Booster Regulator/Air Tank

VBAT10A1 S Note) A safety valve port is provided only when option R or S is selected.

SL5200

FV4 MV4 TW4 FV6 MV6 TW6 FV8 MV8 TW8 Material Body Poppet Diaphragm Code 316L SS secondary remelt Seat material 316L SS S 316L SS Code Material PCTFE (Standard) Vespel No code Surface finish Surface finish Ra max 10 in. (0.25 m) Standard 7 in. (0.18 m) 5 in. (0.13 m) Code VS M V X Pressure gauge unit 2) Unit psig/bar MPa Code No code MPA Ports Ports 2 ports 3 ports 4 ports Code Gauge port

Gun Type Ionizer

Blow setting Trigger setting 0 Trigger linked 1 1 Trigger lock 2 Continuous blow 3 s 3 5 s OFF timer 4 7 s 5 Trigger linked 5 6 Trigger lock 7 Pulse blow 3 s 8 5 s OFF timer 9 7 s Selection of blow setting M Continuous blow M Pulse blow Blows ionized air continuously. Pulse blow saves air.

JA/JAH/JB/JS

e r t No. q w e r t y Note Stud Case Ring Socket Dust cover Note Stud Case Ring Cap Dust cover Set screw MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) Basic Style: JB RS Q G JB12, 16 Center of sphere RS H A RZQ MI W S CEP1 CE1 R CE2 JB20 to 160

JA/JAH/JB/JS

e r t No. q w e r t y Note Stud Case Ring Socket Dust cover Note Stud Case Ring Cap Dust cover Set screw MQQ M RHC MK(2) Basic Style: JB RS Q G JB12, 16 Center of sphere RS H A RZQ MI W S CEP1 CE1 R CE2 JB20 to 160 Center of sphere ML2B C J G5-S CV MVGQ CC RB R J (mm) DMaximum operating tension and compression force (N) Applicable bore size (mm) M A Maximum thread depth P Model Center of

CLK1

52 17 1010 14 GA 4-M6 x 1 Thread depth 12 Clamp side port 3-Rc 1/4 45 45 3 BX Unclamp side port M IA 25 43 BY Max.Wc 40 Ws 35 13 30 D 36 Width across flats K Width across flats 44 R15 0.050 0.093 +0.027 0 Shaft: 12d9 Clevis width CLK1A: 16.5 F +0.3 0 +0.4 0 Hole: 12H8 Z + Stroke S + Stroke 1.5 27 CLK1B: 19.5 40 57 97 ZZ + Stroke 2 (mm) Symbol BX BY D F GA GB IA K L M N S W Wc Ws Z ZZ Bore

Transfer

Vertical collision (Upward) Vertical collision (Downward) Horizontal collision ML2B25 Horizontal collision: P = 0.5 MPa CEP1 2000 1500 m m s s Stroke adjusting unit Type of impact Piston speed (mm/s) CE1 s 1000 Air cushion m 500 400 300 CE2 1 m2 2 Kinetic energy E1 ML2B ML2B Use this unit to decelerate the cylinder when weight and speed are

High Vacuum Angle Valve, XL Series

S Valve seal M (maintenance part) Valve M Valve S Valve seal S (maintenance part) Valve seat S Valve side exhaust Operating principle Initial exhaust valve opening adjustment The initial exhaust rate should be adjusted before operation.

Compact Type

to 800 mm/s Graph up to 30 mm stroke 6 Graph up to 10 mm stroke 5 0.2 0.2 0.1 0.1 Weight m (kg) Weight m (kg) 0.05 0.05 0.04 0.04 0.03 0.03 0.02 0.02 CXSJM6 CXSJL6 CXSJM6 CXSJL6 20 40 0.01 20 40 0.01 60 0 60 0 Overhang L (mm) Overhang L (mm) CXSJM CXSJL Graph V = over 400 mm/s; up to 10 mm stroke 9 CXSJM CXSJL Graph V = up to 400 mm/s; up to 10 mm stroke 8 1 1 Weight m (kg) Weight m (kg)

Table of Contents

The range in the chart below that is delineated by bold solid lines indicates the relation between load weights and maximum driving speeds. 6 8 10 4 Bore size (mm) 0.05 to 0.5 Piston speed (m/s) 3.8 x 103 6.25 x 103 9.35 x 103 12.5 x 103 Allowable kinetic energy (J) 10 6 8 10 Load weight (kg) 1 4 0.1 0.01 0.1 1.0 0.01 Maximum speed V (m/s) 7-2-14 14 Series CUJ Specific Product Precautions

7.4

or less Base Mounted SY SY Body Ported 300 mm/s or less S0700 Base Mounted S0700 S0700 Body Ported 500 mm/s or less Base Mounted [Common conditions] Pressure: 0.5 MPa Piping length: 1 m Load ratio: 50% Stroke: 200 mm Use as a guide for selection.

Compact Vacuum Ejector Series ZQ

Left Right 15 -60 -60 10 -40 -40 Air consumption -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

With auto switch CRQ2B S 20 90 CDRQ2B S 20 90 A90 S Shaft type Built-in magnet Single shaft Double shaft S W Rotation 90 80 to 100 170 to 190 180 Size Shaft type 10 15 20 30 40 Air cushion Single shaft Double shaft S W Rotation Air cushion Without Without With Sizes 10, 15 Nil Nil C 90 80 to 100 170 to 190 180 Size 20, 30, 40 10 15 20 30 40 Air cushion Auto switch model Air cushion Without

-fl Seies

s L+, tLl9!"s L+l ,-;e!j., /..js!i2'L r . , , , , " " , 1 1 + n " , , r 6 * , . " , 1 f 4 : e ! 3 q , , t l ! g ! ! , , + r l r c o M . 2 { + l .r!9!4t i I '.*"{ c o M . r s r + t '.*{ la:q.B js t ) L l s ! r 6 L + r tL--g.S!" i6 t+l r-fP!3zo r t I r-V-ru ?sdm,{t-!:-!!.Fst-r ?i,oxl+4r5"a, I l r c o M " I r + r t r c o M c , + l ll coM" i q (+) ( coMo ro(+) /r'Y;-"' M* fr'fi-"" ' ire!.

Clamp Cylinder with Lock Series CLK1

52 17 1010 14 GA 4-M6 x 1 Thread depth 12 Clamp side port 3-Rc 1/4 45 45 3 BX Unclamp side port M IA 25 43 BY Max.Wc 40 Ws 35 13 30 D 36 Width across flats K Width across flats 44 R15 0.050 0.093 +0.027 0 Shaft: 12d9 Clevis width CLK1A: 16.5 F +0.3 0 +0.4 0 Hole: 12H8 Z + Stroke S + Stroke 1.5 27 CLK1B: 19.5 40 57 97 ZZ + Stroke 2 (mm) Symbol BX BY D F GA GB IA K L M N S W Wc Ws Z ZZ Bore

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

g) Note 2) n1: Stations n2: Number of SUP/EXH blocks m: Weight of DIN rail 3,4 W = 3.2n1 + 53n2 + m + 126.5 1,2 Note 1) This manifold is applicable to up to 16 solenoid valves.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

fitting Sensor (Breathing port) PB H G C PA A B N E J B (F) R 2-V PB PA A B Pilot port threaded type (mm) Dimensions A B C D E F G H J K L M N P Q R V Model LVD1-S LVD2-S LVD3-S LVD4-S LVD5-S 4 (5/32") 20 20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82

Compact Type Dual-Rod Cylinder Series CXSJ

up to 800 mm/s Graph up to 30 mm stroke 6 Graph up to 10 mm stroke 5 0.2 0.2 0.1 0.1 Weight m (kg) Weight m (kg) 0.05 0.05 0.04 0.04 0.03 0.03 0.02 0.02 CXSJM6 CXSJL6 CXSJM6 CXSJL6 20 40 0.01 20 40 0.01 60 0 60 0 Overhang L (mm) Overhang L (mm) CXSJM CXSJL Graph V = over 400 mm/s; up to 10 mm stroke 9 CXSJM CXSJL Graph V = up to 400 mm/s; up to 10 mm stroke 8 1 1 Weight m (kg) Weight m (kg

MXW

Load Weight W 20 Maximum Load Weight MXW25 17 (kg) W 15 Maximum load weight (kg) 12 MXW20 W Model 10 MXW16 MXW8 1.8 7 6 MXW12 4 5 4 MXW12 MXW16 7 3 2.5 MXW20 11 2 MXW8 1.7 MXW25 17 1.5 W W 1.2 Note) No need to consider this load factor in the case of using perpendicularly in a vertical position. 1 50 100 200 300 500 Piston speed (mm/s) Graph (1) Mp/Mep (Pitch moment) My/Mey (Yaw moment) Mr

PF2A/PF2W

(500 VDC) between external terminal and case 10 to 500 Hz at whichever is smaller: 1.5 mm amplitude or 98 m/s2 acceleration in X, Y, Z directions for 2 hrs. each 490 m/s2 in X, Y, Z directions 3 times each 1000 Vp-p, Pulse width 1 s, Rise time 1 ns Resistance Note 1) In the case of PF2W711, 3% of F .S. or less (15C to 35C, based on 25C).