Slit Valve

width (mm) 32 x 222 46 x 236 50 x 336 Applicable wafer size Symbol 32 Note) Height 200 mm 46236 50336 300 mm Note) Neither cassette type Half MESK nor cassette type Full MESK are set.

AR425 to 935

VY1 How to Order G PPA Internal pilot operated relieving type regulator AR 25 4 BG R 02 Option Nil Flow direction: Right Left AL None Regulator R Body size Accessory 4 6 8 9 1 2 1 Symbol Description Applicable model Port size 1 Nil 1 4 02 03 04 06 10 12 14 20 2 1 With bracket AR45 to 65 AR25 AR35 B 8 3 2 G46-10-02 G46-2-02 Gauge 1 2 3 4 G Regulating pressure range Pressure gauges are shipped

Series 10-SZ3000 5 Port Solenoid Valve Plug-in Type [Option]

pins) Connector entry direction Note Symbol Note Symbol Stations Stations 1: Perpendicular connector 2: Lateral connector 02 02 2 stations 2 stations Double wiring Double wiring LOCK FREE FREE 08 04 8 stations 4 stations LOCK 02 02 2 stations 2 stations Specified layout (Up to 16 solenoids possible) Specified layout (Up to 8 solenoids possible) 16 08 16 stations 8 stations Note 1) Double

5 Port Solenoid Valve Series SZ3000 Plug-in Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

ribbon cable connector (10 pins) Connector entry direction Note Symbol 02 Note Symbol 02 Stations Stations 1: Perpendicular connector 2: Lateral connector 2 stations 2 stations Double wiring specifications Double wiring specifications LOCK FREE LOCK FREE 08 02 04 02 8 stations 4 stations 2 stations 2 stations Specified layout (Up to 16 solenoids possible) Specified layout (Up to 8 solenoids

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 116 lb

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 90 lb

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 120 lb

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 117 lb

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 87.00000 lb

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 93.00000 lb

Precision Regulator

Setting spring Setting knob Flapper Diaphragm C Nozzle Diaphragm A Fixed orifice Diaphragm C SUP.side passage BLEED Exhaust valve SUP OUT Main valve Valve guide Exhaust F i x ed ori f i ce S UP F or ce N F o rce N Nozzle flapper MPa/ m Diaph.(C) m 2 Main valve MPa/ m (S) 1 1 Setting spring N/m Displ Press Press.

High Vacuum L Type Valve

Model Starting Holding Power(W) Current(A) Power(W) Current(A) *G/C/D/T , P5G 36 1.5 4.8 0.38 P1G 50Hz 30.5 0.47 14.8 0.35 XLS-1660Hz 10 0.27 P2G 50Hz 30 0.24 4.9 0.11 60Hz 2.3 0.10 *G/C/D/T , P5G 47 2.0 5.3 0.5 P1G 50Hz 42 0.62 20 0.46 XLS-2560Hz 13.5 0.36 P2G 50Hz 45 0.35 6.7 0.15 60Hz 3.0 0.12 7 XL*-OMI0013-B 4.

ALB900

Description Material Aluminum casted Aluminum casted Top cover Bottom cover q w VOA301-M V0307E-D-X56 3 port switching valve (for operation control) e 1 VR4152-00-0 GA46-10-01 12702A 12705A NLP-100A PNY-25 SW-100 x 6 x 2 JIS B 2401P3 r t y u i o !0 !

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63 Compact Guide Cylinder/Wide Type MGPW Series

Compact Guide Cylinder/Wide Type MGPW Series 20, 25, 32, 40, 50, 63 How to Order MGP M W 25 M9BW 50 Compact Guide Cylinder Made to Order For details, refer to page 499. Wide type Bearing type M L A Number of auto switches Nil S n Slide bearing Ball bushing High precision ball bushing 2 pcs. 1 pc. n pcs.

Pressure Switch Pressure Switch with T-Spacer Pressure Switch with L-Piping Adapter Pressure Switch with Piping Adapter

The lead length between the switch body and the contact protection box should be less than 1 m, and set it as close as possible. Applicable lead wire dimensions are as follows. Outer sheath: 3.4 Insulator: 1.1 Conductor: 0.64 (3) Check the insulation of the wiring.

5 Port Solenoid Valve Series SQ1000/2000

Double solenoid) Pressure center Exhaust center Series Closed center C3 C4 C8 C6 Dual 3 port valve (3.2) (4) (8) (6) Single SQ130 Metal seal SQ131 Rubber seal SQ230 Metal seal SQ231 Rubber seal 3.2 (0.18) 4.5 (0.25) 11.7 (0.65) 14.8 (0.82) 18 Series SQ1000/2000 How to Order Manifolds SS5Q 3 (-00T) JD0 1 08 D N Series P, R port inch bore size Symbol Series SQ1000 SQ2000 1 2 Options Symbol 02

Electric Actuator / Guide rod Slider

Move M Speed Position Pushing F TriggLV IN pos mm/s mm % % mm 0 Absolute 250 50.00 0 0 1.00 Input 30 Step Data No. Move M Speed Position Pushing F TriggLV In pos mm/s mm % % mm 0 Absolute 250 30.00 0 0 1.00 6. Controller setting software screen explanation Refer to the Help / Easy mode menu in the ACT Controller setting software.

EX600-SEN_eng

NS LED is Off MS LED is off Off URL http://www.smcworld.com PWR(V) Display ST(M) PWR MS NS Displays the network status. for 2 hours each in direction X, Y and Z respectively (De-energized) Displays the module status. Displays the status of the power supply voltage for outputs. Displays the status of the power supply voltage for control and input.

EX500-Sx03_eng

System configuration How to order: EX500-AC 030 SSPS Cable length (L) 003 0.3 [m] Connector Power supply cable GW unit SSPS Socket side: Straight Plug side: Straight With SI unit Valve manifold (SY/SV/VQC/S0700 Series) 005 0.5 [m] Display Description 010 1 [m] SAPA Socket side: Angled Plug side: Angled LED is OFF The power supply for input and control is OFF PWR Thank you for purchasing an

PSxx-OMU0005CN

NPN 2 Y PNP 2 A1 A R NPN 2 + 1 () T PNP 2 + 1 A2 B S NPN 2 + 1 V PNP 2 + 1 1 B D + M SI 3 P psi 2 2: 3kPaMPa 1 ( 2m, ) W M5 M5 01 R1/8 N01 NPT1/8 C4L 4mm C6L 6mm -8No.PS-OMU0005CN-C / A ZS-46-A1 38L (2 ) B ZS-46-A2 38L (2 ) ZS-46-B + ZS-46-D ZS-46-5F 5 2 m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4L 6mm ZS-46-C6L -9No.PS-OMU0005CN-C OUT1 LCD OUT2 LCD 4 ON