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4 0 N 2 B S X80 2 0 3 0 ITV 33 DeviceNet compatible Model 2000 type 3000 type 2 3 Thread type Pressure range Rc(PT) NPT NPTF G(PF) Nil N T F Cable connector type 0.005 to 0.1MPa 0.005 to 0.5MPa 0.005 to 0.9MPa 1 3 5 Without Straight type 3m Nil S Option (bracket) Port size Without bracket Flat bracket L-bracket Nil B C 1/4 3/8 2 3 Specifications ITV2050 ITV3050 ITV2030 ITV3030 ITV2010 ITV3010

IFW520 125 VAC 10 to 20 25 1.5 or less 5 5 1.5 0.7 4 4 2.5 1.3 IFW550 250 VAC 20 to 50 60 3 or less 5 5 1 0.5 4 4 1.5 0.8 Note) Hysteresis is the flow rate that is necessary for moving the microswitch from the operation position (ON signal) to the return position (OFF signal). 8 VDC 7 5 3 3 5 4 3 3 5 5 3 3 4 4 3 3 14 VDC 30 VDC 5 5 3 3 4 4 3 3 125 VDC 0.4 0.4 0.1 0.1 0.4 0.4 0.1 0.1 250 VDC

Description Features Series Page 1/2 3/4 1 11/4 11/2 1/4 OUT ARX20 VCH41(N.C.)

4 y r t !3 e i o w !0 !5 Lateral load resisting type: MQQL (Built-in ball bushing) !1 !6 !

For example, when analogue output is 1 to 5 V, F.S. = 5[V] 1[V] = 4[V], (ref. 1%F.S. = 4[V]x1% = 0.04[V]) The maximum measuring range or change in analogue output over the maximum measurement range. F.S. (Full span, Full scale) N Non-linear output Indicates non linear output.

Location and size A, B port 02 Side 1/4 03 Side 3/8 04 Side 1/2 06 Side 3/4 10 Side 1 02B Bottom 1/4 03B Bottom 3/8 04B Bottom 1/2 Size of P, EA, EB port 02 1/4 03 3/8 04 1/2 06 3/4 10 1 Option No option TBU With terminal box SU With SI unit W Splash proof DISTRIBUTED BY: NATIONAL AND WORLDWIDE SERVICE NETWORK FOR A BRANCH OFFICE NEAR YOU, CALL United States Branch Offices Oceania SMC Corporation

Specialty Regulators NAR Series Pressure Regulator NAR425, 435, 625, 635, 825, 835, 925, 935 s n o i t a c i f i c e p S l e d o M 5 2 4 R A N 5 3 4 R A N 5 2 6 R A N 5 3 6 R A N 5 2 8 R A N 5 3 8 R A N 5 2 9 R A N 5 3 9 R A N e z i S t r o P 2 / 1 8 / 3 4 / 1 1 4 / 3 2 / 1 1 4 / 1 1 2 ) a P M ( g i s p e r u s s e r p f o o r P ) 5 . 1 ( 0 2 2 e r u s s e r p g n i t a r e p o . x a

CODE LIST -3-9 3.10 ASCII CODE LIST -3-9 4 TROUBLESHOOTING -4-1 INR-244-831 iii Preparation for Communication 1 Preparation for Communication Make preparation for using communication facility as follows. 1) Turn off the power switch of Thermo-con.

Connection to external equipment LED indication Communication wiring diagram Power supply wiring diagram 1:SLD 1:+24V 1:SLD 2:DB Power DC24V 2:F.G. 2:DB 3:DG 3:GND CC-Link OUT CC-Link In 3:DG 4:DA 4:N.C. 4:DA 5:N.C.

Actuation Plug Plug (A) 4 (B) (2) Number of solenoids (A) (4) (B) 2 Single 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) Plug Plug (A) (4) (B) 2 (A) 4 (B) (2) Manual Override Operation Double Warning 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) Light/Surge Voltage Suppressor Handle carefully, as connected equipment can be actuated through manual override operation.

Qty. 1 1 1 1 With 4 tapping screws (3 x 8) With 4 tapping screws (3 x 8) With 4 tapping screws (4 x 10) Lead wire length (3 m) For PF3W704/720/504/520 For PF3W740/540 For PF3W711/511 Bracket Note) Lead wire with M8 connector Note) For units with flow adjustment valve, 2 brackets are required. 1

Contents Safety Instructions. 2 Outline of clean room specification. 4 Grease used. 4 2 Recommended tube diameter. 4 Raising dust characteristic. 4 21 Recommended tube diameter. 4 22 Amount of vacuum aspiration . 6 How to Order. 7 Construction. 8 1 11-LEF Series / Slider type Safety Instructions These safety instructions are intended to prevent hazardous situations and /or equipment damage

Note Hard anodized Kit components CU20A-PS 20 1 Aluminum alloy 1 CU25A-PS 25 1 Hard anodized Aluminum alloy 2 Rod cover/Bearing 13, 14, and 15 CU32A-PS 32 1 Clear chromated Aluminum alloy 3 Head cover 1 Chromated Aluminum alloy 4 Piston 1 Stainless steel 5 Piston rod 1 Phosphate coated Carbon tool steel 6 Snap ring 1 Nickel plated Carbon steel 7 Rod end nut (2) 8 Cushion needle assembly

x 1.25 M8 x 1.25 M32 x 2 M26 x 1.5 M26 x 1.5 M20 x 1.5 1/4 1/8 1/8 1/8 8 8 8 46.5 37.5 33.5 5.5 5.5 5 208 195 10 56.2 867

: JIS B 8361: JIS B 9960-1: (1 : ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 2 / 1 1.5 *3) *3) 1 1 () 3 (1) , (2) (3) (1) (2) (1) (2) (3) 4 (1) , (2) (3) (4) (1) &/(Best Pneumatics No.7) (2) (3) (4) (5) 5 (1) (2)1 ()ISO VG32 1 ISO VG32 1) (1) (2) (3) (4) 6 (1) (2) (3) (4) (5) (1) (1) (2) (3) 7 1-2. (1) (1) (2)PIL PIL1/10 (1) 23 (1) (2)VR21 1.41.6Nm 1.41.6Nm

Port size Flow characteristics Internal pilot type External pilot type 1(P)4(A) 3(R2)2(B) Body port [dm3/(sbar)] B Cv C C [dm3/(sbar)] B Cv 1/2 12 0.14 2.9 14 0.18 3.4 This is the flow rate when the main valve is fully open. 3. How to order Switching type -5 - 4.

2400, 4800, 9600, 19200b/s 1200 3 I Constant Sets integral time used for PID control. 1 to 999sec (1sec) 40 0,1,2 1 -100 to 100% (1%) 4 Data Length Sets data length for communication. 7Bits, 8Bits 8 0 to F (Hex decimal) 0 5 Stop Bit Sets stop bit for communication. 1Bit, 2Bits 1 No.

No. o S o1 T P2 U Q3 V R4 W Z12 -6- (1) Nm 1/8 (2) (3) (4) -7- (1) (2) (3) (4) (1) (2) (3) (1) (2) 3 (3) 1 3 1 (4) P.5 0 (5) 0 (6) 0.6Nm -8- (1) (2) (3) 12.5Nm (4) ()ON-OFF (5) 79Nm (6) (7) (1) AF AM AFM (2) (1) ( (2) 1.52 (1) -9- 6 (1) 1 1.5 (2) , (3) (4) [][] -10- 8 2 6 3 2 () 5 2 2 (80-) (80-) 2 2 9 EXH 2 2 ON-OFF 1 1 7 2

F O T I D G 3 7 I D G E L 3 H F O T I D G 3 H1 E N 4 0 0 U l e s e t T u b e c o n n e c t i o n D o r t for purse air e]-!-q-U.!-! a m e t e r : 8 m m I D G E L 5 F O T I D G 5 I I D G E L 5 H F O T I D G s H t D e w ( 0 p t i o n : S ) 4 5 1 3 3 5 N / C C o r p . I 6 4 , 1 C h o m e , 5 h i m b a s n i , M i n a t o k u T o k v o 1 0 5 0 0 0 4 , J a p a n T E L . 0 3 3 5 0 2 B ?