQ ASV Needle Valve/Flow Characteristics AK AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS2201F-01, AS2211F-01 AS2301F-01, AS2311F-01 AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 ASS Inlet pressure: 0.5

Table of Contents

-06 AS2200-01 AS2201F -01-08 AS2200-01 70% 100 SYJ 200 50 SX 100 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10% 30% 50% 70% 50% 30% 10% 0 0 200 CM2 25 400 MB 40 150 300 Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 AS2201F -02-08 AS2200-02 100 200 50 100 0

AN

ANA1-01 to 06 ANA1-06: PP How to Order ANA1-01 to 20 A1 03 AN Port size Symbol Port size Connection 01 1 8 02 1 4 03 3 8 04 1 2 Screw-in 06 3 4 1 4 10 1 12 1 1 2 1 14 20 2 Model (One-touch fitting connection) C08 (8 One-touch fittings size) Effective area (mm2) Weight (g) ANA1-C08 11 5 58 16 A B Dimensions (mm) Model One -touch fitting size 8 10 12 C10 (10 One-touch fittings size) One-touch

Dual Speed Controller with One-touch Fitting Series ASD 1

Weight (g) d T H D1 D2 D3 L1 L2 L3 Model 4 ASD230F-M5-04 9.3 29.4 12 17.5 12.9 25.5 28.6 25.8 10 9.6 7.8 11.7 M5 x 0.8 28.3 8 25 22.2 6 ASD230F-M5-06 11.6 32.5 13 13.7 20.6 6 34.6 ASD330F-01-06S 14 39.6 11.6 29 13.7 38.5 22.9 36.1 31.1 11.8 14.2 10.6 R 1/8 12 32.1 27.1 15.8 8 33.9 ASD330F-01-08S 38.9 15.2 31 18.5 44.8 28.2 6 ASD430F-02-06S 12.8 53 17 43.5 25.2 18 8 ASD430F-02-08S 36.7 41.7

AS

VCHC AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 AS1201F-M5-02, AS1211F-M5-02 AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS2201F-01, AS2211F-01 AS2301F-01, AS2311F-01 ASS Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa ASR ASQ Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Number of needle rotations Number of needle rotations Number of

NCQ8

Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 Clevis (1) RCS-015 RCS-02 RCS-03 RCS-04 RCS-05 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 Clevis (1) RCD-015 RCD-02 RCD-03 RCD-04 RCD-05 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2"), 250 (2-1/2") 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2

Speed Controller with

Note) The applicable cylinder bore sizes (mm) for AS1002F-02 are 2.5, 4, 6.