Heavy Duty Stopper Cylinder Series RSH/RS1H

9 u #0 #6 t #8 q y $0 $1 20 r !1 e @2 !2 #7 #3 #1 32 w 50, 63, 80 @3 Double acting (DL, DM) !3 !5 #6 o @5 @4 i @1 @6 !0 @7 @9 !6 t u !7 !8 q #8 $1 y Single acting spring extended (TL, TM) Double acting spring type (BL, BM) r $0 !1 !

LEJ-OM004xx

(reference value) 11-LEJS40* Speed 600mm/sec Speed 1200mm/sec 100,000,000 100,000,000 10,000,000 10,000,000 ISOclass8 ISOclass8 0/mi n( AN R ) ISOclass6 1,000,000 1,000,000 ISOclass7 ISOclass7 Particl concentration[Particls/m 3] Particl concentration[Particls/m 3] 100,000 100,000 0/mi n( AN R ) ISOclass6 10,000 10,000 ISOclass5 ISOclass5 50/mi n( AN R ) 20/mi n( AN R ) 1,000 1,000 ISOclass4

CEx-OMI0064

CR ,, (EE ) 2ROM E 2ROM (100 ,E ), 2ROM E (3) : # : ASCII ,, 30H ) # 0 0 V R 23H 30H 30H 56H 52H 23H+30H+30H+56H+52H=12BH 2B ,30H 32H 3BH : # 0 0 V R 2 ; [CR] 23H 30H 30H 56H 52H 32H 3BH 0DH )ASCII ASCII 09 A B C D E F ASCII 30H39H 41H 42H 43H 44H 45H 46H 30H39H 3AH 3BH 3CH 3DH 3EH 3FH 27 - (4) 1bit () bit (ON 1) b7 b6 b5 b4 b3 b2 b1 1 0 () ON () (5) VR # 0 0 V R [CR] No. #

VDW

1 e w r e Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com u r u t t y y q q Component Parts Description Material No. Option Standard Stainless steel Body C37 q w e r t y u i o !0 !

HRX-OM-Q026

Altitude [m] 1. Max. ambient 2. Cooling capacity temp.

ZPT/ZPX

Vertical Vacuum Entry with Buffer Construction Series ZPT Series ZPX y o t y o ZX Component Parts r e i No.

Vacuum Pad: Ball Joint Type

ZPR Series Pad Diameter: 10 to 32 Pad Diameter: 10 to 32 r Buffer r Buffer t Adapter e Adapter q Pad q Pad With buffer With buffer Pad Diameter: 40, 50 Pad Diameter: 40, 50 r Buffer r Buffer e Adapter t Adapter Lock ring Lock ring q Pad q Pad With Buffer With Buffer Description Material Note Compornent Parts No.

LEF-OM002xx

Move M Speed Position Pushing F TriggLV In pos Change of positioning stop position Position: 50mm 30mm mm/s mm % % mm 0 Absolute 250 50.00 0 0 0.50 Input 30 Step data No. Move M Speed Position Pushing F TriggLV In pos mm/s mm % % mm 0 Absolute 250 30.00 0 0 0.50 6.

XL-OMY0002

XLD-63 XLD-80 XLD-25 XLD-40 XLD-50 XLD-100 XLD-160 0.08 Nm 0.3 Nm 6-3.S S S S 6-4.M M M S 6-5./ S M S M 12 XL-OMY0002 7.

AME

It cannot be used if connected in the opposite direction. 4.6-24 Series AME Dimensions: AME150 to AME350 M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 146 167 167 198 198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 1/8, 1/4, 3/8

VY511, VYU5

SW RESET RUN2 RUN1 OV INPUT 6 7 5 8 4 + 9 3 SET UP A 2 B 1 0 C D 1 E F 0 to 10V V R 1 OUTPUT SET UP BALANCE CONTROLLER VYU5-D 2 V R 2 OV ERR.

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

R.

180

For details, refer to the IDK series in the Best Pneumatics No.6. 705 MHY2 Series Construction Closed condition 10 16 20, 25 r o !8 e w !7 t !5 r o !8 e !6 w @0 !7 t !5 r o !8 e !6 w @0 !7 t !5 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !3 !2 i q !1 !4 y !9 Open condition Component Parts Note No.

3 Port Air Operated Valve

SYJA 2(A) 2(A) Standard VZA (P)1 3(R) (P)1 3(R) i VFA 2(A) 2(A) 2(A) 3(R) VFRA o For vacuum (P)1 3(R) (P)1 3(R) VPA4 SYJA X VZA 1(P) VTA For vacuum u y t r e w q VGA VPA VPA VPA3 i 2(A) 3(R) o X Component Parts No.

MHY2/MHW2

MHR MHK MHS MHC2 MHT2 MHY2 MHW2 MRHQ Auto switch 2.8-9 Series MHY2 Construction Closed 10 16 20, 25 r o !8 e w !7 t !5 r o !8 e !6 w @0 !7 t !5 r o !8 e !6 w @0 !7 t !5 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !3 Open Component Parts Component Parts Note No. q Description Material Aluminum alloy Description Material Note No.

Electric Actuator / Slider Type 《 AC Servo Motor 》

Other than positioning mode: Actuator travel distance at 10 [m/pulse] per pulse. Positioning Mode: Minimum actuator travel distance of 1[m]. *4. When the motor mounting position is right side parallel (LEFS*R) or left side parallel (LEFS*L), the rotation direction selection is 0(+: Counter motors side).

VVXA21/22

$6" " 6 " " " w 0C4,D 4 e B 6 !" r B " " $6y t " 5 ' % " $60C4,D 4 B u % " " B 17-3-98 3 Series VVXA21/22 Direct Air Operated 2 Port Valve/Manifold For Air, Gas, Vacuum and Oil The VX series will be revised shortly.

SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

center B A B A P R R P R 3 Position exhaust center 3 Position exhaust center B A B A Solenoid Specifications P R R Grommet(G)/(H), L type plug connector(L), M type plug connector(M) P R Electrical entry 3 Position pressure center 3 Position pressure center DC AC50/60Hz 24,12,6,5,3 100, 110 , 200, 220 10% rated voltage 0.5(With light:0.55) 0.9(With light:1.0) 1.0(With light:1.1) [1.1(With

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

plug connector (M) 1 (P) 3 (R2) VQZ1000 M plug connector (M) 0.2 0.35 (A) 4 1 (P) 5 (R) DIN connector (Y) DIN connector (YZ) VQZ2000 N.C.