MLGP

7 8 9.5 10 D-Y7BAL 5 5 6 6 6 6 6 6.5 CL D-P5DWL 4 4 5 4 4 Since this is a guideline including hysteresis, not meant to be guaranteed.

MXF

M 12 Operating port 2-M5 x 0.8 0.5 25 (Table length) N 2 ( 1): The number of pitches 27 7 12 J 3 Z Max. 9.5 ZZ H G 33.5 (mm) 6 Z M J NN H G N ZZ Model 5H9 +0.030 0 depth 5 MXF20-30 91 91 57 4 30 29 4 104 MXF20-50 113 113 77 4 45 36 4 126 MXF20-75 162 162 125 6 45 40 6 175 MXF20-100 211 211 175 6 60 59 6 224 8-6-13 14 Series MXF Proper Auto Switch Mounting Position (Detection at stroke

HRX-OM-T004

Communication alarm function . 6-1 6.1 Communication alarm occurs . 6-1 6.2 Communication alarm reset . 6-2 6.3 Setting and checking . 6-2 6.3.1 Setting and checking items . 6-2 HRS090 Series HRX-OM-T004 Contents 6.3.2 Setting and checking . 6-3 HRS090 Series HRX-OM-T004 Chapter 1 Read before using Chapter 1 Read before using The communication of this device consists of contact input/output

MLGP

7 8 9.5 10 D-Y7BAL 5 5 6 6 6 6 6 6.5 CL D-P5DWL 4 4 5 4 4 Since this is a guideline including hysteresis, not meant to be guaranteed.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

D-F9, D-F9W 5 4 D-Z7, Z80 9 9 11 A B D-Y59, Y7P D-Y7W 6 6 6 Switches cannot be mounted in some cases.

Rotary One-touch Fittings Manifold Series KM

N FA FB L1 L3 L4 L5 L6 P Q1 Q2 MA MB KM11-04-08-6 6 65 40 61.5 47 73 55 86 22 30 32 44 44 62 8 4 10.6 10 18 29.5 19.5 27 12 16 18.5 6 KM11-04-08-10 10 86 KM11-06-10-6 6 76 KM11-06-10-10 10 102 10 6 13 10 19.5 31.5 21.5 31 13.5 17 21 7.5 KM11-08-12-6 6 85 KM11-08-12-10 10 116 12 8 11.5 22.5 35.5 24 34.5 14.7 18.5 22 9 15.5 KM12/Dimensions Inch H (Hex.) Thead NPT T Applicable tube O.D.

IDX-OM-W026

. i-4 i-2-7 . i-4 i-2-8 . i-5 i-2-9 . i-5 i-3 . i-6 i-4 / . i-7 1-1 . 1-1 2-1 . 2-1 2-2 . 2-1 2-2-1 . 2-1 2-2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-2 2-2-5 . 2-3 2-3 . 2-4 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-2 5-1 . 5-1 5-2 . 5-3 6-1 . 6-1 6-2 GWP . 6-1 6-3 . 6-2 6-4 . 6-3

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

6 !6 Component Parts Description Material Description Material No.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

6 !7 !

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Rated voltage 5 6 24 VDC 12 VDC Note 1) Light/surge voltage suppressor is built-in.

MHF2

6 Parts list Parts list Note Material No. Description No.

High Vacuum Angle Valve, XL Series

Orifice mm Differential pressure MPa Port A Pa Internal Fitting External XSA1-12 XSA1-22 XSA2-22 XSA2-32 XSA3-32 XSA3-43 2 3 0.8 VCR 0.3 3 6 Direct solenoid operation (N.C.) 10-11 1.0 1/4 10 -6 10 -9 10 -11 P.32 to P.34 2 0.3 SWJ 4.5 11 10 -10 0.8 0.3 6 3/8 19 Differential Pressure: Indicates the maximum operable pressure difference between port P and port A.

CE

6 Port joint Stainless steel Valve seal NBR 40 to 63 #6 !

Bernoulli Gripper

(Aluminum: 6.5 g, Stainless steel: 17.6 g) ZNC30 to 80: The weight value is for the basic type without a plug. *6 For pressure sensor details, refer to the PSE540 series in the Web Catalog and the Operation Manual. 6 ZNC Series Lifting Force ZNC20m ZNC30m ZNC40m 12 16 6 14 10 5 12 8 Lifting force [N] Lifting force [N] Lifting force [N] 4 10 6 8 3 6 4 2 4 2 1 2 0 0 0 0 0.6 0.5 0.4 0.3 0.2

CE

6 Port joint Stainless steel Valve seal NBR 40 to 63 #6 !

HRX-OM-R028

Communication alarm function . 6-1 6.1 Communication alarm occurs .6-1 6.2 Communication alarm reset.6-2 6.3 Setting and checking.6-2 6.3.1 Setting and checking items.6-2 6.3.2 Setting and checking.6-3 HRSH Series HRX-OM-R028 Chapter 1 Read before using Chapter 1 Read before using The communication of this device consists of contact input/output communication and serial communication.

C95

6 !7 !8 !

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

S) (mm) Dimensions PB S Model LVD2-T LVD3-T LVD4-T LVD5-T PA 13 26 A B 26 29.5 Dimensions (mm) A B C D E F G H J K L M N P Q T U Model LVD2-T LVD3-T LVD4-T LVD5-T 30 30 61 56 14.5 104 35 13 4 20 44 7 30 6 31.5 17 M5 to 0.8 35 35 79.5 62 17.5 136 42.5 17.5 6 22 50 7 37 6 36 21 M5 to 0.8 35 35 82 62 20 137 45 17.5 6 22 50 7 39 6 36 21 M5 to 0.8 45 45 105.5 76 25 169.5 65 17.5 8 32 64 7 52 6

CG5-S

(mm) Stroke range A Bore size (mm) AL P B1 B C D FX FD FT GA GB H H1 I J K KA M MM NA S ZZ 20 15.5 to 350 1/8 18 13 50 16.5 8 36 5.5 6 18 12 35 5 31 M4 x 0.7 5 6 3 M8 x 1.25 29 83 121 25 19.5 to 400 1/8 22 17 50 18.5 10 36 5.5 6 18 12 40 6 33 M5 x 0.8 5.5 8 3.5 M10 x 1.25 29 83 126.5 32 19.5 to 450 1/8 22 17 50 20 12 38 6.6 6 18 12 40 6 38 M5 x 0.8 5.5 10 3.5 M10 x 1.25 35.5 85 128.5 40 27

EXxx-OMU0020CN

US1 LED . 6-6 US1 LED US1 OFF US1 OFF , (17 V ) US1 (17 V 20.4 V) ON US1 ON 21.6 V 6.4.6. US2 LED . 6-7 US2 LED US2 OFF US2 OFF , (17 V ) US2 (17 V 21.6 V) ON US2 ON 22.8 V 49 No.EX-OMU0020CN 6.5.