Wireless System

Cable with 7/8 Inch Connector/ Power Supply Connector p. 21 Ordering Example of the Master Unit p. 9 Ordering Example of the Slave Unit p. 9 Specifications Wireless Master Unit p. 10 Wireless Slave Unit p. 11 End Plate (D side) p. 11 Dimensions p. 12 LED Display p. 15 Technical Data p. 22 Important p. 22 Safety Instructions Back Cover 6 Wireless System EX600-W Series RoHS

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

port S99 Heavy-duty cord 3-wire (NPN) Yes Yes Yes Yes No No Change threaded hole to through-hole S99V 5 V, 12 V For 10 and 15 Change the screw position S9P Relay, PLC 3-wire (PNP) IC circuit 24 V Grommet Change rotation range S9PV Change rotation range between 0 and 200 90 5 V, 12 V 5 V, 12 V, 24 V Parallel cord Change rotation range between 0 and 110 5 V, 12 V, 100 V 5 V, 12 V, 24 V, 100

Slider Type/Ball Bushing Bearing

W D 1.6 x P 0.1 x Wcos + Wsin D 5.0 x P 0.1 x W + W D 5.0 x P W W > Wv P > Pv Determination of allowable load mass & pressure Inclined operation (For vertical operation, refer to page 1515.)

Bernoulli Gripper

30 27 V 40 48 V V Aluminum 60 110 V 80 193 V 20 7 V NBR (Improved abrasion resistance) 30 17 V With 40 30 V or Resin without Silicone rubber (Heat/ozone resistant) 60 67 V 80 119 V 20 34 V 30 77 V Stainless steel 40 139 V 60 323 V 80 568 V CO NTENT S Model Selection p. 4 How to Order p. 5 Specifications p. 6 Lifting Force p. 7 Air Consumption p. 7 Lifting ForceDistance from

Filter Regulator AW30, 40

Round Square embedded type Round Square embedded type G46-10-02 G36-10-01 1.0MPa Note 3) GC3-10AS Note 2) GC3-10AS GC3-10AS 1 4 1 8 1 4 Note 1) Pressure gauge G46-2-02 G36-2-01 G46-2-02 Set pressure + 0.05MPa (at relief flow rate of 0.1l/min(ANR)) 5 to 60C (With no condensation) 5m 0.2MPa Note 3) GC3-2AS GC3-2AS GC3-2AS Note 4) AD48 N.O.

LEF-OM002xx

) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 Vertical Transfer 12 50 B B B 20 A 10 A A 40 H W(kg) W(kg) H 8 W(kg) 15 30 6 10 20 4 5 2 10 0 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 50 12 B B 20 B A 10 A 40 H H A W(kg) W(kg) W(kg) 15 8 30 6 10 20 4 5 10 2 0 0 0 0 100 200 300 400 500 600 0 100 200 300 400

MXS

3 wire (PNP) P.5.3-39 V V Solid state switch F9BV F9B 2 wire V V Relay, PLC 24V Yes Grommet 12V F9NWV F9NW 3 wire (NPN) V V Diagnostic indication (2 color) F9PWV F9PW P.5.3-66 3 wire (PNP) V V F9BWV F9BW 2 wire V V PLC: Programmable Logic Controller Note 1) Lead wire length 0.5m (Ex.)

Series 10-, 21- AW-B Filter Regulator

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 40 60 30 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N Note 2) F Note 3) Thread type Rc NPT G e + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 5) H Note 4) a Without mounting option

Possible to transfer a workpiece at low-speed.

Shortened shaft Reversed shaft W W XA11 W W W W W XA12 W W XA13 W W W W XA14 W 10, 15 20, 30, 40 XA15 XA16 XA17 W 10, 15 10, 15, 20, 30, 40 XA18 W W W 10, 15, 20, 30, 40 10, 15 W W W W W XA20 XA21 W Stepped round shaft with double-sided chamfer 10, 15 XA22 Stepped round shaft with double-sided chamfer Right-angle chamfer Double key 20, 30, 40 Combination Chart of Made

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

1 w t !1 !2 !0 o q r !3 w y e Component Parts No.

MNB

GA GC GD Rc(PT)BP unlocking port Front cylinder port Unlocked when pressurized W GR GL GL 1 GE Rc(PT)P ??

Serial Network

-963-7099 Fax: 02-501-2937 Chile Phone: 02-270-8600 Fax: 02-270-8601 United Kingdom Phone: 01908 563888 Fax: 01908 561185 Italy Phone/Fax: 02-9271365 Rochester Phone: (716) 321-1300 Fax: (716) 321-1865 Dallas Phone: (972) 446-9554 Fax: (972) 446-5931 Oceania Australia Phone: 02-9354-8222 Fax: 02-9894-5719 Netherlands Phone: 020-5318 Fax: 020-5318880 Mexico Phone: 47-22-55-00 Fax: 47-22-59

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

NFB MC CNP1 NFB MC L1 L1 Three phase 200 to 230 VAC Single phase 200 to 230 VAC CNP3 CNP3 L2 L2 U U U Motor U Motor L3 L3 V V V V M M N () N W W W W P1 P1 PE PE P2 P2 CNP2 CNP2 P (+) P Regeneration option Regeneration option C C D D Detector Detector CN2 CN2 L11 L11 L21 L21 Note) For single phase 200 to 230 VAC, power supply should be connected to L1 and L2 terminals, with nothing connected

CLS

100 V Relay, PLC Reed switch Solid state switch A54 100 V, 200 V Yes A33 PLC 12 V Terminal conduit 24 V 2-wire A34 100 V, 200 V Relay, PLC A44 DIN terminal Diagnostic indication (2-color indication) Lead wire length symbols: 0.5 mNil (Example) A54 3 m L (Example) A54L 5 m Z (Example) A54Z Grommet A59W Y59A 3-wire (NPN) IC circuit 24 V 5 V, 12V Y7P 3-wire (PNP) Grommet J51 100 V, 200

1

MY1B P . 8-11-16 MY1M P . 8-11-40 MY1C P . 8-11-56 MY1H P . 8-11-72 MY1CW P . 8-12-14 MY1MW P . 8-12-14 Stroke adjusting unit For applicable symbol, refer to the table below. Note) For MY1H, the parts are packed together when shipped. Stroke Note) Indicates the stroke prior to mounting the stroke adjusting unit.

10

v 25A CG1 v v MBlR V CG3 v v v v v v 10v 20JMB v v XAl MB MB v v v v v v v XB5 v v v v v XB6 MB1 v v v v v XB13 CA2 v v XC3 v XC4 CS1 v v v v v XC5 CS2 v XC6 Note 8) Note 8) v XC7 v v v XC8 v v v XC9 v v XC10 Note 4) Note 4) v v v v v XC11 v v v v v XC12 v v XC14 Note 3) v v v v v XC22 XC26 v v XC27 v v v v XC29 XC30 v v XC35 v XC65 XC68 XC88 XC89 XC91 Dv v v

High Vacuum Angle Valve

Chemraz is a registered trademark of Greene, Tweed Technologies, Inc. 4 XLA/XLA V Series Specifications Model XLA(V)-16-2 XLA(V)-25-2 XLA(V)-40-2 XLA(V)-50-2 XLA(V)-63-2 XLA(V)-80-2 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature [C] XLA 5 to 60 (High-temperature type: 5 to 150) XLAV 5 to 50 Operating pressure [Pa(abs)] 1 x 106

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

222 CC-Link p. 223 DeviceNet p. 224 PROFIBUS DP p. 225 Communication Cable p. 226 Field-wireable Communication Connector p. 228 Terminating Resistor p. 228 Fieldbus Related Accessories M8/M12 Connector PCA/EX9/EX500 Series Power Supply Cable/Connector EX600 Series p. 229 EX500 Series p. 231 EX260 Series p. 233 EX250 Series p. 235 Accessory Between the Sensor/Switch and the Input

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

conduit 3-wire (NPN) Solid state auto switch G39C G39 2-wire K39C K39 12 V M9NW V V V v v G59W V V v v 3-wire (NPN) 5 V, 12 V IC circuit Diagnostic indication (2-color indication) Relay, PLC Yes 3-wire (PNP) M9PW V V V v v G5PW V V v v 2-wire 12 V M9BW V V V v v 24 V K59W V V v v Grommet 3-wire (NPN) 5 V, 12 V M9NA** v v V v v 3-wire (PNP) M9PA** v v V v v Water resistant (2

Rotary Actuator/Vane Style Series CRB2

The length is 24 when any of the following auto switches are used: D-90/90A/S99(V)/ T99(V)/S9P(V). The length is 30 when any of the following auto switches are used: D-97/93A. 2. The angle is 60 when any of the following auto switches are used: D-90/90A/97/93A. The angle is 69 when any of the following auto switches are used: D-S99(V)/T99(V)/ S9P(V).