Rated Flow Range: 01 (0.01 to 1 L/min), Flow Adjustment Valve: None (Straight), Port Size: 01 (Rc1/8), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve), Calibration Certificate: A (Calibration Certificate)
Rated Flow Range: 10 (0.1 to 10 L/min), Flow Adjustment Valve: None (Straight), Port Size: 01 (Rc1/8), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve), Calibration Certificate: A (Calibration Certificate)
Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: None (Straight), Port Size: 02 (Rc1/4), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve)
Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: None (Straight), Port Size: N2 (NPT1/4), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve), Calibration Certificate: A
Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: None (Straight), Port Size: C8 (ø8), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve)
Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: None (Straight), Port Size: 02 (Rc1/4), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve)
Rated Flow Range: 01 (0.01 to 1 L/min), Flow Adjustment Valve: None (Straight), Port Size: C6 (ø6), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve), Calibration Certificate: A (Calibration
Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: None (Straight), Port Size: 02 (Rc1/4), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve)
Rated Flow Range: 01 (0.01 to 1 L/min), Flow Adjustment Valve: None (Straight), Port Size: C4 (ø4), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve), Calibration Certificate: A (Calibration Certificate)
Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: None (Straight), Port Size: C8 (ø8), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve), Calibration Certificate: A (Calibration Certificate)
Size: 100, Motor Mounting Position: D (In-line), Motor Type: T9 (AC Servo Motor, Absolute Encoder), Lead: B (10mm), Stroke: 400mm, Motor Option: B (w/Lock), Rod End Thread: Rod End Female Thread, Mounting: F (Flange), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 5 (5m), Driver Type: E2 (LECSN2-T9-E/EtherCAT®, 200V to 240V), I/O Cable Length: 1 (1.5m)
Type Long Lock Nut), 1st Nominal Nozzle Size: 1 (ø0.7), 1st Selection Supply Valve and Release Valve: R ( Self-holding Release Valve Linked/N.C.), 1st Selection Vacuum V Port: 6 (Vacuum, V Port: Ø6), 1st Selection Quantity: 1
Stations: 02 (Stations), Wiring: L (Individual Wiring or None), Manifold Options: without Option, Exhaust: H (High Noise Reduction Silencer Exhaust), Pressure Switch for Vacuum/Pressure Sensor: R (Pressure Switch for Vacuum w/Energy Saving Function, -100 to 100, PNP 2 Outputs, with Unit Selection Function), Leadwire: W (Energy Saving), Unit Options: E (Vacuum Break Flow Adjusting Needle,
Stations: 03 (Stations), Wiring: L (Individual Wiring or None), Manifold Options: B (with DIN Rail Mounting Bracket), Exhaust: C (Complex Exhaust), Pressure Switch for Vacuum/Pressure Sensor: R (Pressure Switch for Vacuum w/Energy Saving Function, -100 to 100, PNP 2 Outputs, with Unit Selection Function), Leadwire: W (Energy Saving), Unit Options: E (Vacuum Break Flow Adjusting Needle, Screwdriver
Stations: 02 (Stations), Wiring: L (Individual Wiring or None), Manifold Options: without Option, Exhaust: H (High Noise Reduction Silencer Exhaust), Pressure Switch for Vacuum/Pressure Sensor: R (Pressure Switch for Vacuum w/Energy Saving Function, -100 to 100, PNP 2 Outputs, with Unit Selection Function), Leadwire: W (Energy Saving), Unit Options: E (Vacuum Break Flow Adjusting Needle,
Stations: 02 (Stations), Wiring: L (Individual Wiring or None), Manifold Options: without Option, Exhaust: H (High Noise Reduction Silencer Exhaust), Pressure Switch for Vacuum/Pressure Sensor: R (Pressure Switch for Vacuum w/Energy Saving Function, -100 to 100, PNP 2 Outputs, with Unit Selection Function), Leadwire: W (Energy Saving), Unit Options: E (Vacuum Break Flow Adjusting Needle,
Stations: 08 (Stations), Wiring: L (Individual Wiring or None), Manifold Options: BD (with Manifold Options B & D), Exhaust: H (High Noise Reduction Silencer Exhaust), Pressure Switch for Vacuum/Pressure Sensor: R (Pressure Switch for Vacuum w/Energy Saving Function, -100 to 100, PNP 2 Outputs, with Unit Selection Function), Leadwire: W (Energy Saving), Unit Options: E (Vacuum Break Flow
Stations: 02 (Stations), Wiring: L (Individual Wiring or None), Manifold Options: without Option, Exhaust: H (High Noise Reduction Silencer Exhaust), Pressure Switch for Vacuum/Pressure Sensor: R (Pressure Switch for Vacuum w/Energy Saving Function, -100 to 100, PNP 2 Outputs, with Unit Selection Function), Leadwire: W (Energy Saving), Unit Options: E (Vacuum Break Flow Adjusting Needle,
Stations: 03 (Stations), Wiring: L (Individual Wiring or None), Manifold Options: B (with DIN Rail Mounting Bracket), Exhaust: C (Complex Exhaust), Pressure Switch for Vacuum/Pressure Sensor: R (Pressure Switch for Vacuum w/Energy Saving Function, -100 to 100, PNP 2 Outputs, with Unit Selection Function), Leadwire: W (Energy Saving), Unit Options: E (Vacuum Break Flow Adjusting Needle, Screwdriver
Rated Flow Range: 102 (10 to 1000 L/min), Thread Type: Rc, Port Size: 04 (1/2), Output Specifications: E (Out 1: PNP; Out 2: Analog 1 to 5 V), Option 1: w/Lead Wire and M8 Connector, 3m, Unit Specification: Unit Selection Function, Option 2: R (w/Bracket), Calibration Certificate: A (Yes)