Rotary Cylinder Series MRQ Size: 32, 40 1

D20Weight Rotating angle Flange (g) Basic weight (g) Add'l stroke weight (g/mm) Size 80 to 100 1400 4 500 32 170 to 190 1500 80 to 100 2100 40 5 500 170 to 190 2300 Calculation: (Example) MRQBS32-50CA Basic weight 1400 g 4 x 50 = 200 g Stroke additional weight Total 1600 g For the weight of auto switch alone, refer to page 11-11-1.

Compact Hydraulic Cylinder

Mounting bolt CHQ CHQ C D CHK Model C D Mounting bolt part no. Model C D Mounting bolt part no.

Manually Operated Integral Fitting Type/Threaded Type Series LVH

(H1) (H2) 2 x P B C SMC A B E L J B 2 x P 2 x F K Body material: PFA N G A D L K 4 x M Non-locking type Locking type 60 (H1) (H2) C A B SMC E J B 2 x P (mm) Dimensions D G E C M P N L K J H2 F H1 B A Model Body material LVH20 LVH30 LVH40 LVH20 LVH30 LVH40 LVH20 LVH30 LVH40 M5 x 0.8 10 10 54.5 Rc 1/8, 1/4, NPT 1/8, 1/4 27 22 22 76.5 75 33 30 (SUS) Stainless steel 19 13 81 Rc 1/4, 3/8,

PSxx-OMS0006CN

V ) -550 -1060 () 3585RH() CE/UKCA UL/CSA(E216656) 2 m 1(0 ms) 2 3MPa/kPa 490 M5 01 N01 C4H C6H N7H C4L C6L N7L M50.8 R1/8 NPT1/8 4 mm 6 mm 1/4 5/32 inch inch 4 mm 6 mm 1/4 5/32 inch inch () PBTCB156PPSO HNBR C3604( ) POMSUS304NBRC3604 SUS304NBR 22 g 32 g 34 g 25 g 26 g 27 g 28 g 28 g 34 g 35 g 2(AWG26) 0.15 mm 1.0 mm (3 ) 3.4 -63No.PS-OMS0006CN-G M5 7 3.5 01/N01

Stainless Steel 316

(mm) Connection thread R M Weight (g) A D L D Applicable tubing KQGH04-M5 KQGH04-01S KQGH06-M5 KQGH06-01S KQGH06-02S KQGH08-01S KQGH08-02S KQGH08-03S KQGH10-02S KQGH10-03S KQGH12-03S KQGH12-04S 22.3 19.3 4 7.4 M5 x 0.8 4 10 10 18 1/8 24 20 5.6 9.4 M A L 24.1 21.1 4 11 M5 x 0.8 H 12 6 12 24.3 1/8 20.3 18.8 11 10.4 Connection thread 25.8 1/4 19.8 18 14 1/8 30.5 26.5 18 (In case of R) 8 1/4

IZS30_eng

Tap M5 thread on the brackets mounting positions at the installation side, and fix the ionizer body and brackets with M5 threads. M5 tap M5 threads 4. Adjust angle of the ionizer body to ensure proper static charge elimination, and fix it with detent threads (M5) of brackets.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Drain cock Oil bowl B' C C Drain cock Drain guide (A) (B) Rc , NPT, G Mounting bracket Port size Model C B A Drain piping F G H J K L B' D E 6 6 1/4 female thread M3 x 0.5 1 4 2.3 15 12 20 50 73 AMC220 40 56 88 100 22 Depth 8 Body size A B C M3 x 0.5 71 88 101 101 121 55 63 83 96 96 116 1 4 3 8 , 56 75 102 118 135 153 AMC320 75 120.5 140.5 2.3 15 20 30 50 123.5 24 55 2 3 5 6 8 9 Depth

Manifold Specifications

VK Applicable solenoid valve Type 25 (Non plug-in type) How to Order D 25 05 00C VV4Z1 VZ 4(A), 2(B) port G L M D G L M D VZ1120-M5 Stations VF VZ110-M5 (3 port valve) 02 2 stations 1(P), 3(R) port One-touch fitting for 6 VFR Applicable blanking plate assembly VZ1000-10-2A 20 20 stations SUP/EXH block mounting position VP4 DIN rail length specified B D U Both sides: 2 to 20 stations D side

Flow Sensor Series PFMV

(mm) Type Port size Model Type Port size Model KQ2H04-M5 KJH04-M5 Male connector Male connector 4 M5 x 0.8 KQ2S04-M5 4 M5 x 0.8 KJS04-M5 Hex. socket head male connector Hex. socket head male connector KQ2L04-M5 KJL04-M5 Male elbow Male elbow Miniature Fitting/Series M Tubing O.D.

E-P HYREG ® Series VY1 1

G Description 04 06 10 02 03 04 02 03 04 VY110 0 1VY120 0 1VY130 0 1VY140 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 VY1D00-M5 VY1A0 0 1-M5 VY150 0 1VY1B0 0 1M 0 5 1 01 02 01 02 PPA B VEX9-32A VEX5-32A VEX7-32A VEX3-32A VEXA-18-2A VEX1-18-1A Bracket (With bolt, washer) AL F VEX1-18-2A VEXA-18-3A G27-10-R1-X207 G G46-10-01 G36-10-01 G27-10-01 Pressure gauge AN120-M5 AN120-M5 Pilot EXH port silencer

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

4-counter bore B T T 4-J x E 0 -0.1 L Cylinder tube outer circumference: TC Hard chrome plated + special treatment WP X F GW GP 4-LD D QW PW 2 x 4-MM thread depth M W K G G Q + Stroke Z + Stroke (mm) Model B C CB D F G GP GW H HA HC HP HB HT K J x E A 10.5 181. 16.6 181. 5 33 31.5 32 30 171. 31 171. 2 4.2 171. 14 M5 x 0.8 x 7 12-CY3R15 19.5 19.5 21.6 191. 6 39 37.5 39 36 211. 38 241. 3 5.2

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

Description Material ML1C25G ML1C32G C-7 SO-015-24 SO-016-9 C-4 SO-010-16 C-6 AS568-048 TMY-32 RCS-10 GMY32 ML1C40G C-7 SO-020-31 SO-015-20 C-4 SO-010-16 C-8 C-150 TMY-40 RCS-12 GMY40 O-ring O-ring O-ring Needle gasket O-ring O-ring O-ring Tube gasket Cushion seal Piston seal Scraper Bypass gasket O-ring $6 $7 $8 $9 %0 %1 %2 %3 %4 %5 %6 %7 %8 NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Description Material ML1C25G ML1C32G C-7 SO-015-24 SO-016-9 C-4 SO-010-16 C-6 AS568-048 TMY-32 RCS-10 GMY32 ML1C40G C-7 SO-020-31 SO-015-20 C-4 SO-010-16 C-8 C-150 TMY-40 RCS-12 GMY40 O-ring O-ring O-ring Needle gasket O-ring O-ring O-ring Tube gasket Cushion seal Piston seal Scraper Bypass gasket O-ring $6 $7 $8 $9 %0 %1 %2 %3 %4 %5 %6 %7 %8 NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Description Material ML1C25G ML1C32G C-7 SO-015-24 SO-016-9 C-4 SO-010-16 C-6 AS568-048 TMY-32 RCS-10 GMY32 ML1C40G C-7 SO-020-31 SO-015-20 C-4 SO-010-16 C-8 C-150 TMY-40 RCS-12 GMY40 O-ring O-ring O-ring Needle gasket O-ring O-ring O-ring Tube gasket Cushion seal Piston seal Scraper Bypass gasket O-ring $6 $7 $8 $9 %0 %1 %2 %3 %4 %5 %6 %7 %8 NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR

XM, XY

D L2 (KF flange) Fn Fc C (Fc) L1 (CF flange) J H B G A A (mm) Model A 110 120 171 B 38 48 66 C 1 1 2 D 30 40 55 Fn 34 70 Fc 17 26 41 G 40 39 63 H J P.C.D L1 6 x 4.4 6 x 6.6 L2 XMC-16 XMC-25 XMC-40 40 50 65 26 28 36 P.C.D 27 P.C.D 58.7 XMC-50 to 80/Angle type C L2 D Fd Fc L1 (KF flange) Fn C (K flange) (CF flange) H J K B G A A (mm) Model A 183 209 250 B 80 100 117 C 31 39 45.5 D 75 87

Clean Exhaust Filter

7 g 12 g 17 g Plug-in 3 g 6 g 11 g 16 g One-touch fitting 5.5 g 8 g 16 g 24 g Bracket weight 1.2 g 2.5 g 3.5 g 5.5 g Applicable tubing material Note 6) (One-touch fitting type) PFA, Polyolefin, Soft polyolefin, Polyurethane Replacement period 2 years or when back pressure reached 0.1 MPa When the system fails to operate normally due to clogging Packaging Antistatic double packaging

VQ4000

SQ Flow Characteristics at the Number of Manifold Stations (Operated individually) VQ0 Passage/Stations Station 1 Station 5 Station 10 Station 15 Model VQ4 5.9 0.23 1.5 6.2 0.19 1.5 6.8 0.31 1.8 7.0 0.38 1.9 5.9 0.23 1.5 6.2 0.19 1.5 6.8 0.31 1.8 7.0 0.38 1.9 5.9 0.23 1.5 6.2 0.19 1.5 6.8 0.31 1.8 7.0 0.38 1.9 C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv

Electric Actuator / Low profile slider type

LEM-OM00203 PRODUCT NAME Electric Actuator / Low profile slider type MODEL / Series / Product Number LEM Series Applicable models: LEMB, LEMC, LEMH, LEMHT L LE EM MB B 2 25 5/ /3 32 2 L LE EM MC C 2 25 5/ /3 32 2 ( (C Ca am m f fo ol ll lo ow we er r g gu ui id de e t ty yp pe e) ) ( (B Ba as si ic c t ty yp pe e) ) L LE EM MH H 2 25 5/ /3 32 2 L LE EM MH HT T 2 25 5/ /3 32 2

Round Type Hydraulic Cylinder

M10 x 1.25 M14 x 1.5 M16 x 1.5 12 M4 10 10 7 5.5 5.5 6.5 M4 set screw (1 pc.) 30 10 16 22 60 46 30 12 M4 10 10 7 5.5 5.5 6.5 36 12 16 30 80 56 40 12 M5 12 13 7 9 7 10 M5 set screw (1 pc.) 44 12 24 30 88 64 43 16 M5 12 13 9 9 10 10 Y-type double knuckle joint Bracket pin 20: Y-020B 25: Y-032B 32: Y-04D 40: Y-04B 2 x D drill through RR1 RR1 C1 Chamfer NDH10 NDH10 MM C E1 E1 C1 Chamfer NZ NZ

VQ7-6/7-8

Mounting bolt M5 X 115 with SW M5 X 35 with SW M5 X 15 with SW M5 X 45 with SW M5 X 60 with SW M5 X 65 with SW M5 X 70 with SW M5 X 75 with SW M5 X 90 with SW M5 X 95 with SW M5 X 100 with SW M5 X 105 with SW Size SMC SMC SMC SMC SMC Option mounting diagram SMC SMC SMC SMC Spacer 2 SMC Spacer 2 Interface regulator Spacer 1 Throttle valve spacer SMC Release valve spacer Spacer 2 Spacer 1 Spacer