2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

Operating pressure MPa (psi) 0.2 to 0.6 (29 to 87) 10 to 60C (14 to 140F) Ambient and fluid temperature 0.01 (0.0004in) Repeatability mm 60 Max. operating frequency c.p.m. 120 Non-lube Lubrication Double acting Action External gripping force Internal gripping force Note 1) Effective gripping force N (lbf) at pressure of 0.5MPa (72psi) 63 (14.1) 177 (39.8) 111 (25.0) 280 (62.9) 502 (112.8) 37

Angular Air Gripper Series MHC2/MHCA2/MHCM2

DC (+) Brown 0.5 7 7 6 Lead wire length (m) 3 37 37 31 Switch main circuit OUT Black 5 61 61 51 DC () Blue Auto Switch Dimensions D-F9 Mounting screw M2.5 x 4l D-F9P, F9PV Slotted set screw 2 DC (+) Brown Indicator light Switch main circuit 2.7 2.8 22 OUT Black 2.6 4 DC () Blue Most sensitive position 6 D-F9B, F9BV OUT (+) Brown D-F9V Mounting screw M2.5 x 4l Slotted set screw 4.3 Switch

Regulator for 2 MPa ARX 20

Piston assembly Valve Valve spring No. 4 5 6 1348104A 1348105 1348109 SUP OUT 2 ARX 20 Dimensions Panel cutout dimensions 26 R2.5 SUP OUT SMC K C O P A A L U S H 12 37 54 25 1.6 (max. thickness 4.5) 44 79.5 (when regulating pressure = 82) 5.4 10 31.5 OUT OUT 35 Options Bracket Panel nut Material 1348110A POM, NBR (gasket) Material 1348112 SPCC (black zinc chromated) Part No. Part No.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12 R 1/8 14.3 33.4 18 18 19.4 26.3 12.8 35.6 20 20 21.9 28.5 15.2 37

Hydraulic Cylinders

MA B D-F9BAL A Proper auto switch mounting positions (mm) 32 to 100 D-Z7, D-Z8, D-Y5 D-Y, D-Y7 D-Y7V, D-Y7WV D-Y7BAL B Bore size (mm) D-Z7 D-Z8 D-Y5 D-Y7 D-Y7W A 10 12 13 16.5 18.5 26.5 B 16.5 18.5 22.5 26 35 44.5 32 40 50 63 80 100 A B D-Y6 D-Y7V D-Y7WV Auto switch mounting heights (mm) SMC D-Y7BAL Bore size (mm) SMC MA 32 40 50 63 80 100 32.5 37 43 51.5 62 74.5 Approx.

Modular Type Filter Regulator Series AW

gauge Metal bowl Optional specifications B B B B B N.O.: Black N.C.: Gray M5 x 0.8 Barb fitting Applicable tubing: T0604 B B O S 1/4 10 One-touch fitting Width across flats 17 O S Port size Standard specification Accessory specification With pressure gauge Bracket mounting size Panel mount With auto drain Model B 177 242 278 278 Z 6 7 7 7 Y 14 19 21 21 W 28.5 38.5 42.5 42.5 V 30 31 35.5 37

e-Rodless Actuator

(A clearance of 40 or more is required.) 60 (96.7) (60) (49.6) 110.8 35.5 132.2 94 96.7 35.5 Motor 100 60 102 60 42 170 163 108.7 67 22.2 Controller 60 34 31.8 48.7 4-9.5 counterbore depth 5.4 5.5 through 19.5 FG terminal M3 Workpiece mounting center line 5 15.5 5 7 4-M5 x 0.8 depth 9 7.1 (Max. 10.1) 17.5 37 (51.8) 87.3 T-slot section for mounting 198 + Stroke 6 8.5 5.3 3 Motor position TA

Series H, DL, L, LL Self-align Fittings

Thread Rc(PT) L1 L2 M 1 4 1 4 3 8 1 4 1 4 1 4 4 DHF04-02 27 DHF06-02 17 17 10 4 15 30.3 30.8 16 16.5 28 6 11 16 12 DHF06-03 31 19 32.8 18.5 8 DHF08-02 29.8 30 16 20 14 17 15.5 10 12 DHF10-02 30.8 37 DHF12-02 30.8 17 17 40 17 19 34 51 17 17 16.5 16.5 104 Series H, DL, L, LL Self-align Fittings Branch tee: DT Thread R(PT) Part No. Effective orifice (mm2) Applicable tube O.D.

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

Elbow: KPQL, KPGL Applicable tubing (M5) Effective area mm D1 Model L1 TPH TPS A H (width across flats) (M5) Applicable tubing O.D. mm Connection threads R Note 1) Weight g D2 M L2 L M M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGL04-M5 KPGL04-01 KPGL04-02 KPGL06-M5 KPGL06-01 KPGL06-02 KPGL08-01 KPGL08-02 KPGL10-02 KPGL10-03 KPGL12-03 KPGL12-04 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37

S Couplers Series KK/KK13

Stainless steel FPM NBR NBR Stainless steel Stainless steel NBR Brass NBR Electroless nickel plated Electroless nickel plated 4 Series KK Dimensions/Plug (P) Male thread type A T L H L (mm) T Connection male thread Weight g Effective area mm L Min. bore A Body size H Width across flats Model L KK3P-01MS R 1/8 8.4 26.4 30.4 10 1/8 18.4 -02MS R 1/4 22.6 14.2 27.4 33.4 6 KK4P-01MS R 1/8 17 33 37

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

45 NC 21 26 32 NE 64 80 96 NH 28 37 48 NW 60 74 94 09 11 14 09.5 16.0 15.0 M8 x 1.25 M10 x 1.5 PA PG 7 8 9 Bore size (mm) 25 32 40 P Rc 1/8 Rc 1/8 Rc 1/4 SS 5.1 4.0 9.0 PB 112 134 150 PP1 12.7 15.5 17.5 PP2 12.7 18.5 20 Q 206 264 322 QQ 16 16 26 QW 46 60 72 RR1 18.9 22.0 RR2 17.9 24.0 TT 15.5 21.0 26.0 UU 16 16 21 VV 16 19 23 W 122 144 160 WW 11 13 20 YW 070 088 104 Z 240 300 360 60 80 100

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Width across flats 6 13.5 6 2-M4 x 0.7 Prepared hole dia. 3.3 4-M3 x 0.5 depth 3 17 0.05 Mounting reference planes B D Stroke: S M 2 M4 x 0.7 J 3 Z Max. 9.5 (rubber stopper) Max. 10.5 (metal stopper) 2.4 Piping port 2-M3 x 0.5 Without magnet and switch rail 2 12 2-M2 x 0.4 depth 2.2 For rail mounting (mm) F Model H J M S Z AA 12 2-M2 x 0.4 depth 3 For magnet mounting MXP65 25 38 33.5 37

Mechanical Joint Rodless Cylinder/Basic type Series MY3A/3B

54 MY1B 116 37 54 84 Weight Up to 53% reduction Overall length(Z+Stroke) Z dimension Weight (mm) (kg) Series Series 16 25 40 63 16 25 40 63 MY3A MY3B MY1B MY3A MY3B MY1B 110 150 240 320 0.34 0.87 2.95 8.26 122 178 276 356 0.35 0.97 3.08 8.99 160 220 340 460 0.73 1.57 4.41 14.5 For100mm stroke MY3B/ Air cushion MY3A/ Rubber bumper

MXH Series Compact Slide

Q Q Q MXH Series Q Q Q Product Features .pages 24-25 Q Q MXH Series Q How to Order .page 26 Q Specifications .page 27 Q How to Select .pages 28-29 Q Table Deflection .pages 30-31 Q Construction/ Parts List, Seal Kits .page 32 Q Dimensional Drawings.pages 33-36 Q Auto Switch Specifications and Mounting .pages 37-38 Q Please see safety instructions on pages 9

Mechanical Valves Series NVM, NVFM, NVZNI

Kgf/cm2) Millimetsrs in Parentheses Series NVM MECHANICALLY ACTUATED/PILOT OPERATED DIMENSIONS NVFM25O N\2il45GN01-01 'Actualors may be rotated to operate wilhout changing pod l@ation: Bgmove srews and reverse actuatol F O F 1.76 lbs. (0.8 Kg) P.T, 0.09 in. e2mml o.T 0.16 in. (4.0 mm) T T o21in. {6.2 mm) .75 PSIG (5 Kgflcm2) A ts IJ E F G H 443 (1 12.s) J.5U ( 9 1 ) 2 4 7 (62.7\ 1.46 (37

Air Cylinder NCA1 Series

47 63 79 157 196 1.375 1.485 74 89 119 148 297 371 1.75 2.405 120 144 192 241 481 601 2 3.142 157 188 251 314 628 785 2.5 4.909 245 295 393 491 982 1227 3 7.069 353 424 565 707 1414 1767 3.5 9.621 481 577 770 962 1924 2405 4 12.566 628 754 1005 1257 2513 3142 OVERSIZE PISTON RODS Selection Table Oversized Piston Rods Thrust In Piston Rod Diameter lbs 5/8 1 1 3/8 1 3/4 2 2 1/2 3 3 1/2 400 37

Air Cylinder Series MB

37 10 14 18 18 22 26 With rod boot (mm) f l 901 to 1000 h Bore size (mm) e 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 801 to 900 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 32 40 50 63 80 100 73 37.5 50 75 100 125 86 98 111 136 161 186 36 23

3 Port Solenoid Valve Series SYJ300/500/700

Base mounted (with sub-plate) 53 (32) 58 (37) M5 x 0.8 54 (33) Note) Value for DC. Add 1 g for AC. ( ): Without sub-plate. External Pilot SYJ300R Pilot valve pressure is supplied separately from the main valve pressure through the use of a separate supply port. It can be used in the vacuum (up to 100 kPa) or low pressure line with 0.15 MPa or less.

5 Port Solenoid Valve, Series VQ2000/Sub-plate Single Type

specifications 2-4.5 mounting hole 4 89.4 Manual override Indicator light VQ210 -W-02 37 45 5 128.1 (DC) 137.3 (AC) 22.4 15.5 (93.5) (AC) (84.3) (DC) Clamp screw M5 x 0.8 External pilot port 81 (AC) 75 (DC) 70.7 25 25 25 15.4 12 2.5 5 G 3/8 Electrical entry 14.5 19.5 43.8 39.1 53.6 Note) When used for IP65 specifications, install a seal connector in the electrical entry.

AC Servo Motor Driver (CC-Link Type)

Control mode Selection) . 24 5.3.4 Recommended Parameter Values by Actuator Model. 25 5.3.5 Absolute position detection system . 35 5.3.6 Remote register-based position/speed specifying system selection . 36 5.3.7 Electronic Gears . 37 5.3.8 Verify of parameters . 38 5.3.9 Parameter initialization . 39 5.4 JOG Mode in the Setup Software . 40 5.4.1JOG Mode. 41 5.5 Changing I/O Signal Allocation