EXxx-OMT0014_E

Input "n+1" 2 Power supply (0 V) 3 1 2 1 3 Input No.1 1 5 3 Power supply (0 V) 4 4 4 3 Input 4 Input connector "1" Input No.0 1 4 Input "n" 3 1 2 Input connector "2" 4 Input No.3 5 Ground 4 5 4 3 Caution 3 Input No.2 3 1 After maintenance is complete, perform appropriate functional inspections. Stop operation if the equipment does not function properly.

DOC1003077

The compatibility of equipment is the responsibility of the person Port size IN/OUT: Rc1/4 1 DC24V+ 1 Wetted materials Stainless steel, EPDM, NBR, Ceramic, PPE, PPS, Carbon, PP, POM who designs the system or decides its specifications.

Low Torque Metal Seal Type Rotary Joint Low Torque Metal Seal Type Rotary Joint Low Torque Metal Seal Type Rotary Joint Low Torque Metal Seal Type Rotary Joint MQR MQR MQR MQR Series Series Series Series

Vacuum pads are excluded from this 1 year warranty. Vacuum pads are excluded from this 1 year warranty. Vacuum pads are excluded from this 1 year warranty. Vacuum pads are excluded from this 1 year warranty. Vacuum pads are excluded from this 1 year warranty. A vacuum pad is a consumable part, so it is warranted for a year after it is delivered.

MHT2

Pressure 0.6 MPa 0.4 MPa 0.2 MPa Opening/Closing angle (Both sides) 12-9-3 4 Series MHT2 Dimensions 8-M6 x 1 mounting thread Thread depth 10 (Both sides) MHT2-32D 4-M6 x 1 thread depth 10 Mounting thread Open 28 Closed 3 Finger closing port Rc 1/8 Finger opening port Rc 1/8 4-M6 x 1 thread depth 15 Mounting thread 4-M6 x 1 bottom hole dia. 5.1 Thread for mounting attachment MHT2-40D 8-M8

MHT2

Finger closing port Rc 1/8 Finger opening port Rc 1/8 4-M6 x 1 thread depth 15 Mounting thread 4-M6 x 1 bottom hole dia. 5.1 Thread for mounting attachment MHT2-40D 8-M8 x 1.25 mounting thread Thread depth 10 (Both sides) 4-M6 x 1 thread depth 10 Mounting thread Open 27 Closed 3 Finger closing port Rc 1/8 Finger opening port Rc 1/8 4-M8 x 1.25 thread depth 12 Mounting thread 4-M8 x 1.25

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

8 Rc(PT)1/4 Rc(PT)1/4 Rc(PT)3/8 Rc(PT)3/8 Rc(PT)1/2 Port size C85 Basic, Foot, Front flange, Rear flange, Single clevis, Double clevis, Center trunnion Mounting CG1 * 0.05MPa except locking parts.

VN-OMP0002

-2VN-OMP0002 1 1 1 1 1.5 1.5 1.5 1.5 *3) *3) *3) *3) 3 3 3 3) ) ) ) 1 1 1 1 1 1 1 1 () -3VN-OMP0002 . . . . 1) 5, 2) ( ( ( ( ) ) ) ) () IP65 IP65 IP65 IP65 1) ( ). 50mm 2/s 2) 3) ,, ,.( ). 1) . 2) 5m 3) 4) ,, , . , 1.5~2 . 2 4 VN-OMP0002 3) 0.1MPa , , , , , Nm Rc1/8 79 Rc1/4 1214 Rc3/8 2224 Rc1/2 2830 Rc3/4 2830 Rc1 3638 Rc1 1/4 4042 Rc1 1/2 4850 ( ( ( ( 5, 6, 7 5, 6,

Air Cylinder

C96*-MM0049Q 4 Tube Trunnion bore part number 32 V5032P 40 V5040P 50 V5050P 63 V5063P 80 V5080P 100 V5100P Product image CP96S*V*-* 125 V5125P 4 1 5 2 3 Component parts No. Description Qty Notes 1 Trunnion 2 2 Retaining bracket 4 3 Trunnion pin 2 4 Hexagon socket head cap screw 8 4 32 to 80 8 100, 125 Set screw 5 Assembly Procedure No.

Parallel Type Air Gripper Series MHZ

-6S MHZA2-6C MHZAJ2-6C 26 27 26 27 26 27 6 6 6 6 6 6 4 4 4 4 4 4 Double acting 3.3 (0.74) 6.1 (1.37) Normally open 1.9 (0.43) Single acting Normally closed 3.7 (0.83) Single acting type, normally open Note 1) Values based on pressure of 0.5MPa, gripping point L = 20mm, at center of stroke.

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

A OUT IN A OUT IN 1 2 3 B B EXH. EXH. H 28 30 36 44 54 G 33 42 44 50 61 F 45 55 58 65 76 E 22 21 26 D 34 46 63 67 78 C 40 53 70 75 90 B 20 29 39 42 53 A 59 78 107 110 134 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 3

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Auto Switch Proper Mounting Position (Detection at Stroke End) D-A93 12 16 to 25 A B W A B W D-M9B/M9N 12 16 to 25 A B W A B W B D-A93 B D-M9B/M9N/M9P Bore size (mm) A 11.5 W 4 A 15.5 W 5.5 12 16 20 25 0.5 4.5 12 0 4.5 16 4 6 16 3.5 1 20 7.5 2.5 17 5.5 -1 21 9.5 0.5 Specific Product Precautions Be sure to read this before handling. Mounting Caution 1.

FEP Tubing (Fluoropolymer)

Note 4) Fluid Air, Water Note 1), Inert gas Note 2) One-touch fittings: Series KQ, KJ Fluoropolymer fittings: Series LQ Applicable fittings 2R 20C 1 2.3 1.5 1 1.7 1 1.5 1 0.7 1 Fixed end 100C 0.4 0.85 0.55 0.4 0.6 0.4 0.55 0.4 0.25 0.4 Max. operating pressure (MPa) 200C 0.2 0.4 0.2 0.3 0.2 0.2 0.2 0.3 0.3 0.1 Refer to below Max. Operating Pressure.

AMX-OM-Q018E

L/min (ANR) {In the case of inlet air pressure 0.7MPa} *Note4 Regulator construction (about Type V) Relief type Port size 1/8 1/4 1/4 3/8 1/8 1/4 1/4 3/8 1.4 1.4 1.9 2.1 3.0 3.1 1.4 1.4 1.9 2.1 3.0 3.1 Mass kg Model Specifications IDG30LAV4 IDG50LAV4 IDG60LAV4 IDG75LAV4 IDG100LAV4 IDG60SAV4 IDG75SAV4 IDG100SAV4 AFM40-A Mist separator Micro mist separator AFD40-A Component equipment AR40

CLAEAN AIR MODULE CLAEAN AIR MODULE CLAEAN AIR MODULE CLAEAN AIR MODULE LLB Series LLB Series LLB Series LLB Series

Vacuum pads are excluded from this 1 year warranty. Vacuum pads are excluded from this 1 year warranty. Vacuum pads are excluded from this 1 year warranty. Vacuum pads are excluded from this 1 year warranty. Vacuum pads are excluded from this 1 year warranty. A vacuum pad is a consumable part, so it is warranted for a year after it is delivered.

Sine Rodless Cylinder Series REA

range Usable range Usable range 10 10 10 5 5 5 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 1 0 1 2 3 4 5 6 8 9 10 11 13 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 7 12 Distance from cylinder shaft center: L0 (cm) Distance from cylinder shaft center: L0 (cm) Distance from cylinder shaft center: L0 (cm) 50 63 1000 1000 Recommended driving force: Fn(N) Recommended driving force: Fn(N) 500 400 500

CV/MVGQ

28 32 14 24 1.6 4.5 8 4 14 84 12 M8 x 1 72 15 M4 x 0.7 9.5 60 34.5 12.5 52.5 28 42 20 33 2.3 5.5 8 5 20 85 18 M10 x 1 73 15 M5 x 0.8 9.5 61 40.5 12.5 52.5 10-15-15

FREE MOUNT CYLINDER

PRODUCT NAME FREE MOUNT CYLINDER MODEL/ Series (D)U SERIES (D)UK SERIES (D)UW SERIES (D)UKW SERIES 1/10 Contents Safety Instructions 2 1. Specifications 4 2. Installation and Handling 6 3. Maintenance 9 4. Basic Circuit for Cylinder Operation 9 5.

Speed Controller: Standard Type Series AS In-line Type 1

L1 L2 L3 L4 L5 L6 L7 L8 D Model Bore size ASS AS2000-01 AS2000-02 AS3000-02, 03 1 8 Rc Rc Rc , 40 40 56 30 30 45.5 5 5 5.25 17 23 25 10 11.5 13.2 15.5 17 20.6 54.5 56 68 50 51.5 61 16 20 26 4.5 4.5 5.5 1 4 1 4 ASR Effective thread depth 6 8 3 Dimensions: AS5000 ASF 2-1/4 to 1/2 2-M4 x 0.7 Effective thread depth 7 15-9-31

Low Profile

P) port 2(A) port 1 (IN) 3-port SX090/Universal Base hole dimension q 10 2 x M2 x 0.4 9.8 Thread depth: 6 or more Tightening torque: 0.1 to 0.14 Nm 3 4 4 1.7 1.7 11.6 0.8 2.45 1.5 2.3 (Lead wire AWG#26) 300 54 3.4 10 5 3 3 1.7 10 Base hole dimension w Mounting screw (Included) M2 x 11 2 x M2 x 0.4 Thread depth: 6 or more Tightening torque: 0.1 to 0.14 Nm 3 4 4 (11.6) 4 4 2.1 1.7 1.7 3 2.45

5 Port Solenoid Valve Body Ported Series VQZ1000/2000/3000 Plug Lead Unit Single Unit [Option] Made to Order How to Order Valve (For details, refer to page 975.) SJ VQZ 1 1 2 5 M 1 C6 1 SY CE compliant IP65 compliant Series SV — — Nil Nil 1 VQZ1000 body w

SZ Type of actuation 2 position single 3 position pressure center Port size [4(A), 2(B) port] VP4 (A) 4 (B) 2 (A) 4 (B) 2 Note 1) 5 VQZ3000 VQZ2000 VQZ1000 Symbol Port size 1 C3 C4 C6 C8 C10 M5 02 3.2 one-touch fitting 4 one-touch fitting 6 one-touch fitting 8 one-touch fitting 10 one-touch fitting M5 thread Rc 1/4 1 (P) 3 (R2) 5 (R1) 5 (R1) 1 (P) 3 (R2) S0700 2 position double 3 port for