AS

C D E F G H J K L AS100P-04-04 AS200P-04-04 AS200P-06-06 AS250P-06-06 AS300P-08-08 AS300P-10-10 23.9 31.4 31.3 33.6 37 37.5 41.7 51.4 52.3 54.6 60.5 63.5 26.7 36.4 36.3 38.6 42 42.5 38.9 46.4 47.3 49.6 55.5 58.5 26 30 30 32 36 39 9.3 9.3 11.6 12.8 15.2 18.5 17 17.1 18 18 19 22 4 4 6 6 8 10 4 4 6 6 8 10 10 13.6 13.6 17 22 22 12.7 12.7 13.5 16.8 18.5 21 17.4 18.9 19.9 24.1 27 30.5 22.4 25.7

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

13.3 ASV 24.5 28.5 9.3 19.2 47 (48) AS32l1FSl-U02-08 8 13.2 22.7 33 14.2 AS32l1FSl-U02-10 10 15.9 26.7 37 35.7 15.6 48 (49) AS32l1FSl-U02-12 12 18.5 29.7 40 34.5 17 50 (51) AS32l1FSl-U03-06 6 1/4 19 16.6 AK 10.4 21.8 32.1 28.7 13.3 24.5 28.5 9.3 19.2 36 (37) AS32l1FSl-U03-08 8 13.2 22.7 33 28 14.2 AS32l1FSl-U03-10 10 15.9 26.7 37 15.6 39 (40) AS32l1FSl-U03-12 12 18.5 29.7 40 26.8 17 41 (42

AZ1000

freezing) 1.6 2 x 10-11 Pam3/sec 1 x 10-10 Pam3/sec 4 x 10-9 Pam3/sec Ra 10 in. (0.25 m) Face seal, Tube weld 7 psig (0.048 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Bottom mount (Option: panel mount) 2.2 in3 (36 cm3) Inboard leakage Outboard leakage Leak rate Across the seat leak Surface finish Connections Supply pressure effect Installation Internal volume 42

Round Type Hydraulic Cylinder

Size Tolerance +0.2 +0.1 +0.2 +0.1 +0.3 +0.1 +0.3 +0.1 +0.058 0 +0.058 0 +0.070 0 +0.070 0 With CDP-3 0.013 0.035 0.013 0.035 0.016 0.043 0.016 0.043 AD-EI-20 AD-EI-25 AD-EI-32 AD-EI-40 Y-020B Y-032B Y-04D Y-04B 9 9 16 16 9 9 12 12 20 25 32 40 45.5 45.5 52 60 35.5 35.5 42 50 10 10 12 12 3.2 3.2 4 4 16 18 22 22 36 38 55 55 20 25 32 40 5 5 13 13 20 20 24 24 14 14 25 25 18 18 38 38 M8 x 1.25

INFORMATION For material handling and clamping of small workpieces 34 mm Power Clamp Cylinder Compact Type New New ø25, ø32 Lightweight Compact 53 mm High clamping force Lock function Lightweight Weight : 580 g (ø25) 192.4 mm Width : 34 mm Compact Heigh

switch 2 x 4 x M5 x 0.8 depth 6 G1/8 Unclamping port A D E G1/8 Clamping port Bore size 32 [mm] Bore size Arm opening angle A B C D E 25 90 148.4 69.4 72 30 30 105 152.5 73.5 32 90 157.7 73.6 71.5 40 35 105 3 Power Clamp Cylinder CKZT -X2797 -X2798 Dimensions: With Manually Operated Handle CKZT S-X2798 R L Refer to the CKZT S-X2797 (page 3) for dimensions other than those shown below. 47 42

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-A9/A9V Rotating angle Size Operating range ( ) Operating range ( ) Proper mounting position A (mm) Proper mounting position A (mm) 90 13 9 30 42 81 180 22 18 Operating range at proper mounting position /2 90 22.5 18.5 50 30 44 180 39 35 Most sensitive position Operating range of single auto switch Values which include hysteresis are for guideline purposes

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

Size: 10 to 50 B A Magnet Operating range at proper mounting position (Lm/2) Most sensitive position Operating range of single auto switch Lm Reed auto switch Solid state auto switch Hysteresis angle DM9 DA9, DA9V Size Rotating angle Operating angle m 10 10 10 10 Operating angle m 10 10 10 10 B 45 62 68 83 B 49 66 72 87 A 27 35 39 49 A 31 39 43 53 Hysteresis angle 90 80 65 50 42 35 30 24

SMC Pneumatic Clean Series

B 15 LT LH W Y X 2-LC (Knock pin position) W Y M X LX LZ Z LS + Stroke ZZ + 2 Stroke 4-LD (mm) 30 LH 78 LS 3 LT 54 LX 71 LZ B 54.5 70.5 82.5 4 LC 4 M 16.5 X 7 LD 10 W 8.5 Y Z 63.5 75.5 75.5 205 ZZ Bore size 40 40 45 91 91 4.5 4.5 66 82 86 106 50 63 5 5 5 5 22 22 10 12 11 13 242 242 17.5 17.5 Other dimensions are the same as basic style. 42 Air Cylinder 2122CG1W/ CG1W 1011Rod side flange

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

preparation equipment 16 17+ST 4-M3 x 0.5 thread depth 4.5 3.5 8 7.5 2-M5 x 0.8 thread depth 4 (Piping port) 21 8 Steel ball 34 M3 x 0.5 thread depth 3.5 Vacuum suction port 35 Note) 11-, 22: Vacuum suction port 12-, 21: Relief port 61+ST ST 15 49.5+ST 3.5 8 13 1 M5 x 0.8 x 4L 4 16 14+ST 4.5 4.5 (Hexagon socket head set screw) M8 x 1.25 x 8L (Bolt holder) 1 40 45 45 3 3 330.2 330.2 330.2 42

Low Profile Guide Type

head bolt Chrome molybdenum steel Chromate Nickel plated Hexagon socket head bolt Chrome molybdenum steel Rolled steel Carbon steel Hexagon socket head bolt Flat washer Square nut Hard anodized Chrome molybdenum steel Hexagon socket head plug Nickel plated (Hexagon socket head taper plug for 25) 41 Chrome molybdenum steel Hexagon socket head plug Cylinder tube gasket Piston seal Scraper 42

E-P HYREG

Proper tightening torque (Nm) Connection thread size (R, NPT) 3 to 5 8 to 12 15 to 20 20 to 25 28 to 30 36 to 38 40 to 42 48 to 50 48 to 50 1 8 1 4 3 8 1 2 3 4 Ground nut 1 1 1 2 Washer Retaining screw 1 4 1 2 Grommet (Rubber) Housing Operating Fluid Caution 1.

VZM400

3 Stainless steel y POM u POM 5-6-42 5 Port Mechanical Valve Series VZM500 Series VZM500 Basic VZM550-01-00 Accessory mounting hole (Pilot exhaust port) SA JIS Symbol VA SA VA 0.5 MPa supply VM 1.0 mm P.T. 16 N F.O.F. VR 2-3.2 mounting hole 2.0 mm O.T. 3.0 mm T.T.

VZM500

3 Stainless steel y POM u POM 5-6-42 5 Port Mechanical Valve Series VZM500 Series VZM500 Basic VZM550-01-00 Accessory mounting hole (Pilot exhaust port) SA JIS Symbol VA SA VA 0.5 MPa supply VM 1.0 mm P.T. 16 N F.O.F. VR 2-3.2 mounting hole 2.0 mm O.T. 3.0 mm T.T.

Air Suction Filter

ZFA200 Description Gasket Element AL-204H AL-205H EJ001H-030N EJ101H-030N Element size Element size (mm) 43 x 42 x 12 43 x 40 x 22 Element Replacement 1) Stop operation and reduce the filter's internal pressure to atmosphere. Element 2) Loosen the stop pin and open the cover. 3) Hold the knob on the top of the element and take it out.

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet M5 x 0.8 Effective thread depth 4 3 42 24.5 11 6 48 27 14.5 10 58 31 20.5 N S U F GN GS J K A ZP3 Y 04 06 08 B B5 15 61 44.5 10 20 68.5 52 JB K Dimensions Per Vacuum Inlet: One-touch Fitting 20 B Model 4 D E F Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.

Ejector Valve Unit Series ZYY/ZYX

ZU A B Manual override ZL A side: Orange (for supply valve) B side: Green (for release valve) 10.8 ZY ZF Release flow rate adjusting needle ZP (With indicator light and surge voltage suppressor) 33.3 Pressure setting trimmer (M3: Port PE) Pilot valve exhaust port SP Hysteresis setting trimmer Silencer ZCUK (AN203-KM8) 62 57 AMJ 50 42 34 29.5 23.5 21 AMV 10 Vacuum port AEP 6 One-touch fitting

S Couplers Series KK/KKH/KK13

or more 114 or more 29 or more 30 or more 38 or more 39 or more 56 or more 58 or more 70 or more 76 or more 82 or more 118 or more 144 or more 16 or more 20 or more 24 or more 30 or more 32 or more 40 or more 50 or more 48 or more 60 or more 64 or more 80 or more 3.2, 1/8" 4, 5/32" 3/16" 6 1/4" 8, 5/16" 10 3/8" 12 1/2" 16 T 28 to 30 NPT, R 1/2 28 to 30 NPT, R 3/4 36 to 38 NPT, R 1 40 to 42

Safety Instructions

Fluid Note 1) Translucent (material color) Air, Water, Inert gas Fluoropolymer fitting LQ1 series 20C 100C 200C 260C Applications: Food, semiconductor, medical, automobile and machine tools fields Applicable fittings Note 2) 1.4 0.7 0.35 0.2 15 9 1.6 0.9 0.45 0.23 25 15 260C Modified PTFE (Polytetrafluoroethylene resin) 1.4 0.7 0.35 0.2 20 10 1.4 0.7 0.35 0.2 40 23 0.9 0.5 0.25 0.15 75 42

NCA1

M16 x 1.25 07 : 6-32 35 : 1 1/4-7 68 : M8 x 1.0 96 : M36 x 1.5 08 : 6-40 36 : 1 1/4-12 69 : M8 x 1.25 97 : M36 x 2.0 09 : 8-32 37 : 1 3/8-6 70 : M10 x 1.25 10 : 8-36 38 : 1 3/8-12 71 : M10 x 1.5 11 : 10-24 39 : 1-14 72 : M12 x 1.5 12 : 10-32 40 : 1 1/2-16 73 : M12 x 1.75 This chart represents all current 13 : 1/4-20 41 : 1 1/2-12 74 : M14 x 1.75 thread codes and are not all 14 : 1/4-28 42

NCQ8

1-1/4 to 2"st 1/4" to 1"st Z W R Q P O N M2 M1 K J I H E D 150 (1-1/2") 200 (2") 250 (2-1/2") 0.56 0.63 0.50 0.70 2.38 2.00 1.75 3/8-24UNF 2.63 0.19 0.50 1.55 2.19 0.22 0.34 0.25 0.20 2.19 NPT1/8 0.56 0.75 0.70 2.31 2.53 1.69 1/2-20UNF 3.13 0.20 0.63 1.90 2.69 0.22 0.34 0.25 0.20 2.73 NPT1/8 0.69 0.75 0.70 3.06 2.84 2.19 1/2-20UNF 3.75 0.39 0.63 2.30 3.25 0.28 0.41 0.33 0.26 3.23 NPT1/4 42