XLDV Series

M5 A 3(R) EXE H A mm Model A B C D E Fn Fd G H XLDV25 50 123 48 41.5 7.5 40 26 38.5 XLDV40 65 170 66 53.5 15.0 55 41 48.5 XLDV50 70 183 79 57.5 17.5 75 52 55.0 XLDV63 88 217 100 72.2 20.0 87 95 70 66.5 XLDV80 90 256 117 82.6 26.5 114 110 83 75.0 XLDV100 108 321 154 95.2 38.0 134 130 102 93.5 XLDV160 138 335 200 101.2 40.0 190 180 153 116.5 10 XL-OMM0005-A 6 Period and Scope of Warranty The

Guide Cylinder Series MGG

(Assuming approximately 30% dispersion) There may be the case to change substantially depending on an ambient environment. 4 4 4.5 5 6 6.5 6.5 7 8 10 9 10 10 11 D8 10 9 10 10 11 5 5 5.5 6 7 7.5 7.5 8 11 11 13 13 14 14 14 17 35 40 40 45 45 45 45 50 16 18 -X 8 10 9 10 10 11 Individual -X 387 Series MGG Auto Switch Mounting Bracket: Part No.

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

3 x 5 0 depth 10 (A, B, C common view) M5 x 0.8 thread depth 5 16 70 (76) Vacuum suction port 11 25 6 x M5 x 0.8 thread depth 10 (A, B, C common view) 2 4 5-0.03 0 5-0.03 0 12-0.05 0 Open: 37, Closed: 19 2 x M5 x 0.8 thread depth 10 (Thread for mounting attachment) 25 25 7 7 10 10 With Auto Switch: MDHR2-30R 11221122MDHR2-30E port location B 3 x M5 x 0.8 thread depth 10 P.C.D.43 (Mounting

Fieldbus System

C3: 3.2 (SMC) C4: 4 (SMC) C6: 6 (SMC) N1: 1/8" (SMC) N3: 5/32" (SMC) N7: 1/4" (SMC) M5: M5 thread n: Stations (Maximum 24 stations) n L L1 L2 L3 L4 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 55.5 66 76.5 87 97.5 108 118.5 129 139.5 150 160.5 171 181.5 192 202.5 213 223.5 234 244.5 255 265.5 276 286.5 297 104.2 114.7 125.2 135.7 146.2 156.7 167.2 177.7 188.2 198.7 209.2

AR20-B to AR60-B

*10 *10 *10 *10 *10 *7 For pipe thread type: NPT.

Short Stroke Electric Actuator Series LX

distance (mm) Positioning distance (mm) 100 100 50 10 1 50 10 1 10 10 10 10.1 5.1 1.1 0.2 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 2.6 40 40 2.6 1.3 0.3 0.1 1.3 0.3 0.1 1.3 80 80 1.3 0.7 0.2 0.1 0.7 0.2 0.1 Refer to page 303 for acceleration time. 213 Direct Acting Guide 5 Phase Stepper Motor Low Profile Slide Table Type Ball Screw Series LXF Without Motor Brake 8mm/6mm lead How to Order LXFH5

Precision Clean Regulator

size 41 IN OUT A B C D Model Port size SRP111-M5 M5 x 0.8 14 23.5 30 30 C D SRP111-01 Rc 1/8 15 22.5 40 40 873 SRP Series Made to Order Specifications: Please contact SMC for detailed dimensions, specifications and lead times.

Miniature Regulator Series ARJ210

M5 x 0.8 6 3.5 15.5 50 17.2 ARJ1020F-M5-06 22 12.8 6 VY1 Manifold Base (Option)/Dimensions G PPA 2-3.5 (Mounting hole) 31 (ARJ1020F-M5-04) 32 (ARJ1020F-M5-06) AL Applicable tubing O.D. 4, 6 (Mounting hole) IN (Common) Stations Manifold base part no. 4 6 10 B dimension A dimension 90 130 210 82 122 202 ARJM10-4 ARJM10-6 ARJM10-10 14-4-5 Miniature Regulator Series ARJ310 F.R.L.

pa

40 VDW Air consumption 100 l/min (ANR) Air consumption 200 l/min (ANR) 30 30 Air consumption 100 l/min (ANR) Air consumption 50 l/min (ANR) VQ 20 SUP = 0.2 MPa 20 SUP = 0.2 MPa VX2 10 10 VX 0 0 10 30 40 50 20 60 VX3 10 20 Discharge rate (l/min) Discharge rate (l /min) VXA Selection from Flow Characteristic Graph (PA3000) VN Required specifications example: Find the pilot air pressure and

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Applicable bore size TC TDH10 TH TK TN TT TU TV TW TX TY TZ CJ-CF016 CJ-CR016 16 10 12 15 M5 x 0.8 7 12 10 CJ-T010C 10 4.5 3.3+0.048 0 29 18 3.1 2 9 40 22 32 12 8 CJ-T016C 16 5.5 5+0.048 0 35 20 6.4 2.3 14 48 28 38 16 10 * A T-bracket includes a T-bracket base, single knuckle joint, hexagon socket head bolt and spring washer. * For dimensions of (U) and (S + Stroke), refer to the double

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

XMH-16-XN1A : Produced by Mitsubishi Cable Industries, Ltd. 11 Series XMH, XYH Specifications XMH-25 XYH-25 XMH-40 XYH-40 XMH-50 XYH-50 XMH-16 Model Flange (valve) size 16, CF034 25 40, CF070 50 Valve type Manual type Fluid Inactive gas under vacuum Operating temperature C 5 to 150 Atmospheric pressure to 1 x 10-6 Operating pressure Pa Conductance l/s Note 1) 5 14 45 80 1.3 x 10-10{1 x 10

XM, XY

FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Changed part Note 2) Symbol Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 External 1.3 x 10-11 (FKM) 1.3 x 10-9 w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 Note 1) Values at ambient temperatures, excluding gas permeation.

45

Dimensions Applicable fittings fitting d Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" 4 4 148 L dimension 0 98 1 110.5 2 123 3 135.5 No. 5 160.5 6 173 7 185.5 8 198 9 210.5 10 223 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 L dimension 11 No. 235.5 12 248 13 260.5 14 273 15 285.5 16 298 17 310.5 18

Series VCL

81.5 36.5 11 15 32 20 19 M5 8 1/4, 3/8 VCL31 104 24 25 59 46 57 60 54.5 48.5 101 57 68 30 50 84 36.5 13.5 15 32 25 23 M5 8 1/2 107 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 22 45 89 41 11 17 36 22.5 23 M5 8 1/4, 3/8 VCL41 111.5 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 30 50 93.5 41 13.5 17 36 25 23 M5 8 1/2 119 26 26.5 70 48 68 62 65.5 50.5 103 68 70 35 60 101 41 17.5 17 36 30 28.2

E-MY2B_E_A

Heavy load Standard load Midium load Light load 1 10 50 100 1 0.25 0.49 0.98 1.96 2 20 75 200 2 0.49 0.74 1.47 2.94 3 30 100 300 3 0.74 0.98 1.96 3.92 4 40 125 400 4 0.98 1.23 2.45 4.90 5 50 150 500 5 1.23 1.47 2.94 5.88 6 75 200 600 6 1.47 1.96 3.92 7.84 7 100 250 700 7 1.72 2.45 4.90 9.80 8 300 300 800 8 1.96 2.94 5.88 11.76 9 500 500 900 9 2.21 3.92 7.84 15.68 10 1000 1000 1000 10 2.45

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Set the mounting band perpendicularly to cylinder tube. 20 50 63 80 100 25 32 40 D-B7/B80 8 10 9 10 10 11 D-B73C/B80C D-C7/C80 8 10 9 10 10 11 D-C73C/C80C 8 10 9 10 10 11 D-B5/B64 11 11 MX Mounting correctly Mounting incorrectly 13 13 14 14 14 17 D-B59W 18 16 D-G79/K79 8 10 9 10 10 11 Auto Switch Mounting Bracket Part No.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

R 1/ 4NPT 1/4G 1/ 4 (with M5 male thread) URJ 1/4TSJ 1/ 4 Port size Leak rate 1 x 10 -5Pa. m 3/ s 1 x 10 -10Pam3/s 1MPa 1MPa 100kPa 100kPa Rated pressure range 0 0 0 0 -100kPa -100kPa Output Switch output 2 outputs NPN or PNP Analog output Output voltage 1 to 5V Features 2 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 How to Order M ISE50 02 22 L For positive

Soft Start-up Valve

of the rated voltage 12V 10% of the rated voltage 100V 10% of the rated voltage Allowable voltage fluctuation 10% of the rated voltage 110V *1 [115V] [-15% to +5% of the rated voltage] AC 200V 10% of the rated voltage 220V *1 [230V] 10% of the rated voltage [-15% to +5% of the rated voltage] Power consumption [W] DC 0.35 (With light: 0.4) 0.35 (With light: 0.45) With light: 0.4 100V 0.78

Slide Tables MX Series

Bolt used Max. tightening torqueN.m{kgf.cm} l mm Model MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 10.5 12.5 16 21 26 32 1.2{12.2} 1.2{12.2} 2.8{28.6} 5.7{58.1} 5.7{58.1} 10{100} M3 x 0.5 M3 x 0.5 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 3. Top body tapped A hand can be caught by an adjuster option.

IZx-OMT0049

A IZT4-16 2 160 4 13 IZT4-22 3 220 6 13 Metric IZT4-34 5 340 8 15 IZT4-40 6 400 10 22 IZT4-46 7 460 3/16" 15 1/4" 14 IZT4-58 9 580 Inch 5/16" 15 IZT4-64 10 640 3/8" 23 IZT4-82 13 820 Elbow (mm) IZT4-112 18 1120 Applicable tube O.D.