Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ±1%F.S., Backflow function available REGULATOR, PRECISION.

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ±1%F.S., Backflow function available REGULATOR, PRECISION.

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ±1%F.S., Backflow function available REGULATOR, PRECISION.

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ±1%F.S., Backflow function available REGULATOR, PRECISION.

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ±1%F.S., Backflow function available REGULATOR, PRECISION.

1

6 1/8 1/4 3/8 Internal External Female thread (Rc, NPT) XSA1 1 x 106 1.3 x 109 1.3 x 1011 XSA2 XSA3 Face seal fitting Compression fitting Female thread (Rc, NPT) 1 Normal Close High Vacuum Solenoid Valve XSA Series *1 *1 Excluding grommet/AC How to Order Face seal fitting Compression fitting XSA 2 1 1 2 S 5 G Face seal fitting Compression fitting 1 1 1 P 5 G XSA 2 Female thread type Female

06-reas-e

Contents Bore size (mm) Set of left nos. @6, @7, @9, #0, #1, #2 Note) @6 @7 @8 @9 #0 #1 #2 Cylinder tube gasket NBR REAS10-PS 10 REAS10-PS Guide shaft gasket NBR Set of left nos. @6, @7, @8, @9, #0, #1, #2 Note) REAS15-PS 15 REAS15-PS Wear ring A 10: Not available Special resin Wear ring B Special resin Note) It may be difficult to replace the cushion seal #2.

IP80-OM00019

No.IP80-OM00019-B / / * 3-4 5 1. 5 2. 6-7 2-1 IP8000 6 2-2 IP8100 7 3. 8-9 3-1 IP8000 8 3-2 IP8100 9 4. 10-12 5. 13 5-1 13 5-2 13 6. 14 7. 15-17 7-1 16 7-2 17 7-3 17 8. 18 9. 18-20 10. 20-22 11. 23-25 11-1 23 11-2 IP8100 23 11-3 IP8000 24 11-4 24 11-5 25 12. 26 13. 27-33 2 A (ISO/IEC)(JIS)*1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

How to Order VHS 4 5 1 0 01 Paint color Nil X1 Standard color Handle, body: Red With locking holes Pressure relief 3 port valve Optional specifications Body size Flow direction: Right Left R 4 5 1/2 1 JIS Symbol (A) 2 Port size Double action 02 03 04 06 10 1/4 3/8 1/2 3/4 1 Thread type 3 (R) 1 (P) Nil F N Rc G NPT OSHA standard (Occupational Safety and Health Administration Department of

Oil Filter FH150 Series

Petroleum, Water-glycol, Emulsion: NBR; Phosphoric ester: FKM Model Port size (Rc) Rated flow rate (L/min) Model/Rated Flow Rate FH FH FH150-02 FH150-03 FH150-04 5 1/4 HOW 10 3/8 20 1/2 Description Part no.

AS-FG

Metric size Inch size Meter-out Meter-in 0 1 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 03 05 07 09 11 13 23 04 06 08 10 12 4 6 8 10 12 With One-touch fitting Stainless steel specifications (SUS303) Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Use 1/8" tube.

5 Port Air Operated Valve SYA3000/5000/7000 Series

side bracket Series One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 8 One-touch fitting for 10 SYA5000 3 SYA3000 5 SYA5000 SYA7000 7 SYA7000 SYA 5 1 C6 20 Body ported 40 SYA 5 1 Base mounted Series 3 SYA3000 5 7 SYA5000 SYA7000 P, R port thread type Type of actuation Nil Rc 2 position single (A)4 2(B) G F N NPT 1 NPTF T 1 (P) (EA)5 3(EB) Port size 2 position double

Series MHR3 11- 3 Finger Rotary Actuated Air Gripper 22- Size: 10, 15

Fittings & Tubing Air Cylinders Rotary Actuators How to Order 11 Vacuum suction type Clean series 11 M D H R 3 10 R M9B S 22 M D H R 3 10 R M9B S Copper, fluorine and silicone-free + Low particle generation Number of auto switches 2 pcs. 1 pc.

CRB2-OM00001

INDEX Precautions for Safety Front matter 1. Product Description 1 1-1 Model 1 1-2 Specifications 1 1-3 Effective Torque 2 1-4 Key (Keyway) Position and Rotation Range 2 2. Internal Construction and Description of Individual Parts 3 2-1 Single Vane Type 3 2-2 Double Vane Type 4 3. Basic Circuit 5 3-1 Circuit Configuration 5 3-2 Preferred Components 5 4.

MHT2

Pressure 0.6 MPa 0.4 MPa 0.2 MPa Opening/Closing angle (Both sides) 12-9-3 4 Series MHT2 Dimensions 8-M6 x 1 mounting thread Thread depth 10 (Both sides) MHT2-32D 4-M6 x 1 thread depth 10 Mounting thread Open 28 Closed 3 Finger closing port Rc 1/8 Finger opening port Rc 1/8 4-M6 x 1 thread depth 15 Mounting thread 4-M6 x 1 bottom hole dia. 5.1 Thread for mounting attachment MHT2-40D 8-M8

MHT2

Finger closing port Rc 1/8 Finger opening port Rc 1/8 4-M6 x 1 thread depth 15 Mounting thread 4-M6 x 1 bottom hole dia. 5.1 Thread for mounting attachment MHT2-40D 8-M8 x 1.25 mounting thread Thread depth 10 (Both sides) 4-M6 x 1 thread depth 10 Mounting thread Open 27 Closed 3 Finger closing port Rc 1/8 Finger opening port Rc 1/8 4-M8 x 1.25 thread depth 12 Mounting thread 4-M8 x 1.25

SYA3000/5000/7000

side bracket Series SYA5000 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 8 One-touch fitting for 10 3 SYA3000 5 SYA5000 SYA7000 7 SYA7000 SYA 5 1 C6 20 Body ported 40 SYA 5 1 Base mounted P, R port thread type Series 3 SYA3000 5 SYA5000 Rc Nil G F 40 SYA 7 1 Base mounted N NPT NPTF T P, R port thread type Type of actuation Rc Nil 2 position single G F Port size 1

VG342

light/surge voltage suppressor VQ DIN terminal (D) VKF VQZ VZ VS VFN Max. 10 (Surge voltage suppressor) Manual override (Non-locking) Applicable cable O.D. 6 to 8 Rc 1/8 (External pilot port) Rc 1/8 (Pilot exhaust) Switching plate (Light) (Mounting hole) Rc 1/2, 3/4, 1 (P port) Rc 1/2, 3/4, 1 (A port) Rc 1/2, 3/4, 1 (R port) 4-9-5

JSY1000/3000/5000 Series (Non Plug-in)

Tube attachment/detachment for One-touch fittings Caution Caution 1) Tube attachment 1. Take a tube having no flaws on its periphery and cut it off at a right angle. When cutting the tube, use tube cutters TK-1, 2 or 3. Do not use pliers, nippers or scissors, etc.

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

Applicable bore size (mm) Flat type +0.048 0 +0.048 0 CJ-T010SUS 10 3.3 A D L MM N R W 4.5 29 18 3.1 2 9 40 22 32 12 Round type CJ-T016SUS 16 5 5.5 35 20 6.4 2.5 14 48 28 38 16 CJ-CF010 CJ-CR010 10 8 10 13 M4 x 0.7 6 10 8 CJ-CF016 CJ-CR016 16 10 12 15 M5 x 0.8 7 12 10 6