CJ2

4 !

MGP

YY depth YL T-slot dimensions XAH7 depth XL b a c d X 0.02 X XAH7 e (mm) XB e 9.5 11 13.5 18.5 Bore size (mm) 32 40 50 63 d 3.5 4 4.5 7 c 5.5 5.5 7.5 10 b 10.5 10.5 13.5 17.8 a 6.5 6.5 8.5 11 XAH7 XC XL Section XX detail Section XX WB WA Z Section XX 4-MM depth ML Bottom view HA: T-slot for hexagon bolt Z WA L 4-OA through 4-NN through Section XX 4-OB depth of counter bore OL X 0.02 X 0.02

MGP

4 @1 w @3 !0 !2 @2 r o e @4 !0 y !3 12, 16 under 50 stroke 12, 16 over 30 stroke !5 20, 25 over 30 stroke under 100 stroke 12, 16 over 50 stroke @0 Under 50 stroke 20, 25 over 50 stroke Under 30 stroke 20, 25 over 100 stroke MGPM32 to 100 MGPL32 to 100 i !8 !7 u q y !1 !9 @3 !0 !2 @2 r o e !4 @4 @1 !0 w !

HRX-OM-X071

. 4-2 4.2.1 Operation . 4-2 4.2.2 Operation restart when alarm is generated . 4-3 4.2.3 Stopping the product . 4-5 4.3 Adjustment of bypass valve . 4-6 4.4 Check items after starting . 4-6 Chapter 5 Display and Setting of Various Functions . 5-1 5.1 List of Functions . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.3 List of parameters . 5-6 5.3.1 Main Menu . 5-6 5.3.2 Alarm display

2/3 Port Valve

C.O. 4 220V AC 50/60Hz 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 10 5 24V DC 6 12V DC 7 240V AC 50/60Hz 15 2 9 Other 20 3 Option 25 4 1 1 1 2 Valve size 5 to 7 32 5 1 4 1 2 40 6 50 7 Note) Only air operated type.

Vacuum

-EC-M zx1-DR1-4 sra.3-4) NZXi071-EC-M zxl-DR16-4 NZZXl04-TB-A r:::r:l::t: l:l:l:lrrl:l:l:l :r:t:41:1it!

PC Wiring System Series PCW

1 2 3 4 CN0 1 2 3 4 CN1 1 2 3 4 CN2 1 2 3 4 CN3 1 2 3 4 CN4 1 2 3 4 CN5 1 2 3 4 CN6 1 2 3 4 CN7 1 2 3 4 CN8 1 2 3 4 CN9 1 2 3 4 CNA 1 2 3 4 CNB 1 2 3 4 CNC 1 2 3 4 CND 1 2 3 4 CNE 4 3 2 1 24 VDC 2 *S2 (S2) 3 0 VDC CNF 4 S1 INPUT Input connector PCW-EC16YBR00 PCW-EC16YBR01 [Applicable PLC example: OMRON Corporation C200H-OD219] 115 114 113 112 111 110 109 108 107 106 105 104 103 102 101 100

HRX-OM-R016

Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Setting of circulating fluid temperature . 4-2 4.3 Preparation of circulating fluid . 4-3 4.4 Starting and Stopping . 4-6 4.4.1 Starting the product . 4-6 4.4.2 Stopping the product . 4-7 4.5 Check items after starting . 4-8 4.6 Adjustment of Circulating Fluid . 4-8 Chapter

Vacuum

-EC-M zx1-DR1-4 sra.3-4) NZXi071-EC-M zxl-DR16-4 NZZXl04-TB-A r:::r:l::t: l:l:l:lrrl:l:l:l :r:t:41:1it!

HRX-OM-W038

Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Setting of circulating fluid temperature . 4-2 4.3 Preparation of circulating fluid . 4-3 4.4 Starting and Stopping . 4-6 4.4.1 Starting the product . 4-6 4.4.2 Stopping the product . 4-7 4.5 Check items after starting . 4-8 4.6 Adjustment of Circulating Fluid . 4-8 Chapter

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Flow Rate and Sonic Conductance AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Model Metric size 3.2, 4, 6 10, 12 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 Tubing O.D. 1/8", 5/32" 1/8", 3/16", 1/4", 1/4", 5/16", 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Flow rate (L/min (ANR)) 180 230 100 260 390 660 790 460 920 1580 1710 Controlled

Slider Type Ball Screw Drive/11-LEFS Series

L4 [mm] L4 1000 1000 1000 1000 X Motorless 500 500 500 500 LAT 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 0 10 20 30 40 50 60 LZ Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 LC3F2 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 4 8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6

EXxx-OMY0006CN

I/O Table 10-3 Byte0 Bit 0 0 1 4 0: OFF, 1: ON 1 1 2 4 0: OFF, 1: ON 2 2 3 4 0: OFF, 1: ON 3 3 4 4 0: OFF, 1: ON 4 4 1 2 0: OFF, 1: ON 5 5 2 2 0: OFF, 1: ON 6 6 3 2 0: OFF, 1: ON 7 7 4 2 0: OFF, 1: ON 1oo247Byte 0Bit 470 Table 10-4 Byte 1 Status bits (Safety Mode (Module Passivation/xxx)) Bit 0: NOKSI PROFIsafe 1: OK PROFIsafe 0 Bit 1 -7 Byte 2-5: PROFIsafe 53 No.EX##-OMY0006CN

SMC Wireless System EtherNet/IP ® compatible

diagnostic information checking the LED indication and the system diagnostic information, and refer to the operation manual for the digital and analogue unit. (4)-1 Short-circuited power supply 3 voltage for control and input (US1). (5) Replace the valve, and check the operation. (4)-2 Short-circuited power supply voltage for output (US2). (4)-3 Short-circuited output load. (4)-4 Analogue

Compressed Air Preparation Filter

4 2 4 3 Compressed air [7 : 4 : 4] Line Filter AFF Mist Separator AM Compressed air [6 : 8 : 4] Line Filter AFF 2 7 3 1 4 2 Mist Separator AM Micro Mist Separator AMD Micro Mist Separator AMD Activated Carbon Filter AMK 1 7 2 1 4 1 Certified by a third party organization Contaminants ISO 12500: Filters for compressed air test methods ISO 8573: Compressed air Particles ISO 12500-3:2009 Filters

Air Pilot Operated

1&4 I Spdng-spooltuln xTmtl0 4 Orlng -Slv ARRt6A{14 sltw a3lambt-congEt3 ot spoot end st.v (metchd s6t) end (4) detjt4 6 XT@4 7 Q!!e, axT01&5 I P[ot cotr asrmDty with oprator.

Air Pilot Operated Series NVSA

1&4 I Spdng-spooltuln xTmtl0 4 Orlng -Slv ARRt6A{14 sltw a3lambt-congEt3 ot spoot end st.v (metchd s6t) end (4) detjt4 6 XT@4 7 Q!!e, axT01&5 I P[ot cotr asrmDty with oprator.

Rotary Actuator/Vane Style Series CRB2

P611070-4 P611090-4 P611060-4 P611080-4 P611010-4 P611070-4 P611090-4 P611060-4 P611080-4 P611010-4 MSQ Single/Double type Series CRB2 2 Switch Block Unit Part No. MSZ Auto switch unit comes with one right-hand and one left-hand switch blocks that are used for addition or when the switch block is damaged. CRQ2X MSQX Unit part no.

HRX-OM-R005

Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Setting of circulating fluid temperature . 4-2 4.3 Preparation of circulating fluid . 4-3 4.4 Starting and Stopping . 4-6 4.4.1 Starting the product . 4-6 4.4.2 Stopping the product . 4-7 4.5 Check items after starting . 4-8 4.6 Adjustment of Circulating Fluid . 4-8 Chapter

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

NPT 1/4 AS220-F02-ST G 1/4 AS220-02-ST Rc 1/4 R 1/4 17 18 36.7 1.5 18 40.7 27.2 7 19.5 17.5 AS320-N02-ST NPT 1/4 NPT 1/4 AS320-F02-ST G 1/4 AS320-02-ST Rc 1/4 R 1/4 49.3 1.5 22.4 55.3 30 9.5 24.3 19 22.5 AS320-N03-ST NPT 3/8 NPT 3/8 AS320-F03-ST G 3/8 AS320-03-ST Rc 3/8 R 3/8 47.4 1.5 20.8 53.7 30 9.5 24.3 19 22.5 AS420-N04-ST NPT 1/2 NPT 1/2 AS420-F04-ST G 1/2 AS420-04-ST Rc 1/2 R 1/2 24