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(Panel adaptor A+Panel adaptor B) ZS-22-A Standard Specifications Positive pressure Item Vacuum 1OOkPa{1.02kgticm2} type 1MPa{IO.2kgl/cm1 ~pe Panel adaptor A Z$2201 Model ZSE4B ZSE4B I ZSE4B ISE4LB ISE4LB I ISE4LB ISE4B ISE4B ISE4B -0-25 -0 -26 -0 -65 -Ql-25 -0-26 -0-65 -0-25 -0-26 -0 -65 Switch Pressure 10 -101kPa 1 0 1OOkPa -0.1 1MPa Panel adaptor B ZS-22-02 ; display range {75 -760mmHgl

CXWM/CXWL

A B C D E F A B C D E F G H Pressure port Pressure port Right Left Left Right Left Right Right Left Left Right Right Left Left Right Operating direction Operating direction There are 9 possible reciprocating piping methods. There are 16 possible reciprocating piping methods.

212

0 q 4 Series LVR Dimensions Integral ttings/LQ3 4 x 7 Mounting hole 1/8 (Rc, NPT) Pilot port A H D B G Model A B C D E LVR20-Z07(06) 40 40 49.3 68 20.1 LVR40-Z11(10) 82.5 82.5 89 115 33 LVR40-Z13(12) 82.5 82.5 89 115 33 LVR50-Z19 100 100 117.5 135 45 Breathing port M5 x 0.8 IN Model F G H J LVR20-Z07(06) 8 27 56 88 LVR40-Z11(10) 14 64.5 100 150.5 LVR40-Z13(12) 14 64.5 100 159.5 LVR50-Z19

Gun Type Ionizer

Contamination and wear of emitters b. Loosening and damage of nozzles c. Twists or crushing of connected tubes d. Hardness and deterioration of connected tubes e. Air leakage 192

Nozzle Type Ionizer

Part A Part B 5. Avoid using in a place where noise (electromagnetic wave and surge) is generated. Please take into consideration that the One-touch fittings for supplying air, need enough space for the air tubing to be easily attached/detached.

HRL

POINT POINT POINT POINT When heating the circulating fluid, the high-pressure, high-temperature refrigerant gas is bypassed into the evaporator by expansion valve B to heat the circulating fluid.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Compressed Air Preparation Filter

WQ Edition B Safety Instructions Be sure to read the Handling Precautions for SMC Products (M-E03-3) and Operation Manual before use.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Example) 10-ARP30K-03BE-1RY Clean room compliant, copperfree, fluorine-free, silicon-free Clean room compliant Copper-free, fluorine-free Symbol 20 30 40 Body size Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without

sizeManifold base weight W (g) n: StationsP, EA, EB portA, B portSS5X7-20SX7 20Single base/B mountCommon SUP/Common EXH2 to 20 stationsValveRc 1 4Rc 1 4C8 (One-touch fitting for ?

sizeManifold base weight W (g) n: StationsP, EA, EB portA, B portSS5X7-20SX7 20Single base/B mountCommon SUP/Common EXH2 to 20 stationsValveRc 1 4Rc 1 4C8 (One-touch fitting for ?

sizeManifold base weight W (g) n: StationsP, EA, EB portA, B portSS5X3-41SX3 40Single base/B mountCommon SUP/Common EXH2 to 20 stationsLocationDirectionRc 1 8M5 x 0.8C4 (One-touch fitting for ?

base weight W (g) n: StationsP, EA, EB portA, B portSS5X5-20SX5 20Single base/B mountCommon SUP/Common EXH2 to 20 stationsValveRc 1 4Rc 1 8C4 (One-touch fitting ?

COM (Type 41N, 42N)12, 24 VDC, 1.10231 lb, ModelApplicable valveManifold typeP (SUP)/R (EXH)Valve stations (1)A, B port specificationsPort sizeManifold base weight W (g) n: StationsApplicable flat ribbon cable connectorInternal wiring (2)Rated voltageP, EA, EB portA, B portSS5X3-41PSX3 40Single base/B mountCommon SUP/Common EXH4 to 12 stationsLocationDirectionRc 1 8M5 x 0.8C4 (One-touch

EX500-DX_e

System configuration EX500-DX A EX500-DX B How to order: EX500-AC 030 SSPS Power supply cable Cable length (L) 003 0.3 [m] Connector GW unit SSPS Socket side: Straight Plug side: Straight With SI unit Valve manifold (SY/SV/VQC/S0700 Series) 005 0.5 [m] Thank you for purchasing an SMC EX500 Series Fieldbus system.

PSE200.eng

ON = A (A B)/4 A = Max. pressure OFF = B + (A B)/4 B = Min. pressure Perform zero clear operation again after restoring the applied pressure to an atmospheric pressure condition. Do not use the product in a place where static electricity is a problem. Otherwise it can cause failure or malfunction of the system.

PFG3x.eng

Next, mount part (b) to the body from the rear and insert it until (b) comes into contact with the panel for fixing. Panel mount adapter (Part No.: ZS-46-B) Panel mount adapter + Front protective cover (Part No.: ZS-46-D) Flow exceeding the upper limit of the set flow range is applied. Display unit setting Press the or button to change the display units.

HRX-OM-M090

If foreign objects with a size of 20 m or more are likely to enter, install the particle filter. 6 Filter Rc1/2 20m Note FQ1011N-04-T020-B-X61 Note) The filter shown above cannot be directly connected to the thermo-chiller.

XL-OMY0001

8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 2 XL-OMY0001 / 1 1.5 *3) 3)1 1 () 3 XL-OMY0001 1 &/ 1.52 2 ( ) 5 5 P-01-11 P-06-3 4 XL-OMY0001 2.2 A6063 SUS316L SUS304 5 P11 FKM 3 3[]P8 60 , 245250Hz 30m/s 5 XL-OMY0001 /H0 H4 H5 510% O 0.1mm0.2mm 6 P13 3 3 P7P8 5 P11 7 P14 P18 6 XL-OMY0001 33 5 P11 16 25 40 50 XLA16-30-1-2 XLA25

HRX-OM-W032

B Contact output signal 3 selected alarm Sets the alarm selected for the contact output signal 3.