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dE, Lr MM R, v, dND NX NZ 0 4 7 + 0 0 0 3 1 0 6 M 1 8 x 1 5 2 3 6 1 0 6 1 1 0 1 5 0 v v v + 0 m 3 q (16j3i) 50mfr Y-O5A (38) (27) ( 1 2 + 0 0 7 0 ) (1 5) (27] (60) (28) 0 6 3 o 0 1 2 o @39 3ir ( 1 6 1 5 0 0 4 7 + 0 0 0 3 1 0 6 1 1 0 M 1 8 x 1 5 0.59 1 0 6 236 63mr Y-O5A (27\ (28) (1 5) (27\ ( 1 2 + 0 0 7 0 ) (38) (60) 0 6 3 a o 1 2 0 @39 M22x1 5 o75 1 1 0 0 7 1 + 0 0 0 3 2 1 7 1 4 6 1 4 2

Aluminum High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

Programless Controller Series LECP1

1 !2 t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 Switch the mode between manual and auto. Mode swith !3 !4 Stop position, the value set by i and alarm information are displayed. 7-segment LED SET Decide the settings or drive operation in Manual mode. Set button Position selecting switch Assign the position to drive (1 to 14), and the origin position (15).

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Body Material Aluminum Body Material Brass A A 2 x J 4 x J A A 2 x J 4 x J B C F B B C F B 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 C F C D E D E F D E D E Body Material: Aluminum [mm] Body Material: Brass [mm] Size Port size A B C D E F J 20 1/8, 1/4 11 36 6 34 46 1.5 5.3 30 1/4, 3/8 13 46 7 40 56 1.5 Size Port size A B C D E F J 20 1/8 52 24 9 36 64 1.5 6 20, 30 1/4, 3/8

Electric Grippers

1 !2 !4 q u w e r t !7 Component Parts No.

SMC Pneumatic Clean Series

13 7 7 7 5 4 4 1/4 1/8 1/8 163 131 129 26-0.033 0 17.5 35.5 32-0.039 0 10 8 M32 x 2 82 36 21.5 41.5 20 Air Cylinder CM2 2122CM2/ 1011Specific Product Precautions Be sure to read before handling.

Series VQ Base Mounted Metal Seal/Rubber Seal

VQ 1 1 1 0 Y 5 LO (Example) Series Manual override D-sub connector kit with 3m cable VV5Q12-08C6FU2-D VQ1110-5LO VQ1210-5LO VQ1310-5LO VVQ1000-10A-1 VQ0 0 1 B C 1 setManifold base No. 4 setsValve No. (Stations 1 to 4) 4 setsValve No. (Stations 5 to 8) 2 setsValve No. (Stations 7 to 8) 1 setBlank plate No.

Digital Flow Switches

Terminal block numbers 5 6 7 8 4 3 2 1 The applicable panel thickness is 1 to 3.2 mm.

Air Cylinder

1 !7 ! With auto switch 10, 16 r e o u i w y t !6 !5 !3 !4 !0 !2 !1 !7 ! With auto switch Single acting, Spring extend 6 r o u i e w y t !6 !5 !8 !1 !0 !2 !4 !3 !7 ! ! With auto switch 10, 16 r o u i e w y t !6 !5 !0 !2 !3 !4 !7 !8 !1 ! With auto switch Component Parts No.

Cylinder with Lock

1 !3 io@1!4w@2 !8q@3$1@5@8$2#8#5@7#1@4@9#7 #0$0 !5!6 er uy t !9 #4@6!7!2 #6 #3#2#9 $3 80, 100 Component Parts Component Parts No. Description Material Qty.

HRX-OM-Z002

for use . 1-6 1.5.2 Personal protective equipment . 1-6 1.6 EMERGENCY MEASURES . 1-7 1.7 WASTE DISPOSAL . 1-7 1.7.1 Disposal of refrigerant and compressor oil. 1-7 1.7.2 Disposal of the product . 1-7 1.8 SAFETY DATA SHEETSDS . 1-8 Chapter 2 Names and Functions of Parts . 2-1 2.1 NAME OF EACH PART . 2-1 2.1.1 HRLE050-A-20-(In case of Air-cooled refrigeration) . 2-1 2.1.2 HRLE050-W-20-(In

JXCx-OMY0004

Turn ON when transmitting numerical data to the controller. (7, 8, 9) 4 0 Start flag 1-7. (Unused) Set always OFF(0) 5 0-1. Movement mode 1: ABS (Absolute) 2: INC (Relative) (7, 10) 2-7.

Vacuum

20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gom serles zPR

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

Note 3)The actual mounting position should be adjusted after confirming the auto switch performance. 5 5 3 5 5 3 5.5 5 4.5 2.5 5.5 5 4.5 2.5 1 3 3 1 3 3 1 3.5 3.5 2.5 0.5 3.5 3.5 2.5 0.5 1 3 1 5 5 3 5 5 3 5.5 5 4.5 2.5 5.5 5 4.5 2.5 1 7 7 5 1 7 7 5 7.5 7 6.5 4.5 7.5 7 6.5 4.5 MHS-16D MHS-20D MHS-25D MHSL3-16D MHSL3-20D MHSL3-25D MHS-32D MHS-

Basic Type/Direct Mount Type

LD 3.5 4.3 5.4 5.4 7 7 8.6 8.6 T 17.5 19 20.5 21.5 24 26 30 32 X 15 18 22 28 35 40 50 60 M 4 5 5 6 7 8 10 10 TC 14 17 20 22.5 28 33 42 48 Y 39.5 54.5 64 72 79 93 113 121 MM M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 W 20 25 40 40 50 60 60 70 Z 76 94 107 117 130 148 176 188 N 4.5 6 7 6.5 8.5 11 15 16 WP 13 16 19 21.5 27 32 41 47 WS 8 7 7 7 7 7 10 10 PW 26 32 38

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(Stations 1 to 2) 4 setsValve part no. (Stations 3 to 6) 1 setValve part no. (Station 7) 1 setBlanking plate part no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(Stations 1 to 2) 4 setsValve part no. (Stations 3 to 6) 1 setValve part no. (Station 7) 1 setBlanking plate part no.

Vacuum

20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gomp serles zPR

Electric Slide Tables

7 i y r w e #0 @9 @7 @8 @2 @0 u D A A D C-C D-D B-B @5 @4 !9 !1 !5 #1 q C B C B !4 !2 !0 !8 @1 !6 t o @3 @6 !3 Component Parts No. Description Material Note 1 2 3 4 5 6 7 8 9 No.

Rotary Table/Rack & Pinion Style Series MSQ

7 !8 u @0 q @1 !2 !1 CRQ2 !8 !7 MSQ MSZ CRQ2X MSQX MRQ MSQAA (High precision type) !9 e r Component Parts Note Anodized Anodized Chromated No.