ASD

Metric size Inch size With One-touch fitting 04 06 08 10 12 01 03 05 07 09 11 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 Flow

Nozzle Diameter: 05 (ø0.5mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 01 (Screw-in Rc 1/8), VAC: 01 (Screw-in Rc 1/8), EXH: 01 (Screw-in Rc 1/8)

Nozzle Diameter: 05 (ø0.5mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 01 (Screw-in Rc 1/8), VAC: 01 (Screw-in Rc 1/8), EXH: 01 (Screw-in Rc 1/8), Accessories: N (w/o Bracket, w/o Silencer)

Nozzle Diameter: 05 (ø0.5mm), Vacuum Pressure: S (-90 kPa), SUP: 01 (Screw-in Rc 1/8), VAC: 01 (Screw-in Rc 1/8), EXH: 01 (Screw-in Rc 1/8)

Nozzle Diameter: 05 (ø0.5mm), Vacuum Pressure: S (-90 kPa), SUP: 01 (Screw-in Rc 1/8), VAC: 01 (Screw-in Rc 1/8), EXH: 01 (Screw-in Rc 1/8), Accessories: N (w/o Bracket, w/o Silencer)

LFE-OMZ0013

Indication and How to Order 9 Summary of Product Parts 10 Definition and Terminology 11 Mounting and Installation 13 Installation 13 Wiring 14 Setting the Detected Flow Rate 17 Function Setting 19 Default Setting 19 F 0 Selection of sensor 21 F 1 Setting of OUT1 22 F 2 Setting of OUT2 30 F 3 Response Time 36 F10 Sub screen display 37 F20 External input 41 F22 Analogue Output in free range 42

Multi-channel Digital Sensor Monitor

(Linked to OUT1) Other parameter settings Item Page Default setting [F 3] Digital filter setting Page 42 0.00 sec.

MLGC

BA -02 BA -32 BA -04 BM1 -01 BM1 -02 BM1 -32 BM1 -04 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

mA), 0.5 W DC (21 mA) (4) 24 VDC Power consumption (Current) 1 W DC (83 mA), 0.5 W DC (42 mA) (4) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 12 VDC Metal seal Rubber seal Note 1) Use dry air to prevent condensation when operating at low temperatures.

Digital Pressure Switch ( compatible)

ZS-46-B Rear piping Panel mount adapter ZS-35-B Bottom piping ZS-46-D Rear piping Panel mount adapter + Front protective cover ZS-35-E Bottom piping Lead wire with connector ZS-46-5F 5 cores, 2 m, waterproof ZS-27-01 Rear piping Front protective cover ZS-35-01 Bottom piping -10No.PS-OMX0002-A Summary of Product parts Names of individual parts Operation light: Displays the switch operating

60

SUP. 3 1 2 3 1 2 3 1 2 E Padlock mounting position D C SUP J 2 2 x K A T IN OUT AA 3 L 2 x P1 (Port size) B V BB U Built-in silencer (Option) M (Width across flats) 3 N P2 (Port size) Q EXH Y Bracket (Option) R S X W Dimensions (mm) Standard specifications Model P1 P2 A B C D E F G H I J K L M 1/8, 1/4 1/4, 3/8 1/8 1/4 3/8 1/2 1/2 66.4 80.3 104.9 110.4 134.3 22.3 29.4 38.5 42 53 40 53 70

MLGC

BA -02 BA -32 BA -04 BM1 -01 BM1 -02 BM1 -32 BM1 -04 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

HRX-OM-T004

(Request)[STX] 01WLOC01 [ETX] [26h] (Response)[STX] 01[ACK] [ETX] [06h] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address W Request message to write [ACK] Normal response message LOC Key-lock setting [06h] BCC value 01 Read information (01All locked) [26h] BCC value 5.8 Command explanation HRS090 Series 5-20 HRX-OM-T004 Chapter 5 Simple communication

HRX-OM-R028

(Request)[STX] 01WLOC01 [ETX] [26h] (Response)[STX] 01[ACK] [ETX] [06h] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address W Request message to write [ACK] Normal response message LOC Key-lock setting [06h] BCC value 01 Read information (01All locked) [26h] BCC value 5.8 Command explanation HRSH Series 5-20 HRX-OM-R028 Chapter 5 Simple communication

HRX-OM-M091

(Request)[STX] 01WSV100258 [ETX] [5Ch] (Response)[STX] 01[ACK] [ETX] [06h] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address W Request message to write [ACK] Normal response message SV1 Circulating fluid set temperature [06h] BCC value 00258 Write information (25.8 oC) [5Ch] BCC value 5.8 Command explanation HRS Series 5-18 HRX-OM-M091 Chapter

HRX-OM-Q033

(Request)[STX] 01WLOC01 [ETX] [26h] (Response)[STX] 01[ACK] [ETX] [06h] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address W Request message to write [ACK] Normal response message LOC Key-lock setting [06h] BCC value 01 Read information (01All locked) [26h] BCC value 5.8 Command explanation HRSH Series 5-20 HRX-OM-Q033 Chapter 5 Simple communication

HRX-OM-S010

(Request)[STX] 01WLOC01 [ETX] [26h] (Response)[STX] 01[ACK] [ETX] [06h] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address W Request message to write [ACK] Normal response message LOC Key-lock setting [06h] BCC value 01 Read information (01All locked) [26h] BCC value 5.8 Command explanation HRS100/150 Series 5-20 HRX-OM-S010 Chapter 5 Simple communication

DOC1023125

Interrupting operation Item . 42 - . Procedure for power set up ..

LEF-OM006xx

OUT -42- No. No. PLC /P25 1) No. OUT 3 INP INP LEFS 0.5 LEFB 1 4 1INP BUSYOFF 5 6 7 () 1 / EMG SVREOFF 2 /CN1 BK RLS DC24V(+) /P34 5.6 8 1 , , EMG SYREOFF /P911 2.1.

MHY2/MHW2

MHC2 Installation MHT2 0 01 MHW MHW2-50 MHY2 Warning Warning MHW2 When using right angle finger tap mounting type, pay attention the interference of bolt and speed controller. When using speed controller with One-touch fitting, use AS22 or AS23. If AS32 or AS33 is used, the finger interferes with speed controller as figure shown below. It causes malfunction.