LX

bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12 With brake 274 CE Marking _ Page 282 Made to Order AC servomotor specification _ 288 Low particulate generation specification _ 294 Construction

LX

LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

13 14 50 8 58 37 35 15 220 225 55 15 15 25 to 1400 63 M12 x 1.5 90 98 63 15 42 19 14 43 35 1/2 52 163 15 18 60 10 65 45 42 18 240 247 65 15 20 25 to 1500 1/4 stroke 80 M16 x 1.5 110 118 80 17 40 22 16 44 44 3/4 65 184 18 18 72 12 87 50 50 20 269 284 80 17 20 25 to 1800 100 M18 x 1.5 135 150 102 19 42 22 18 44 44 3/4 75 192 20 22 85 12 109 55 55 23 287 302 100 19 15 25 to 1800 Rod series

ISO Standard Hydraulic Cylinder

23 25 14 35 7 1/4 60 45 33.2 M6 x 1 7.5 M14 x 1.5 56 5.5 153.5 30 12 43 103 128 40 25 to 800 22 19 51 22 12 32 25 19 37 3/8 62 63 41.7 10 73 6.5 185 9 34 18 47 128 153 M8 x 1 M16 x 1.5 D50 25 to 800 28 25 57 28 9 33 25 24 42 1/2 67 75 52.3 12 74 7 199 11 42 18 53 134 159 M12 x 1.25 M20 x 1.5 63 36 25 to 800 32 55 36 13 33 32 30 39 1/2 71 90 64.3 12 80 12 216 13 50 17 68 136 168 M12 x 1.25

Air Cylinder Series MB

, 16) 75 + 40 (n 4) 2 (n = 4, 8, 12, 16) 80 + 40 (n 4) 2 (n = 4, 8, 12, 16) 85 + 40 (n 4) 2 (n = 4, 8, 12, 16) 95 + 40 (n 4) 2 (n = 4, 8, 12, 16) 100 + 40 (n 4) 2 (n = 4, 8, 12, 16) n 2 (Different surfaces, same surface) 1 45 55 60 70 75 50 D-A9V 45 + 30 (n 4) 2 (n = 4, 8, 12, 16) 50 + 30 (n 4) 2 (n = 4, 8, 12, 16) 55 + 30 (n 4) 2 (n = 4, 8, 12, 16) 60 + 30 (n 4) 2 (n = 4, 8, 12,

2 Phase Stepper Motor/Without Motor Brake Series LXP

Positioning driver Model Operating Conditions Plate non-rotating accuracy () Allowable plate rotation torque (T) Allowable lateral load (F) Non-rotating accuracy () Stroke 50 75 100 125 150 175 200 Load (N) Stroke 50 75 100 125 150 175 200 Torque (Nm) 42 2.87 0.09 42 2.47 40 2.17 + 42 2.38 32 2.16 24 1.98 17 1.82 F T F Refer to page 304 for deflection data. 218 2 Phase Stepper Motor/Without

LVQ

Type of fitting Tubing size Symbol Nil 1 Symbol 03 04 05 06 07 06 08 10 07 11 Symbol 10 12 11 13 12 13 19 19 25 Tubing O.D. 1/8" (3) 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" Tubing O.D. 10 12 3/8" 1/2" 12 1/2" 3/4", 19 3/4", 19 1", 25 Applicable fitting LQ2 LQ1 Body class Applicable fitting Body class Applicable fitting 4 LQ1, LQ2 2 LQ1 LQ2 Body class Symbol 2 3 4 5 6 LQ1 LQ2 Applicable fitting Body

C85

12 16 20 d7 11 11 13 13 16 19 l3 10 10 10 10 12 14 Bore Model Thread e M4 x 0.7 M4 x 0.7 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.25 b d 16 16 24 24 32 40 0 8 10 12 16 20 25 8 10 12 16 20 25 KJ4D KJ4D KJ6D KJ6D KJ8D KJ10D GKM4-8 GKM4-8 GKM6-12 GKM6-12 GKM8-16 GKM10-20 8 8 12 12 16 20 6 6 8 8 10 12 8 8 12 12 16 20 8 8 10 10 12 18 5 5 6 6 8 10 4 4 6 6 8 10 6.0 8 8 9 9 12 14 7.5 7.5 6.5 6.5 13 13 4

C85

e M4 x 0.7 M4 x 0.7 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.25 b d 16 16 24 24 32 40 0 8 10 12 16 20 25 8 10 12 16 20 25 KJ4D KJ4D KJ6D KJ6D KJ8D KJ10D GKM4-8 GKM4-8 GKM6-12 GKM6-12 GKM8-16 GKM10-20 8 8 12 12 16 20 6 6 8 8 10 12 8 8 12 12 16 20 8 8 10 10 12 18 5 5 6 6 8 10 4 4 6 6 8 10 6.0 8 8 9 9 12 14 7.5 7.5 6.5 6.5 13 13 4 4 6 6 8 10 6.0 6.75 6.75 9 10.5 Floating joint: Series JA In the case

CJ2

CJ-CF006 CJ-CR006 M3 x 0.5 6 6 8 11 8 5 6 10 CJ-T010B CJ-CF010 CJ-CR010 3.3 M4 x 0.7 10 8 10 13 10 6 8 29 2 9 4.5 3.1 18 40 22 32 12 8 +0.048 0 16 CJ-T016B CJ-CF016 CJ-CR016 5 M5 x 0.8 16 10 12 15 7 12 10 35 14 5.5 6.4 2.3 20 48 28 38 16 10 +0.048 0 6-3-11 12 12 Series CJ2 Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height Auto switch Solid state switch

ISO Cylinder

GKM6-12 6 12 24 6 12 10 18 M6 x 1 31 16 GKM6-12 6 12 24 6 12 10 18 M6 x 1 31 20 GKM8-16 8 16 32 8 16 14 23 M8 x 1.25 42 25 GKM10-20 10 20 40 10 20 18 27 M10 x 1.25 52 Bore size Part no. b1 b3 dH7 d6 d7 h l l3 d3 a 8 KJ4D 8 6.0 5 18 11 27 10 10 M4 x 0.7 13 10 KJ4D 8 6.0 5 18 11 27 10 10 M4 x 0.7 13 12 KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 16 KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 20 KJ8D

Fluoropolymer Piping Equipment

LQ1E41-R2 12 8 6 9 9 24 20 21 17 43 38.5 28 23 5.5 LQ1E41-R3 12 6 15 14 35.5 31.5 16.5 3.6 25 LQ1E41-R4 12 4 2.6 M1 LQ1E51-R2 19 10 39.5 20 36 17 56.5 52.5 49 23 7.4 46 LQ1E51-R3 19 8 54 47.5 5.5 12 H1 10 LQ1E51-R4 19 6 39.5 15 36 14 51 42 39 16.5 3.6 32 LQ1E51-R5 19 4 2.6 LQ1E61-R2 25 12 24 21 56.5 52.5 28 9.4 46 LQ1E61-R3 25 10 20 17 54 47.5 23 7.4 A side 39.5 36 49 LQ1E61-R4

Compact Cylinder Series CQS

V Solid state switch Reed switch 12 V IC circuit Diagnostic indication (2-color indication) 5 V, 12 V Relay, PLC Yes Grommet 24 V 12 V IC circuit Water resistant (2-color indication) 5 V, 12 V 12 V 3-wire (NPN equivalent) A96 A96V IC circuit 5 V Yes 24 V Grommet A93 A90 A93V A90V 100 V Relay, PLC 2-wire 12 V No 100 V or less IC circuit DSolid state auto switches marked with are produced

CQS

auto switch A 40.5 41.5 51 57.5 Bore size (mm) Stroke range (mm) B 22 22 29.5 32.5 B 17 17 19.5 22.5 CL 39.5 40.5 52 57.5 CL 34.5 35.5 42 47.5 CD hole H10 Rod d9 12 16 20 25 5, 10 Bore size (mm) L + Stroke B + Stroke CL + 2 (Stroke) RR CB CD CT CU CW CX CZ L L1 A + 2 (Stroke) 12 16 20 25 14 15.5 18.5 22.5 6 6 9 10 12 14 20 24 5 5 8 10 4 4 5 5 7 10 12 14 14 15 18 20 5 6.5 8 10 10 12 16 20

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

R S 70 32A 173.6 67.5 42 160 21 51.5 135 12 100 36 80 40A 179.3 70 42 170 21 54.5 140 14 105 42 90 50A 192.3 77.5 42 180 21 59 155 14 120 52 Specific Product Precautions Size Applicable flange Grommet Grommet with PCB Conduit DIN terminal DIN terminal without connector M12 connector T U T U T U T U V T U T U 70 32A 68.4 31.1 74.1 41 75.7 51.9 77.2 58.3 70 77.2 34.3 76 44.1 80 40A 71.6 31.1

Free Mount Cylinder

(mm) DQ HQ HP 2.6 19.5 36.5 4.8 19.5 36.5 7 19.5 36.5 9 19.5 36.5 7 20.5 37.5 9 20.5 37.5 ZPT-B4 ZC(D)UKC10 ZC(D)UKQ10 DQ HQ HP 18 29 50 15 27.5 48.5 12 25 46 9 20.5 42.5 7 20.5 42.5 18 25 46 12 24 45 18 21.5 42.5 15 21 42 12 21 44 9 19.5 41.5 DQ HQ HP 7 19.5 41.5 2.6 19.5 41.5 4.8 19.5 41.5 ZPT-B5 ZC(D)UKC16 ZC(D)UKQ16 12 21 44 15 21 44 18 21.5 44.5 23 23 46 28 23 46 35 23.5 46.5 12 24 47

IZx-OMT0049

Minimum bending radius: Power supply cable: 40 mm (IZT40/41/42) Power supply cable: 48 mm (IZT41-L/42-L) Communication cable: 40 mm (IZT41-L/42-L) Separate cable: 40 mm High voltage cable: 30 mm Separate cable is optional. 1) Power supply cable (IZT40/41/42) For IZT41-L/42-L, refer to the IO-Link dedicated instruction manual.

Passage: 20 (Common SUP,Common EXH), Stations: 12 Stations, Thread: 00N (NPT)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: 40 (Common SUP, Common EXH, Bottom Ported), Stations: 12 Stations, Port Size: M5 (M5X0.8)

Passage: Common SUP,Common EXH, Stations: 12 Stations, Thread: NPT