IDG

Tubing size (O.D. x I.D.) mm: 12 x 9 IDG30 IDG50 0 m 20 1 m 19 3 m 17 5 m 16 Note) In cases other than above model numbers, if the tube length is 5 m or less, an increase of the outlet air at the atmospheric pressure dew point will be 1C or less. Refer to pages 14-19-28 to 29. Construction Refer to pages 14-19-30 to 31.

High Power Cylinder Series RHC

Applicable bore size (mm) M22 x 1.5 M8 x 1.25 SOR-20 NT-02 20 20 5 13 8 30 26 15 12.5 26 M24 x 1.5 M10 x 1.25 SOR-25 NT-03 25 25/32 6 17 8 36.9 32 19.6 16.5 32 M30 x 1.5 M14 x 1.5 SOR-32 NT-04 32 40 8 22 9 43.9 38 25.4 21.0 38 M33 x 2.0 M18 x 1.5 SOR-40 NT-05 40 50/63 11 27 11 47.3 41 31 26 41 M22 x 1.5 NT-08 80 13 32 37 31 M26 x 1.5 NT-10 100 16 41 47.3 39 1210 High Power Cylinder Series

Pin Cylinders Series CJP2/CJP

Cylinder bore size Applicable bore size Fitting type Connection thread Model KJ23-M3 KJ04-M3 KJ23-M5 KJ04-M5 KJ06-M5 3.2 M3 x 0.5 4 4 One-touch fitting 3.2 6 10 15 M5 x 0.8 4 6 Recommended Speed Controller Applicable bore size (mm) Connection thread Elbow type meter-in Universal type meter-in In-line type meter-in AS1211F-M3-02 M3 AS1001F-02 2 AS1211F-M5-02 M5 AS1211F-M3-23 AS1311F-M3-23

VXA21/22

Valve (Port size) VQ 1 (1.5mm) 2 (2.2mm) 3 (3mm) 4 (4mm) VXA31 VXA32 01 ( ) 1 8 02 ( ) 1 4 03 ( ) 3 8 02 ( ) 1 4 Ordering Example (Example) Series VXA31, Orifice size 1.5mm, Rc(PT)1/8 (Part number) VXA3114-01 4.1-69 VXA31/32 Air How to Read the Graph In the sonic flow region: For a flow of 100 l/min.

EX120/121/122

EX600-ZMV1 EX600-ZMA2 Enclosed parts Round head screw (M4 x 20) 1 pc. P-tight screw (4 x 14) 2 pcs. Enclosed parts Round head screw (M4 x 6) 2 pcs. Round head screw (M3 x 8) 4 pcs. 3. Reinforcing brace This bracket is used on the bottom of the unit at the intermediate position for connecting 6 or more units.

HRL

x V x C x iT it m x C x (T0 Tt) it Q = = 1 x 250 x 4.186 x 103 x 12 900 = = 13953 [J/s] 14.0 [kW] m x C x (T0 Tt) it x 860 x V x 60 x C x iT it x 860 Q = = Cooling capacity = Considering a safety factor of 20%, 14.0 [kW] x 1.2 = 1 x 250 x 60 x 1.0 x 103 x 12 15 x 860 16.8 [kW] = Thermo-chiller Q x t: Heat capacity [kJ] 13953 [W] = 14.0 [kW] Water bath 20C Cooling capacity = Considering

RHC

Applicable bore (mm) C D d H Applicable bore (mm) C D d H 5 26 30 12.5 8 M8 x 1.25 15 M22 x 1.5 26 13 20 20 SOR-20 NT-02 6 32 36.9 16.5 8 M10 x 1.25 19.6 M24 x 1.5 32 17 25, 32 25 SOR-25 NT-03 8 38 43.9 21.0 9 M14 x 1.5 M30 x 1.5 25.4 38 22 40 32 SOR-32 NT-04 11 41 47.3 26 11 M18 x 1.5 31 M33 x 2.0 41 27 50, 63 40 SOR-40 NT-05 13 31 M22 x 1.5 37 32 80 NT-08 16 39 M26 x 1.5 47.3 41 100 NT-

High Power Cylinder Series RHC

Applicable bore size C D d H Applicable bore size C D d H 5 12.5 15 26 30 M8 x 1.25 8 M22 x 1.5 26 13 20 20 SOR-20 NT-02 6 16.5 19.6 32 36.9 M10 x 1.25 8 M24 x 1.5 32 17 25/32 25 SOR-25 NT-03 8 21.0 25.4 38 43.9 M14 x 1.5 9 M30 x 1.5 38 22 40 32 SOR-32 NT-04 11 26 31 41 47.3 M18 x 1.5 11 M33 x 2.0 41 27 50 40 SOR-40 NT-05 11 26 31 M18 x 1.5 27 63 NT-05 13 31 37 M22 x 1.5 32 80 NT-08 16 39

Water-cooledThermo-chiller

T xV x x C h x 60 x 1000 Q = 20 x 60 x 1.74 x 10 3 x 1.05 x 10 3 Q = T xV x x C h x 860 = 2436W = 2.4 kW 15 x 60 x 1000 = 20 x 0.06 x 1.74 x 10 3 x 0.25 0.25 x 860 Cooling capacity = Considering a safety factor of 20%, 2.9 kW (When the circulating fluid temperature is 50C.) 2.4 x 1.2 = = 2.4 kW (In this case, selected Thermo-chiller model will be the HRW008-H.)

Digital Flow Switches

Output mode Hysteresis mode ft3, ft3 x 103, ft3 x 106 CFM ON OUT2 is also the same.

7ND9071en

1.2 x 6.5 x 150 mm ND9000/D__ and ND9000/I__: Use the LED indicator or a separate measuring instrument as an aid.

VFM300

-02-06 VFM350-02-06S Toggle lever VFM350-02-08 VFM350-02-30R VM-30CR Red VM-30CB Black VFM350-02-30B Push button (Mushroom) VM-30CG Green VFM350-02-30G VM-30CY Yellow VFM350-02-30Y VFM350-02-32R VM-32CR Red VM-32CB Black VFM350-02-32B Push button (Extended) VM-32CG Green VFM350-02-32G VM-32CY Yellow VFM350-02-32Y With a set of red, black, green, yellow VM-33C Push button (Flush) VFM350-02

High Power Cylinder:

D d H Part no B C 30 M22 X 1.5 26 8 26 SOR-20 20 15.0 12.5 M8 X 1.25 5 13 NT-02 20 36.9 M24 X 1.5 32 8 32 SOR-25 25 19.6 16.5 M10 X 1.25 6 17 NT-03 25/32 43.9 M30 X 1.5 38 9 38 SOR-32 32 25.4 21.0 M14 X 1.5 8 22 NT-04 40 47.3 M33 X 2.0 41 11 41 SOR-40 40 4.10-6 High Power Cylinder Series RHC How to Rotate the Relief Valve Body The relief adjustment screw can be placed in any direction by

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

8 One-touch fitting 3 18 2 x 3.4 With connector cover 28 8 2 x 2.5 depth 5 PFMB7201-C8L 88 48 18 OUT2 OUT1 10.2 DC () DC (+) 1 43 12 (34.2) 3 1 IN 18 2 x 3.4 OUT IN 2 x 8 One-touch fitting 68 28 8 2 x 2.5 depth 5 6 Series PFMB7 Dimensions PFMB7201-(N)02 70 48 Width across flats 17 18 OUT2 OUT1 10.2 DC (+) DC () 1 43 IN OUT (34.2) 13 1 IN 3 2 x Port size 18 Rc1/4 NPT1/4 2 x 3.4 28 8 2 x 2.5

Vacuum Unit

5/16" Metric size: 2 x 8 1 Vacuum break flow adjusting needle 79 (Ejector system) 84 (Vacuum pump system) 2 x Common supply (PD) port4 Exhaust (EXH) port Metric size: 08 (8) Inch size: 09 (5/16) 54.8 26.4 2.6 62 PS and PD port dimensions1, 4 For high-noise reduction silencer exhaust 53 45.9 37.4 38 36 D 8.4 B 26.4 2 x Common exhaust (EXH) port2 n x Individual exhaust (EXH) port3 3.5 10.5

VT325

1 For details about certified products conforming to international standards, visit us at www.smcworld.com. 3 Port Direct Operated Poppet Solenoid Valve Rubber Seal Series VT325 How to Order V100 Compact yet provides a large flow capacity Dimensions (W x H x D)55 x 118 x 53 (Grommet) C: 0.61 dm3/(sbar) {Rc 3/8 (Passage 2 3)} A single valve with 6 valve functions (Universal porting type)

Booster Relay Series IL100

6.6 2 10 62 21 5 105 2 52 OUT SIG IN OUT SIG 3 x Rc1/4 60 IL211 14.5 Panel fitting dimension 58 45 Panel 35 Max. 4 2 x 6.6 2 52 10 137 62 31 21 5 SIG OUT IN1 OUT1 SIG 2 IN2 OUT2 OUT 5 x Rc1/4 60 IL220 14.5 Panel fitting dimension 2 x 6.6 45 58 Panel 35 Max. 4 2 18 57 10 130 2 OUT IN1 SIG 30 15 4 x Rc1/4 IN2 60 58

Digital Flow Switches

Unit switching Real-time switch output ( ) For air Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON YES CFM x 10-2, CFM x 10-1 ft3 x 10-1 OFF P-1 P-2 High flow rate CFM=ft3/min "P" Window comparator mode H : Hysteresis High Flow Rate Type (For Air) H H Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 ON NO OFF P-1 P-2 ft3, ft3 x 103, ft3 x 106 CFM

PF2A/PF2W

Unit switching Real-time switch output ( ) ZSE ISE For Air Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON PSE YES CFM x 102, CFM x 101 ft3 x 101 OFF P-1 P-2 High flow rate Z I SE3 CFM = ft3/min P Window comparator mode H: Hysteresis High Flow Rate Type (For Air) PS H H Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 ON Z I SE1 2 NO OFF P-1 P-

Information

G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1 Series ASG Needle Valve: Flow Characteristics ASG220F-M5 ASG221F-M5 ASG320F-01 ASG321F-01 ASG420F-02 ASG421F-02 1.5 Inlet pressure: 0.5 MPa Inlet